ADVERTISEMENT RETURN TO ISSUEPREVCommunicationNEXTGet e-AlertsAtomic Layer Deposition of Molybdenum Oxides with Tunable Stoichiometry Enables Controllable Doping of MoS2Michael J. MoodyMichael J. MoodyDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Michael J. Moody, Alex HenningAlex HenningDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Alex Henninghttp://orcid.org/0000-0003-0419-4992, Titel JurcaTitel JurcaDepartment of Chemistry, Northwestern University, Evanston, Illinois 60208, United StatesMore by Titel Jurcahttp://orcid.org/0000-0003-3656-912X, Ju Ying ShangJu Ying ShangDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Ju Ying Shang, Hadallia BergeronHadallia BergeronDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Hadallia Bergeron, Itamar BallaItamar BallaDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Itamar Ballahttp://orcid.org/0000-0002-9358-5743, Jack N. OldingJack N. OldingGraduate Program in Applied Physics, Northwestern University, Evanston, Illinois 60208, United StatesMore by Jack N. Oldinghttp://orcid.org/0000-0001-6907-5316, Emily A. WeissEmily A. WeissDepartment of Chemistry, Northwestern University, Evanston, Illinois 60208, United StatesDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Emily A. Weisshttp://orcid.org/0000-0001-5834-463X, Mark C. HersamMark C. HersamDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesDepartment of Chemistry, Northwestern University, Evanston, Illinois 60208, United StatesDepartment of Medicine, Northwestern University, Evanston, Illinois 60208, United StatesDepartment of Electrical Engineering and Computer Science, Northwestern University, Evanston, Illinois 60208, United StatesMore by Mark C. Hersamhttp://orcid.org/0000-0003-4120-1426, Tracy L. LohrTracy L. LohrDepartment of Chemistry, Northwestern University, Evanston, Illinois 60208, United StatesMore by Tracy L. Lohr, Tobin J. MarksTobin J. MarksDepartment of Chemistry, Northwestern University, Evanston, Illinois 60208, United StatesDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United StatesMore by Tobin J. Markshttp://orcid.org/0000-0001-8771-0141, and Lincoln J. Lauhon*Lincoln J. LauhonDepartment of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States*L. J. Lauhon. E-mail: lauhon@northwestern.eduMore by Lincoln J. Lauhonhttp://orcid.org/0000-0001-6046-3304Cite this: Chem. Mater. 2018, 30, 11, 3628–3632Publication Date (Web):May 17, 2018Publication History Received19 March 2018Revised15 May 2018Published online17 May 2018Published inissue 12 June 2018https://doi.org/10.1021/acs.chemmater.8b01171Copyright © 2018 American Chemical SocietyRIGHTS & PERMISSIONSArticle Views2729Altmetric4Citations22LEARN ABOUT THESE METRICSArticle Views are the COUNTER-compliant sum of full text article downloads since November 2008 (both PDF and HTML) across all institutions and individuals. These metrics are regularly updated to reflect usage leading up to the last few days.Citations are the number of other articles citing this article, calculated by Crossref and updated daily. Find more information about Crossref citation counts.The Altmetric Attention Score is a quantitative measure of the attention that a research article has received online. Clicking on the donut icon will load a page at altmetric.com with additional details about the score and the social media presence for the given article. Find more information on the Altmetric Attention Score and how the score is calculated. Share Add toView InAdd Full Text with ReferenceAdd Description ExportRISCitationCitation and abstractCitation and referencesMore Options Share onFacebookTwitterWechatLinked InReddit Read OnlinePDF (1 MB) Get e-AlertsSupporting Info (1)»Supporting Information Supporting Information SUBJECTS:Atomic layer deposition,Get e-Alerts Get e-Alerts