Uncoated Microcantilever Research Articles

Low frequency photothermal excitation of AFM microcantilevers

Photothermal excitation at frequencies below the mechanical resonance of the atomic force microscopy (AFM) microcantilever can be utilized in force modulation microscopy, fast force displacement curve acquisition, and tip-based mass spectroscopy. To understand the microcantilever bending response in these modes, accurate models of the thermoelastic response of the AFM microcantilever are needed. We study the sub-resonance photothermal vibrational response of coated and uncoated AFM microcantilevers as a function of laser modulation frequency and spot location. The sub-resonance microcantilever response shows distinct thermoelastic regimes. Below the microcantilever's thermal roll-off frequency, the vibration amplitude is mostly constant. Past this frequency, the vibration amplitude decreases with increasing frequency. At modulation frequencies below the thermal roll-off frequency, the most efficient photothermal laser spot to excite harmonic motion is near the free end of both coated and uncoated microcantilevers. For the tested coated microcantilevers, the most efficient photothermal laser location migrates from near the free end of the microcantilever to near the fixed end as modulation frequency increases. For the tested uncoated microcantilever, the most efficient photothermal laser location remains unchanged at the tested frequencies. To predict the bending response of the coated microcantilever, a bilayer bending model is implemented. At low frequencies, this model underpredicts the bending response compared to experiments by up to 90%. This may be due to neglecting microcantilever bending contributed by a through-thickness temperature gradient. Our results illustrate different aspects of the frequency-dependent photothermal laser spot optimization that can guide users to maximizing microcantilever response to a given input power.

Effect of biaxial curvature on the resonance frequency of uncoated microcantilevers

Microcantilevers (MCs) are extensively studied as physical, chemical and biological sensors in dynamic mode, where the shift in resonance frequency due to the adsorption of target analytes/biomolecules on their surface is measured. However, surface stress generated during adsorption or microfabrication induced curvature inherently present in MCs can influence the observed frequency shift, introducing significant errors in the quantification of the analyte sensing response. In spite of several studies over the past four decades, the role of surface stress/curvature on the stiffness and thus resonance frequency of MCs is not well established. Interestingly, this effect also depends on MC dimensions and is not completely understood. In the present work, we address this problem and demonstrate that the presence of transverse curvature significantly influences the resonance frequency and this effect critically depends on width by length ratio (W/L) of MCs. For this purpose, we have fabricated uncoated SiO2 MCs of various dimensions with inherent biaxial curvature. Our experiments on these devices revealed that when W/L of MCs is < 0.16, resonance frequency shift is independent of curvature whereas it is directly proportional to the same when W/L is between 0.16 and 0.35. These results are explained on the basis of curvature induced nonlinear stiffening of MCs and clamping geometric effects. Interestingly, a further increase in W/L (>0.4) was found to marginally reduce the observed frequency shift and is attributed to the presence of competing non-linear plate softening effects at these dimensions. Finally, we have compared our results with various experimental studies and theoretical models reported in the literature.

Microcantilever sensors coated with a sensitive polyaniline layer for detecting volatile organic compounds.

This paper describes a silicon cantilever sensor coated with a conducting polymer layer. The mechanical response (deflection) of the bimaterial (the coated microcantilever) was investigated under the influence of several volatile compounds-methanol, ethanol, acetone, propanol, dichloroethane, toluene and benzene. The variations in the deflection of the coated and uncoated microcantilevers when exposed to volatile organic compounds were evaluated, and the results indicated that the highest sensitivity was obtained with the coated microcantilever and methanol. The uncoated microcantilever was not sensitive to the volatile organic compounds. An increase in the concentration of the volatile organic compound resulted in higher deflections of the microcantilever sensor. The sensor responses were reversible, sensible, rapid and proportional to the volatile concentration.

Origin of bending in uncoated microcantilever - Surface topography?

We provide direct experimental evidence to show that difference in surface topography on opposite sides of an uncoated microcantilever induces bending, upon exposure to water molecules. Examination on opposite sides of the microcantilever by atomic force microscopy reveals the presence of localized surface features on one side, which renders the induced stress non-uniform. Further, the root mean square inclination angle characterizing the surface topography shows a difference of 73° between the opposite sides. The absence of deflection in another uncoated microcantilever having similar surface topography confirms that in former microcantilever bending is indeed induced by differences in surface topography.

Microcantilever sensors coated with doped polyaniline for the detection of water vapor

In the present work, PANI (polyaniline) emeraldine salt (doped) and base (dedoped) were used as the sensitive layer of a silicon microcantilever, and the mechanical response (deflection) of the bimaterial (coated microcantilever) was investigated under the influence of humidity. PANI in the emeraldine base oxidation state was obtained by interfacial synthesis and was deposited on the microcantilever surface by spin-coating (dedoped). Next, the conducting polymer was doped with 1 M HCl (hydrochloric acid). A four-quadrant AFM head with an integrated laser and a position-sensitive detector (AFM Veeco Dimension V) was used to measure the optical deflection of the coated microcantilever. The deflection of the coated (doped and undoped PANI) and uncoated microcantilever was measured under different humidities (in triplicate) at room pressure and temperature in a closed chamber to evaluate the sensor's sensitivity. The relative humidity (RH) in the chamber was varied from 20% to 70% using dry nitrogen as a carrier gas, which was passed through a bubbler containing water to generate humidity. The results showed that microcantilevers coated with sensitive layers of doped and undoped PANI films were sensitive (12,717 ± 6% and 6,939 ± 8%, respectively) and provided good repeatability (98.6 ± 0.015% and 99 ± 0.01%, respectively) after several cycles of exposure to RH. The microcantilever sensor without a PANI coating (uncoated) was not sensitive to humidity. The strong effect of doping on the sensitivity of the sensor was attributed to an increased adsorption of water molecules dissociated at imine nitrogen centers, which improves the performance of the coated microcantilever sensor. Moreover, microcantilever sensors coated with a sensitive layer provided good results in several cycles of exposure to RH (%).

Remote optical detection using microcantilevers

The feasibility of microcantilever-based optical detection is demonstrated. Microcantilevers may provide a simple means for developing single-element and multielement infrared sensors that are smaller, more sensitive, and lower in cost than quantum well, thermoelectric, or bolometric sensors. Here we specifically report here on an evaluation of laboratory prototypes that are based on commercially available microcantilevers, such as those used in atomic force microscopy. In this work, optical transduction techniques were used to measure microcantilever response to remote sources of thermal energy. The noise equivalent power at 20 Hz for room temperature microcantilevers was found to be approximately 3.5 nW/√Hz, with a specific detectivity of 3.6×107 cm Hz1/2/W, when an uncoated microcantilever was irradiated by a low-power diode laser operating at 786 nm. Operation is shown to be possible from dc to kHz frequencies, and the effect of cantilever shape and the role of absorptive coatings are discussed. Finally, spectral response in the midinfrared is evaluated using both coated and uncoated microcantilevers.