The SPICA far-infrared instrument (SAFARI), one of instruments of the space infrared telescope for cosmology and astrophysics, requires a calibration source assembly to calibrate the transition edge sensor readout circuits. A high-performance integrating sphere working at SAFARI wavelength (34-230 µm) is essential. A novel process for preparing terahertz integrating spheres was developed. The aluminum surfaces after sandblasting, wet-etching, and gold plating processes demonstrate rough morphology but high reflectance of 0.91 in 1-10 THz. The spatial distribution of the measured output power excellently agrees with the numerical simulation results based on the assumption of uniform surface radiation at the output port.