AbstractMicroplates are vastly used in MEMS and NEMS devices. Due to size effect, classical theories of continuum mechanics can not be used to model mechanical behaviour of them. Instead, higher order continuum theories should be implemented. Modified Strain Gradient Theory (MSGT) is considered to be one of the most accurate methods for this, considering both theoretical compatibility and numerical accuracy. In this study, two sets of Kirchhoff and twist‐Kirchhoff bending rectangular plate finite elements for MSGT are developed as novel aspects. This is done by first obtaining the weak forms by using variational methods and then deriving the set of algebraic equations for the finite element formulation starting with shape functions. Although non‐conforming, the finite elements are in alignment with the existing models with the given length scale parameters. The plate finite elements are then implemented to existing models. The length scale parameters for MSGT are also identified for gold using the existing experimental results in literature. This study proposes the use of higher order theories for gold microplates for thicknesses less than 40 µm.
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