The thermal expansion coefficients of the hexagonal SiC polytypes 4H and 6H and with Al and N dopants have been determined for temperatures between 300 and 1770 K. Further, a set of the room temperature lattice parameters in dependence on doping with N, Al, and B has been obtained. Data for the thermal expansion were taken on a triple axis diffractometer for high energy x rays with a photon energy of 60 keV, which allows the use of large single crystals with a volume of at least 6×6×6 mm3 without the need to consider absorption. The room temperature measurements for samples with different dopants have been performed on a four-circle diffractometer. The thermal expansion coefficients along the a- and c-directions, α11 and α33, increase from 3×10−6 K−1 at 300 K to 6×10−6 K−1 at 1750 K. It is found that α11 and α33 are isotropic within 107 K−1. At high temperatures both coefficients for doped samples are ∼0.2×10−6 and 0.3×10−6 K−1 lower than for the undoped material.
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