Transmission Electron Microscopy Sample Preparation Research Articles

Artifact-free sample preparation of metal thin films using Xe plasma-focused ion beam milling for atomic resolution and in situ biasing analyses

The focused ion beam (FIB) technique using Ga ion beams is generally employed for transmission electron microscopy (TEM) sampling owing to its location-specific beam controllability on materials. However, Ga ion beam bombardment-induced damage hinders reliable structural analysis. Furthermore, Ga ions implanted in the damaged surface layer substantially lower the chemical stability of the samples, such as metal thin films. Here, aiming for atomic-level interface structural analysis, we propose a useful approach for the TEM sample preparation of heteroepitaxial Ag/Cu metal films without physical damage or chemical instabilities using the Xe plasma FIB (PFIB) system. Xe plasma-assisted sampling ensured that the interface structure of the Ag/Cu metal film remained intact; in contrast, the sample prepared using the focused Ga ion beam was damaged by elemental mixing. Furthermore, the sample prepared by Xe plasma milling exhibited robust structural stability over time after exposure to air in contrast to the sample prepared by Ga-ion milling, which induced structural decomposition owing to oxidation. In addition to the static structural analysis, the Cu thin film sample prepared by Xe PFIB exclusively exhibited pristine structural properties under in situ electrical biasing experiments, thus confirming the feasibility of conducting a fundamental study of Cu electromigration without artifacts.

An Integrated Solution to FIB-Induced Hydride Artifacts in Pure Zirconium.

The preparation method of transmission electron microscopy (TEM) samples for pure zirconium was successfully executed using a focused ion beam (FIB) system. These samples unveiled artifact hydrides induced during the FIB sample preparation process, which resulted from stress damage, ion implantation, and ion irradiation. An innovative solution was proposed to effectively reduce the effect of artifact hydrides for FIB-prepared samples of hydrogen-sensitive materials, such as zirconium alloys. This development lays the groundwork for further research on the micro/nanostructures of zirconium alloys after ion irradiation, thereby facilitating the study of corrosion mechanisms and the prediction of service life for nuclear fuel cladding materials. Furthermore, the solution proposed in this study is also applicable to TEM sample preparation using FIB for other hydrogen-sensitive materials such as titanium, magnesium, and palladium.

Characterization of Mass, Diameter, Density, and Surface Properties of Colloidal Nanoparticles Enabled by Charge Detection Mass Spectrometry.

A variety of scattering-based, microscopy-based, and mobility-based methods are frequently used to probe the size distributions of colloidal nanoparticles with transmission electron microscopy (TEM) often considered to be the "gold standard". Charge detection mass spectrometry (CDMS) is an alternative method for nanoparticle characterization that can rapidly measure the mass and charge of individual nanoparticle ions with high accuracy. Two low polydispersity, ∼100 nm diameter nanoparticle size standards with different compositions (polymethyl methacrylate/polystyrene copolymer and 100% polystyrene) were characterized using both TEM and CDMS to explore the merits and complementary aspects of both methods. Mass and diameter distributions are rapidly obtained from CDMS measurements of thousands of individual ions of known spherical shape, requiring less time than TEM sample preparation and image analysis. TEM image-to-image variations resulted in a ∼1-2 nm range in the determined mean diameters whereas the CDMS mass precision of ∼1% in these experiments leads to a diameter uncertainty of just 0.3 nm. For the 100% polystyrene nanoparticles with known density, the CDMS and TEM particle diameter distributions were in excellent agreement. For the copolymer nanoparticles with unknown density, the diameter from TEM measurements combined with the mass from CDMS measurements enabled an accurate measurement of nanoparticle density. Differing extents of charging for the two nanoparticle standards measured by CDMS show that charging is sensitive to nanoparticle surface properties. A mixture of the two samples was separated based on their different extents of charging despite having overlapping mass distributions centered at 341.5 and 331.0 MDa.

