Intermetallic compounds of molybdenum and tungsten implanted into H13 steel and aluminium were measured by transmission electron microscopy (TEM) and X-ray diffraction. Ions extracted from a metal vapour vacuum arc source with around 25–100 keV energy and a dose range (1–5) × 10 17 cm -2 were used for implantation. The ion fluxes were 25, 47, 68 and 320 μA cm -2. It was found from the results that the target temperature increases with increasing ion flux from 310 °C (25 μA cm -2) to 580 °C (68 μA cm -2). Intermetallic compounds such as FeMo, Al 2Mo, Al 12Mo, Fe 7W, Fe 2W and Al 5W, were easily observed by TEM and X-ray diffraction when the flux was greater than 47 μA cm -2. In situ observation in a high voltage transmission electron microscope (HVEM) was used to investigate the structure and formation of intermetallic compounds of molybdenum-implanted H13 steel. The electron diffraction pattern of FeMo precipitates appeared at 500 °C. Recrystallization and grain growth occurred at 650 °C.
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