Low-energy Li + ion scattering is employed to study surface segregation of dilute transition-metal impurities (0.6 wt% of W, Ta, Zr, Nb and Mo) in TiC by applying two scattering angles so as to perform the layer-by-layer analysis of the atomic concentration. A marked face dependence of the impurity distribution is observed in the first five layers. At the close-packed (100) surface, the first layer is strongly enriched with the segregants substituted for the Ti atoms with the concentration of as large as 90 at%, though the deeper layers exhibit no marked enrichment of the segregants. At the TiC(111) surface, on the other hand, the segregants distribute not only at the topmost layer but also in the deeper layers at least up to the fifth layer with almost the same concentration of about 6 at%.