Preparing Retinal Organoid Samples for Transmission Electron Microscopy.

Retinal organoids (ROs) are a three-dimensional culture system mimicking human retinal features that have differentiated from induced pluripotent stem cells (iPSCs) under specific conditions. Synapse development and maturation in ROs have been studied immunocytochemically and functionally. However, the direct evidence of the synaptic contact ultrastructure is limited, containing both special ribbon synapses and conventional chemical synapses. Transmission electron microscopy (TEM) is characterized by high resolution and a respectable history elucidating retinal development and synapse maturation in humans and various species. It is a powerful tool to explore synaptic structure in ROs and is widely used in the research field of ROs. Therefore, to better explore the structure of RO synaptic contacts at the nanoscale and obtain high-quality microscopic evidence, we developed a simple and repeatable method of RO TEM sample preparation. This paper describes the protocol, reagents used, and detailed steps, including RO fixation preparation, post fixation, embedding, and visualization.

Systematic study of FIB-induced damage for the high-quality TEM sample preparation

Nowadays, a focused Ga ion beam (FIB) with a scanning electron microscopy (SEM) system has been widely used to prepare the thin-foil sample for transmission electron microscopy (TEM) or scanning TEM (STEM) observation. An establishment of a solid strategy for a reproducible high-quality sample preparation process is essential to carry out high-quality (S)TEM analysis. In this work, the FIB damages introduced by Ga+ beam were investigated both experimentally and stopping and range of ions in matter (SRIM) simulation for silicon (Si), gallium nitride (GaN), indium phosphide (InP), and gallium arsenide (GaAs) semiconductors. It has been revealed that experimental investigations of the FIB-induced damage are in good agreement with SRIM simulation by defining the damage as not only “amorphization” but also “crystal distortion”. The systematic evaluation of FIB damages shown in this paper should be indispensable guidance for reliable (S)TEM sample preparation.

Enabling focused ion beam sample preparation for application in reverse tip sample scanning probe microscopy

Focused ion beam (FIB) has become a powerful tool for transmission electron microscopy sample preparation in the nanoelectronics industry and has in recent years also shown its benefits for specific preparation steps in electrical scanning probe microscopy (SPM). Most recently, a novel SPM approach – so-called reverse tip sample (RTS) SPM – has been proposed in which the position of sample and tip are switched compared to standard SPM; in RTS SPM the sample is attached to the end of a cantilever beam. To achieve this configuration, the region of interest must first be extracted from a substrate and then needs to be reliably fixed to the cantilever by FIB. Therefore, we have explored and developed dedicated FIB preparation methods for RTS SPM in this work. Our established procedures ensure a strong mechanical and good electrical connection of the sample to the cantilever for both cross-section and top view sample preparation. Furthermore, we introduce an approach for mounting samples from a full wafer size workflow. This paper presents the developed FIB procedures and discusses the quality and stability of all mounted samples and their electrical evaluation in RTS SPM.

Microstructure Study on Very High Cycle Fatigue of an Additively Manufactured Aluminium Alloy via Advanced Characterization Methods

The engineering application of additively manufactured (AM) metallic materials is quite limited by their fatigue behaviors, which are very inconsistent with that of conventionally wrought or cast ones. Here, based on advanced material characterization techniques, such as focused ion beam (FIB), scanning electron microscopy (SEM), and transmission electron microscopy (TEM), the microstructures underneath fracture surfaces were thoroughly investigated in an AM aluminum (AlSi10Mg) alloy with horizontal and vertical building orientation enduring very high cycle fatigue (VHCF) loading under the stress ratios R = −1, 0, and 0.5. Two VHCF failure specimens A and B were representatively selected to further examine SEM and TEM sample preparation via FIB milling. Specimen A was horizontally printed and failed at R = −1; specimen B was vertically printed and failed at R = 0. TEM samples A1 and B1 were lifted from locations near the crack initiation sites on the fracture surfaces of specimens A and B; The locations of TEM samples A2 and B2 kept away from the crack origin sites but still within the “fish-eye” region of crack steady growth. TEM observations show that there was no characteristic microstructure induced by VHCF in different oriented specimens and under various R values.

