The thermal decomposition processes of chemically prepared triruthenium dodecacarbonyl, Ru3(CO)12, were investigated by variable-temperature mass spectrometry (MS) in the gas phase. Ru3(CO)12 was sublimated and merged in a molecular beam of He and CO gases and was heated to a high temperature in an extension tube. Subsequently, it was probed by MS after photoionization at 7.89 eV. CO ligand molecules were sequentially released in the temperature range of 500–900 K, forming Ru3. Among the intermediate cluster compositions, Ru3(CO)7 was the most thermally durable cluster, while Ru3(CO)3, Ru3(CO)5, and Ru3(CO)10 were less durable and decomposed within a narrow temperature range.