With the rapid progress and mass production of integrated electronic devices in micro and nanometer scale, it is urgent to develop a technology that can monitor surface temperature distribution of integrated device for the purpose of optimizing the device design. Herein, a thermometry based on time-resolved measurements of luminescence from Li2TiO3: Mn4+ was presented, which uses the ratio of integrated fluorescence intensities in two different time windows. The scheme significantly improves the relative sensitivity of temperature sensing, with maximum value reaching 5.81 % K−1 at 342 K. With the help of a fluorescence microscope and an intensified charge coupled device (ICCD), the scheme based on the time-resolved measurement of Li2TiO3: Mn4+ was successfully applied to the temperature imaging of nickel circuit surface. By comparing the performance of temperature imaging via powder phosphor with that via thin film, it can be found that the thin film can better reflect the true temperature distribution on the surface of nickel circuit. What’s more, the Li2TiO3: Mn4+ thin film also improves the resolution of the temperature imaging (δT=0.61 K). Therefore, it is significant to explore the temperature measurement scheme based on the time-resolved measurement of Li2TiO3: Mn4+ thin film for realizing high-quality temperature imaging.