Thin Film Processing Research Articles

Applications of bio-composites in electronics

Abstract Functional biomaterials are being used in many promising industries to improve human quality of life and advance environmental objectives. Consideration has been given to many applications in the domains of medical, electronics, food, and pharmaceuticals. The use of bio-inspired materials enables the creation of more sustainable alternatives that strive to advance environmental preservation while simultaneously ensuring customer satisfaction. It was discovered that biopolymers are used in a number of different industries for the production of a wide range of functional bio-products. These bio-products include organic thin film transistors, organic phototransistors, emitting diodes, photodiodes, photovoltaic solar cells, hybrid dental resins, sustainable medicines, and consumer food packaging. A growth of this magnitude makes it possible to conduct substantial research in order to more inspection of the limitless requests and uses of bio-based composites. In order to fulfill the needs of certain applications, it is necessary to adjust and reassess attributes and parameters– such as hardness, durability, crack toughness, binding, solubility, polarization, plasticity, hydrogen bonding, thermal characteristics, and dielectric behavior. By virtue of their electronic and electrical properties, bio-composites and biopolymers have been put to use in a variety of applications; some includes organic thin-film transistors, electrical applications, electromagnetic insulation, energy harvesting, and thermoelectric processes. Substantial proportions of electronic waste, also referred to as E-waste, are regularly released into the environment due to the continuous growth in the production of electronic devices. Consequently, this leads to substantial environmental and ecological problems caused by the release of non-degradable polymers, hazardous compounds, and toxic heavy metals into the environment. The advancement of biodegradable polymers has significant potential for effectively reducing the environmental burden, since they may be decomposed or absorbed into the surrounding environment without generating any toxic effects. Hence, the purpose of this study is to illustrate the creation of biocompatible composites and their prospective uses in electrical applications.

Ultrafast Time-Domain Spectroscopy Reveals Coherent Vibronic Couplings upon Electronic Excitation in Crystalline Organic Thin Films.

The coherent coupling between electronic excitations and vibrational modes of molecules largely affects the optical and charge transport properties of organic semiconductors and molecular solids. To analyze these couplings by means of ultrafast spectroscopy, highly ordered crystalline films with large domains are particularly suitable because the domains can be addressed individually, hence allowing azimuthal polarization-resolved measurements. Impressive examples of this are highly ordered crystalline thin films of perfluoropentacene (PFP) molecules, which adopt different molecular orientations on different alkali halide substrates. Here, we report polarization-resolved time-domain vibrational spectroscopy with 10 fs time resolution and Raman spectroscopy of crystalline PFP thin films grown on NaF(100) and KCl(100) substrates. Coherent oscillations in the time-resolved spectra reveal vibronic coupling to a high-frequency, 25 fs, in-plane deformation mode that is insensitive to the optical polarization, while the coupling to a lower-frequency, 85 fs, out-of-plane ring bending mode depends significantly on the crystalline and molecular orientation. Comparison with calculated Raman spectra of isolated PFP molecules in vacuo supports this interpretation and indicates a dominant role of solid-state effects in the vibronic properties of these materials. Our results represent a first step toward uncovering the role of anisotropic vibronic couplings for singlet fission processes in crystalline molecular thin films.

Flexible and Extensible Ribbon-Cable Interconnects for Implantable Electrical Neural Interfaces.