An evaluation of Ar ion milling in TEM sample preparation by energy-filtered TEM technique

Irradiated materials impose unique challenges when it comes to sample preparation for transmission electron microscopy (TEM) analysis. After the preparation of TEM samples by electrolytic polish, Ar ion milling was usually used to remove the surface contamination, as well as to thin the samples to desired thickness. Therefore, it is necessary to evaluate the advantages and limitations of Ar ion milling technique. In this work, the optimum milling condition with minimal surface artifacts was determined by Ar ion milling with various incident angles and beam energies, and the high-resolution TEM (HR-TEM) examinations confirmed the optimum condition to be 4.0keV Ar ions with incident angles of ±4°. In addition, Ar ion milling and subsequent thickness measurement by energy-filtered TEM (EF-TEM) were conducted to determine the thinning rate. It is found that electrolytic polished TEM lamella has a wedge-shape structure with a very sharp edge, and the thinning rates varied from 9.7±1.4nm/minute to 5.0±2.3nm/minute across the TEM lamella for 4.0keV Ar ions. However, the thinning rates for 2keV and 1keV Ar ions were under the examination limit, and they were supposed not sufficient to thin the tungsten samples. Even though the exact thinning rate varies for different materials, the general trends for the Ar ion milling observed in this study can be used as a guidance.

Visualization of Engineered M13 Phages Bound to Bacterial Targets by Transmission Electron Microscopy.

The filamentous phage M13 is one of the most well-studied and characterized phages, particularly since it was introduced as a scaffold for phage display, a technique to express and evolve fusion proteins on the M13 phage's coat to study protein or peptide binding interactions. Since phages can be engineered or evolved to specifically bind to a variety of targets, engineered M13 phages have been explored for applications such as drug delivery, biosensing, and cancer therapy, among others. Specifically, with the rising challenge of antimicrobial resistance among bacteria, chimeric M13 phages have been explored both as detection and therapeutic agents due to the flexibility in tuning target specificity. Transmission electron microscopy (TEM) is a powerful tool enabling researchers to directly visualize and characterize binding of phages to bacterial surfaces. However, the filamentous phage structure poses a challenge for this technique, as the phages have similar morphology to bacterial structures such as pili. In order to differentiate between bacterial structures and the filamentous phages, here we describe a protocol to prepare TEM samples of engineered M13 phages bound to bacterial cells, in which the phage virions have been specifically labeled by decoration of the major capsid proteins with gold nanoparticles. This protocol enables clear visualization and unambiguous identification of attached filamentous phages within the context of bacterial cells expressing numerous pili.

Proton Radiation Effect on Iron Thermal Oxides: Point Defects, Microstructure & Corrosion Electrochemistry

