The structure and the formation mechanism of oxides during internal oxidation have attracted much attention, and extensive studies have been carried out on this subject. Recently, Jang et al. reported the results of atom-probe microanalysis of oxide particles, or solute-oxygen clusters, in an internally oxidized Cu-0.16 at.% Mg alloy. They found that the composition varies from particle to particle even in the same specimen, and reported that some clusters consist only of magnesium atoms. On the basis of the results, they suggested that the oxidation proceeds in this alloy as follows: (1) the solute atoms form clusters, (2) the clusters absorb oxygen atoms to form both hypo- and hyperstoichiometric oxide particles, (3) the particles grow to form the stoichiometric oxide, MgO. They show the presence of Mg atom clusters with no oxygen association. By assuming that the analyzed area is in the unoxidized region, i.e., ahead of the oxidation front, they interpret this observation as evidence for clustering of the solute atoms prior to oxide formation. However, according to the phase diagram, such clustering is not expected in the absence of oxygen, since the solute concentration, 0.16 at.%, is far below the solubility limit at the oxidation temperature of 900[degree]C,more » about 3.5 at.%. In atom probe experiments, it sometimes happens that detection efficiencies for different ion species are considerably different because some experimental parameters are not chosen properly. It seems possible that the data resulted from an unusually low detection efficiency for O ions. Since their conclusion raises an important issue on the mechanism of internal oxidation, it is desirable to examine experimental conditions carefully, and to check the reproducibility of data.« less