The design and characterization of thin-film ribbon cables as electrical interconnects for implanted neural stimulation and recording devices are reported. Our goal is to develop flexible and extensible ribbon cables that integrate with thin-film, cortical penetrating microelectrode arrays (MEAs). Amorphous silicon carbide (a-SiC) and polyimide were employed as the structural elements of the ribbon cables and multilayer titanium/gold thin films as electrical traces. Using photolithography and thin-film processing, ribbon cables with linear and serpentine electrical traces were investigated. A cable design with an open lattice geometry was also investigated as a means of achieving high levels of extensibility while preserving the electrical function of the cables. Multichannel ribbon cables were fabricated with 50 mm lengths and metallization trace widths of 2-12 μm. The ribbon cables tolerate flexural bending to a radius of 50 μm with no change in trace impedance but tolerate less than 5% tensile elongation without trace failure. Ribbon cables with a lattice structure exhibit 300% elongation without failure. The high elongation tolerance is attributed to a lattice design that results in an out-of-plane displacement that avoids fracture or plastic deformation. Extensible ribbon cables underwent up to 50,000 tensile elongation cycles to 45% extension without failure. An electrical interconnect process using through-holes in the distal gold bond pads of the ribbon cables was used to connect to an a-SiC-based MEA. The electrical connection was created by stenciling a conductive epoxy into the through-holes, bridging metallization between the traces, and MEA. The interconnect was tested using a ribbon cable connected to an a-SiC MEA implanted acutely in rat cortex and used to record neuronal activity. These highly flexible and extensible ribbon cables are expected to accommodate large extensions and facilitate cable routing during surgical implantation. They may also reduce tethering forces on implanted electrode arrays, potentially improving chronic neural recording performance.

Shaping the spatial intensity profiles of ultra-short lasers for enhanced selective thin film processing in the fabrication of silicon membrane filters

Shaping the spatial intensity profiles of ultra-short lasers for enhanced selective thin film processing in the fabrication of silicon membrane filters

Epitaxial Thin Film Growth on Recycled SrTiO3 Substrates Toward Sustainable Processing of Complex Oxides.

Complex oxide thin films cover a range of physical properties and multifunctionalities that are critical for logic, memory, and optical devices. Typically, the high-quality epitaxial growth of these complex oxide thin films requires single crystalline oxide substrates such as SrTiO3 (STO), MgO, LaAlO3, a-Al2O3, and many others. Recent successes in transferring these complex oxides as free-standing films not only offer great opportunities in integrating complex oxides on other devices, but also present enormous opportunities in recycling the deposited substrates after transfer for cost-effective and sustainable processing of complex oxide thin films. In this work, the surface modification effects introduced on the recycled STO are investigated, and their impacts on the microstructure and properties of subsequently grown epitaxial oxide thin films are assessed and compared with those grown on the pristine substrates. Detailed analyses using high-resolution scanning transmission electron microscopy and geometric phase analysis demonstrate distinct strain states on the surfaces of the recycled STO versus the pristine substrates, suggesting a pre-strain state in the recycled STO substrates due to the previous deposition layer. These findings offer opportunities in growing highly mismatched oxide films on the recycled STO substrates with enhanced physical properties. Specifically, yttrium iron garnet (Y3Fe5O12) films grown on recycled STO present different ferromagnetic responses compared to that on the pristine substrates, underscoring the effects of surface modification. The study demonstrates the feasibility of reuse and redeposition using recycled substrates. Via careful handling and preparation, high-quality epitaxial thin films can be grown on recycled substrates with comparable or even better structural and physical properties toward sustainable process of complex oxide devices.

Black Phosphorus for Mid-Infrared Optoelectronics: Photophysics, Scalable Processing, and Device Applications.

High efficiency mid-infrared (λ = 3-8 μm) light emitters and photodetectors are pivotal for advancing next-generation optoelectronics. However, narrow-bandgap semiconductors face fundamental challenges such as pronounced nonradiative carrier recombination and thermally generated noise, which impede device performance. Recently, two-dimensional layered black phosphorus (BP) and its alloys have attracted substantial interest for mid-infrared device applications, demonstrating superior performance relative to conventional III-V and II-VI semiconductors with similar bandgaps. In this review, we discuss the optical properties of BP, contrasting these with those of covalent compounds. Owing to its inherently self-terminated surface structure and reduced nonradiative recombination, BP exhibits high performance in light emission and photodetection at room temperature. Furthermore, this review highlights recent advances in the large-area processing of BP thin films, paving the way for practical device applications and integration. Finally, we explore ongoing challenges and emerging opportunities in the utilization of BP for functional mid-infrared devices.