Iron(Fe)-based alloys, such as austenitic stainless steels, form protective surface oxide layers when exposed to oxygen, aqueous electrolyte, and water vapor, which effectively inhibit corrosion [1]. One attribute that underpins the electrochemical reactivity of surface oxide layers is the presence and properties of charged point defects (e.g. vacancies and interstitials charge compensated by electrons or holes), which govern the rate and mechanism of ionic transport when exposed to an oxidizing environment such as an aqueous electrolyte [2,3,4]. However, the effect of radiation on the relationship between point defects, oxide microstructure, and oxidation behavior is poorly understood. Structural materials used in nuclear applications are particularly susceptible to radiation damage, which can degrade the underlying surface oxides. To investigate this phenomenon, thermally oxidized pure Fe was selected as a model material system to study radiation-induced defects in iron oxide scales [3]. Iron oxides were fabricated by thermal oxidation of pure Fe metal in air at 400°C, 600oC, and 800°C for 1 hour. Each oxides layer exhibits an outer hematite (α-Fe2O3) and inner magnetite (Fe3O4)/wüstite (FeO) layers with varying thickness depending on the oxidation conditions. These oxides were then irradiated with 200 keV, 0.03 dpa protons at room temperature. The oxide microstructure and phase compositions were characterized with transmission electron microscopy (TEM) coupled with electron energy loss spectroscopy (EELS). These results were corroborated with X-Ray diffraction (XRD) and Raman spectroscopy analysis. The relative vacancy concentrations and size distributions in the oxide layers were investigated using positron annihilation spectroscopy (PAS) and positron annihilation lifetime spectroscopy (PALS) techniques. Lastly, these oxides were exposed to a 0.1 M borate buffer solution (pH 9.2) at applied potential where corrosion reactivity was governed by interfacial reactions and ionic defects to regulate the growth processes observed. The potentials were cycled over the ranges where oxides growth and reduction occurred involving Fe/Fe(II)/Fe(III) reactions at a pH which suppressed chemical reactions at the oxide/electrolyte interface and would lead to solubilization of Fe species. The subsequent oxidation, reduction, and semiconductor properties of the oxides were evaluated using AC and DC electrochemical methods, both with and without prior irradiation. Current results demonstrate that radiation damage can manifest itself in the form of vacancy clustering and possible maghemite (γ-Fe2O3) formation. These phenomena were corroborated with donor density and diffusivity values calculated using Mott-Schottky analysis and electrochemical impedance spectroscopy (EIS) analysis and equivalent circuit model (ECM) interpretation, respectively. Radiation damages to the outer rate-regulating α-Fe2O3 layer correlates with enhanced anodic current density corresponding to Fe/Fe(II)/Fe(III) reactions. However, proton radiation may also interact with the metal/oxide and oxide/oxide interfaces depending on the oxide structure and H+ beam penetration depth, leading to either degradation or improvement in the Fe-oxide corrosion responses. Nevertheless, the damage persists and can continue to impact corrosion mechanisms long after the irradiation source is removed. The multiple techniques adopted, each characterizing a material property of a different length scale (from meso-, micro-, to macroscopic) enable us to hypothesize the roles that point defects played after irradiation and during corrosion and how the radiation-induced changes in the defect characteristics influence corrosion electrochemistry. Acknowledgment Research primarily supported as part of the fundamental understanding of transport under reactor extremes (FUTURE), an Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Basic Energy Sciences. Utilization of the Malvern-Panalytical Empyrean diffractometer were supported by Nanoscale Materials Characterization Facility with National Science Foundation under award CHE-2102156. The TEM sample preparation and characterization was performed at the Analytical Instrumentation Facility at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (award number ECCS-1542015). LANL is operated by Triad National Security, LLC, for the National Nuclear Security Administration of the U.S. DOE (Contract No. 89233218CNA000001).

Optimized procedure for conventional TEM sample preparation using birefringence

Specimens for quality transmission electron microscopy (TEM) analyses must fulfil a range of requirements, which demand high precision during the prior preparation process. In this work, an optimized procedure for conventional TEM specimen preparation is presented that exploits the thickness-dependence of interference colors occurring in birefringent materials. It facilitates the correct estimation of specimen thickness to avoid damage or breaking during mechanical thinning and reduces ion-milling times below 30minutes. The benefits of the approach are shown on sapphire and silicon carbide cross-section samples. The presented method is equally suitable for assessing specimen thickness during dimpling and wedge-polishing, and is particularly useful at thicknesses below 20 μm, where the accuracy of mechanical techniques is insufficient. It is precise enough to be employed for a visual thickness estimation during the thinning process, but can be additionally optimized by analyzing the RGB spectrum of the occurring interference colors.

Beginners guide to sample preparation techniques for transmission electron microscopy

Background purpose: The revolution in microscopy came in 1930 with the invention of electron microscope. Since then, we can study specimens on ultrastructural and even atomic level. Besides transmission electron microscopy (TEM), for which specimen preparation techniques will be described in this article, there are also other types of electron microscopes that are not discussed in this review. Materials and methods: Here, we have described basic procedures for TEM sample preparation, which include tissue sample preparation, chemical fixation of tissue with fixatives, cryo-fixation performed by quick freezing, dehydration with ethanol, infiltration with transitional solvents, resin embedding and polymerization, processing of embedded specimens, sectioning of samples with ultramicrotome, positive and negative contrasting of samples, immunolabeling, and imaging. Conclusion: Such collection of methods can be useful for novices in transmission electron microscopy.

A method for extraction of exosomes from breast tumour cells and characterisation by transmission electron microscopy.

Exosomes can not only be used as markers of tumour metastasis but also be used for noninvasive diagnosis of clinical diseases, which holds significant medical research value. Observing the morphology and distribution of exosomes using transmission electron microscopy (TEM) is highly significant. In this study, we use breast tumour cell (MDA-MB-231) exosomes as a representative sample and focus on the extraction and purification of exosomes, as well as the investigation of optimal conditions for the observation of exosomes using TEM. Through comparative tests, we obtained the optimal dilution concentration and staining method for TEM of exosomes, the best dilution concentration is 100 times, the best negative staining time is 1.5min. Western blotting and scanning electron microscopy (SEM) confirmed the presence of exosome. The particle size experiment shows that the size of exosomes is mainly distributed between 60nm and 150nm. This method provides a reference for TEM sample preparation of subcellular structures and small molecular biomaterials other than exosomes.

The Casting and Hot Forging of Low-Carbon Copper-Bearing Steel and Its Substructural Characterization

The casting of metal alloys followed by hot forging is a widely used manufacturing technology to produce a homogeneous microstructure. The combination of mechanical and thermal energy envisages the microstructural properties of metal alloys. In the present investigation, a metal alloy of composition 0.05C-1.52Cu-1.51Mn (in weight %) was cast in an induction furnace using a zirconia crucible. The melt pool was monitored using optical emission spectroscopy (OES) to maintain the desired composition. The as-cast block was then subjected to forging under a pneumatic hammer of 0.5 t capacity so that any casting defects were eliminated. The as-cast block was reheated to a temperature of 1050 °C and held at that temperature for 6 h to homogenize, followed by hammering with a 50% strain using a pneumatic hammer. The microhardness was calculated using a Vickers microhardness testing apparatus. The microstructure characterization of the processed alloy was carried out using an optical microscope, electron backscattered diffraction (EBSD), energy-dispersive X-ray spectroscopy (EDXA), and a transmission electron microscope (TEM). The sample for optical microscopy was cut using a diamond cutter grinding machine and surface polishing was carried out using emery paper. Further, mechanical polishing was performed to prepare the samples for EBSD using a TEGRAPOL polishing machine. The EBSD apparatus was operated at a 20 kV accelerating voltage, 25 mm from the gun, and with a 60 µ aperture size. HKL Technology Channel 5 Software was used for the post-processing of EBSD maps. The procedure of standard polishing for OES and TEM sample preparation was followed. Recrystallization envisages equiaxed grain formation in hot forging; hence, the strain-free grains were observed in the strained matrix. The lower distribution of recrystallized grains indicated that the driving force for recrystallization was not abundant enough to generate a fully recrystallized microstructure. The fractional distribution of the misorientation angle between 15 and 60° confirms the formation of grain boundaries (having a misorientation angle greater than 15°) and dislocations/subgrain/substructures (having a misorientation angle less than 15°). The fraction of misorientation angle distribution was higher between the angles 0.5 and 6.5°; afterwards, it decreased for higher angles. The substructure was observed in the vicinity of grain boundaries. The softening process released certain strains, but still, the dislocation was observed to be deposited mostly in the vicinity of grain boundaries and at the grain interior. The fine precipitates of the microalloying element copper were observed in the range of size in nanometers. However, the densities of these precipitates were limited and most of these precipitates were deposited at the grain interior. The microhardness of 210.8 Hv and mean subgrain size of 1.61 µ were observed the enhanced microhardness was due to the limited recrystallized grains and accumulation of dislocations/subgrain/substructures.