Controlling Polarization‐Induced Polaron Accumulation in OLEDs via Device Design

AbstractSpontaneous alignment of molecular electric dipole moments, known as spontaneous orientation polarization (SOP), is present in many organic electronic materials. The SOP‐induced field changes the internal voltage distribution within the device, altering polaron injection and accumulation. The important role of SOP in organic light‐emitting devices (OLEDs) has recently been emphasized with clear links between dipole alignment and device efficiency and operational lifetime. Prior work has thus sought to engineer SOP via changes in thin film composition or processing conditions. These efforts have generally been directed at the OLED electron transport layer, which can show strong SOP. This work takes a different approach, focusing instead on how changes in device architecture can be applied to tune the magnitude and dynamics of polaron accumulation in response to SOP. In this work, it is demonstrated that the introduction of SOP into the device emissive layer offers control over the spatial location of accumulation. In parallel, insertion of a spacer layer between the hole transport and emissive layers can be used to tune the polaron accumulation rate and density during device operation. Both of these architectural changes permit an increase in OLED efficiency and a pathway around the deleterious impact of SOP‐induced polaron accumulation.

Sputter-deposited TiOx thin film as a buried interface modification layer for efficient and stable perovskite solar cells

Despite perovskite solar cells (PSCs) based on a SnO2 hole-blocking layer (HBL) are achieving excellent performance, the non-perfect buried interface between the SnO2 HBL and the perovskite layer is still an obstacle in achieving further improvement in power conversion efficiency (PCE) and stability. The poor morphology with numerous defects and the energy level mismatch at the buried interface constrain the open circuit voltage and cause instability. Herein, a sputter-deposited TiOx thin film is used as a buried interface modification layer to address the aforementioned issues. Utilizing in situ grazing-incidence small-angle X-ray scattering (GISAXS) during the sputter deposition, we monitor and unveil the growth process of the TiOx thin film, identifying a 10 nm thickness optimum. The defects at the buried interface are passivated through tuning the growth, leading to a suppressed non-radiative recombination and improved PCE (from 22.19 % to 23.93 %). The evolution of the device performance and the degradation process of PSCs using operando grazing-incidence wide-angle X-ray scattering (GIWAXS) under the protocol ISOS-L-1I explains the enhanced stability introduced by the buried interface modification via a sputter-deposited TiOx thin layer. The perovskite decomposition process and the detrimental formation of PbI2 are both slowed down by the TiOx thin layer.

Measurement and Analysis of Surface Temperature Gradients on Magnetron Sputtered Thin Film Growth Studied Using NiCr/NiSi Thin Film Thermocouples.

In the general analysis of thin-film growth processes, it is often assumed that the temperature of the film growth surface is the same as the temperature of the film growth substrate. However, a temperature gradient exists between the film growth surface and film growth substrate. Using the growth surface of TiO2 thin films as an example, the temperature gradient of the film growth surface is tested and analyzed. A NiCr/NiSi thin-film thermocouple is fabricated using the direct-current pulse magnetron sputtering method. A three-layer NiCr/NiSi thin-film thermocouple temperature measurement system is established to measure the temperature gradient of the film growth surface. The growth surface temperature and substrate temperature of the TiO2 thin films are measured. For a sputtering power density of 0.83W cm- 2, the temperature difference between the first and second layers is 104.79°C, while the temperature difference between the second and third layers is 39.92°C. A standard K-type thermocouple is used to measure the substrate temperature, which is recorded to be 132.05°C, consistent with common measurements of substrate temperature. The heat conduction on the film growth surface in the vacuum chamber is examined and a model for the temperature measurement device during film growth is constructed.