Flash electropolishing of BCC Fe and Fe-based alloys

The preparation of transmission electron microscopy (TEM) samples is a critical step in the characterization of materials, and the focused ion beam (FIB) technique is a commonly used method. However, a significant limitation of this technique is the FIB-induced damages on the foil surfaces, which can obscure the real features of interest, particularly in radiation effects studies. To overcome this limitation, this study presents a detailed description of the flash electropolishing technique, which can be used to remove the FIB damage from samples. The flash electropolishing technique has been successfully applied to a range of materials, including Fe, Fe-based model alloys, commercial Fe-Cr alloys, and advanced Fe-Cr alloys, both in their as-received and ion-irradiated states. Furthermore, the parameters used for Fe-Cr model alloys can be adjusted for commercial and advanced alloys with minimal modifications. The study also examined the effects of electropolishing variables, such as perchloric acid concentration, electropolishing temperature, Cr concentration, and voltage. Qualitatively, a general trend and scoping test strategy is explored in our experiments. Overall, the flash electropolishing technique offers a promising solution to the challenges posed by FIB-induced damages in the preparation of TEM samples.

Stability of the Interface Between LIPON and LCO During TEM Sample Preparation by FIB.

An amorphous interphase between lithium phosphorus oxynitride (LIPON) solid electrolyte and lithium cobalt oxide (LCO) has been reported recently in several electron microscopy studies of Li ion thin-film micro-batteries (TFMB), along with its implications to battery operation. However, the origin of the observed interphase at the as-made LIPON/LCO interface remained obscure. In this work, this interface has been characterized comprehensively by scanning electron microscope (SEM) imaging at all steps of the in situ focused ion beam (FIB) lift-out procedure for transmission electron microscopy (TEM) sample preparation. It was found that the interphase is formed during TEM lamella preparation when the portion of LIPON layer contained within the lamella is physically disconnected from the rest of the LIPON layer by FIB. Therefore, it was demonstrated that a disordered interphase can form in LCO at its interface with LIPON during TEM sample preparation by the FIB lift-out procedure and that subtle nature of the interphase formation makes it likely to go unnoticed during the preparation. This interphase was not produced even after galvanostatic charging of a battery with a Li metal anode but inevitably appeared after the FIB lift-out of that sample.

Wide-gamut structural colours on oakblue butterflies by naturally tuned photonic nanoarchitectures.

The iridescent structural colours of butterflies, generated by photonic nanoarchitectures, often function as species-specific sexual signals; therefore, they are reproduced precisely from generation to generation. The wing scales of oakblue hairstreak butterflies (genus Arhopala, Theclinae, Lycaenidae, Lepidoptera) contain multi-layer photonic nanoarchitectures, which can generate a wide range of structural colours, from violet to green. By scanning (SEM) and cross-sectional transmission electron microscopy (TEM) investigation, the colour tuning mechanism of the cover scales was explored. We revealed that the characteristic size change of structural elements in similar photonic nanoarchitectures led to different structural colours that were examined by various reflectance spectrophotometry techniques. The measured structural properties of the naturally tuned photonic nanoarchitectures were used to calculate wing reflectances, which were compared with the measurement results. We found that the simulated structural colours were systematically redshifted by 95-126 nm as compared with the measured normal-incidence reflectance results. This is attributed to the swelling of the chitinous multi-layer structures during the standard TEM sample preparation and the tilt of the cover scales, which both affect the apparent layer thicknesses in the TEM cross-sections. We proposed a simulation correction and compared the results with the layer thicknesses measured on cryogenically prepared non-embedded SEM cross-sections.

Improvement of Quantitative STEM/EDXS Analyses for Chemical Analysis of Cu(In,Ga)Se2 Solar Cells with Zn(O,S) Buffer Layers

Abstract Energy-dispersive X-ray spectroscopy (EDXS) in a transmission electron microscope is frequently used for the chemical analysis of Cu(In,Ga)Se2 (CIGS) solar cells with high spatial resolution. However, the quantification of EDXS data is complicated due to quantification errors and artifacts. This work shows how quantitative EDXS analyses of CIGS-based solar cells with Zn(O,S) buffer and ZnO-based window layers can be significantly improved. For this purpose, CIGS-based solar cells and a reference sample with a stack of Zn(O,S) layers with different [O]/[S] ratios were analyzed. For Zn(O,S), the correction of sample-thickness-dependent absorption of low-energy O–Kα X-rays significantly improves the results of quantitative EDXS. Absorption of characteristic X-rays in CIGS is less relevant. However, for small transmission electron microscopy (TEM) sample thicknesses, artifacts can occur due to material changes by focused-ion-beam (FIB)-based preparation of TEM samples, electron-beam-induced damage, and oxidation of the sample surface. We also show that a Pt-protection layer, deposited on the sample surface before FIB preparation of TEM lamellae, can induce artifacts that can be avoided by first depositing a carbon layer.

An Epoxy‐Free Sample Preparation Approach to Enable Imaging of Ionomer and Carbon in Polymer Electrolyte Membrane Fuel Cells

AbstractPerformance and durability of electrodes in proton exchange membrane fuel cells (PEMFCs), as one of the most promising zero‐emission power generation technologies, depend on the composition, microstructure, and distribution of its components—metal catalyst, carbon support, and ionomer. Their improvement requires an in‐depth understanding of the electrodes’ structure‐property‐performance relationship, for which transmission electron microscopy (TEM) has been an invaluable tool. However, the conventional TEM sample preparation, namely epoxy‐embedding ultramicrotomy, poses impediments in imaging ionomer and distinguishing it from carbon. Therefore, in this research, an epoxy‐free ultramicrotome technique is implemented on beginning‐of‐life (BOL) and end‐of‐life (EOL) PEMFC samples. For the first time, TEM and electron tomography‐TEM images reveals fascinating details of the ionomer network, carbon particles’ structure, and Pt distribution in BOL, as well as their structural changes after the cell degradation. Finally, the structural descriptors, extracted by a proprietary quantification method, are correlated with visual observations.

Warp-Free TEM Sample Preparation Methods Using FIB/SEM Systems.

Warping is a limiting factor when preparing transmission electron microscopy (TEM) samples using focused ion beam (FIB)/scanning electron microscope (SEM) systems. The conventional FIB sputtering process leaves at least one side of the lamella too thin to provide structural support to offset inherent stresses. As a result, warping can occur impacting imagining and reducing the potential size of lamellae. For example, capturing more than a few back-end metal layers in a 3 μm wide cross-section lamella can be difficult. Frequently, TEM analysts must perform multiple stage adjustments to analyze such a sample. In this paper, two methods are presented that enable FIB/SEM operators to prepare TEM samples where the thinned region of interest is surrounded by thick structures. As a result, these methods reduce warping and enable the fabrication of TEM lamellae not possible by conventional means. For example, these methods have been used to produce a 10 μm wide by 8 μm tall cross-section TEM sample that captured front-end transistors and 14 back-end metal layers. Furthermore, warping was so limited that only one alignment was needed by the TEM analyst to complete the imaging of the sample. The methods, called the horizontal bracing and window methods, make use of the deposition of low-Z amorphous films that are electron transparent in the TEM.