Reductive Thermal ALD of Pd and Pd2Ge From a Novel Recyclable Palladium Chloride Adduct

AbstractIn this work, a new ALD process for palladium metal thin films using dichlorobis(triethylphosphine)palladium(II) (PdCl2(PEt3)2) and 1,4‐bis(trimethylsilyl)‐1,4‐dihydropyrazine ((Me3Si)2DHP) as reactants, is developed. The metal precursor is chosen based on the known reactivity of metal halides with the DHP‐type reducing agents. Metallic Pd films are deposited at temperatures of 140–180 °C with a growth rate of 0.3–0.4 Å cycle−1. Furthermore using 1,4‐bis(trimethylgermyl)‐1,4‐dihydropyrazine ((Me3Ge)2DHP) as the co‐reactant yielded Pd2Ge thin films. Finally, full recyclability of the PdCl2(PEt3)2 is observed: unused molecules condensed in the exhaust tube can be collected by dissolving them into acetone, purified by recrystallization, and reused.

Advancements in Flexible Electronics Fabrication: Film Formation, Patterning, and Interface Optimization for Cutting-Edge Healthcare Monitoring Devices.

Flexible electronics can seamlessly adhere to human skin or internal tissues, enabling the collection of physiological data and real-time vital sign monitoring in home settings, which give it the potential to revolutionize chronic disease management and mitigate mortality rates associated with sudden illnesses, thereby transforming current medical practices. However, the development of flexible electronic devices still faces several challenges, including issues pertaining to material selection, limited functionality, and performance instability. Among these challenges, the choice of appropriate materials, as well as their methods for film formation and patterning, lays the groundwork for versatile device development. Establishing stable interfaces, both internally within the device and in human-machine interactions, is essential for ensuring efficient, accurate, and long-term monitoring in health electronics. This review aims to provide an overview of critical fabrication steps and interface optimization strategies in the realm of flexible health electronics. Specifically, we discuss common thin film processing methods, patterning techniques for functional layers, interface challenges, and potential adjustment strategies. The objective is to synthesize recent advancements and serve as a reference for the development of innovative flexible health monitoring devices.

Repeatable Perovskite Solar Cells through Fully Automated Spin-Coating and Quenching.

Enhancing reproducibility, repeatability, as well as facilitating transferability between laboratories will accelerate the progress in many material domains, wherein perovskite-based optoelectronics are a prime use case. This study presents fully automated perovskite thin film processing using a commercial spin-coating robot in an inert atmosphere. We successfully apply this novel processing method to antisolvent quenching. This process is typically difficult to reproduce and transfer and is now enhanced to exceptional repeatability in comparison to manual processing. Champion perovskite solar cells demonstrate power conversion efficiencies as high as 19.9%, proving the transferability of established manual spin-coating processes to automatic setups. Comparison with human experts reveals that the performance is already on par, while automated processing yields improved homogeneity across the substrate surface. This work demonstrates that fully automated perovskite thin film processing improves repeatability. Such systems bear the potential to become a foundation for autonomous optimization and greatly improve transferability between laboratories.

A Polyimide Composite-Based Electromagnetic Cantilever Structure for Smart Grid Current Sensing.

Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor.

Molecular Dynamics Analysis of Multi-Factor Influences on Structural Defects in Deposited Mg-Matrix Zn Atom Films.

Mg metal vascular stents not only have good mechanical support properties but also can be entirely absorbed by the human body as a trace element beneficial to the human body, but because Mg metal is quickly dissolved and absorbed in the human body, magnesium metal alone cannot be ideally used as a vascular stent. Since the dense oxide Zn film formed by Zn contact with oxygen in the air has good anti-corrosion performance, the Zn nanolayer film deposited on the Mg matrix vascular scaffold by magnetron sputtering can effectively inhibit the rapid dissolution of Mg metal. However, there are few studies on the molecular dynamic structural defects of Mg-matrix Zn atomic magnetron sputtering, and the atomic level simulation of Mg-matrix Zn thin-film depositions can comprehensively understand the atomic level structural defects in the deposition process of Zn thin films from a theoretical perspective to further guide experimental research. Based on this, this research first studied and analyzed the atomic layer structure defects, surface morphology, surface roughness, atomic density of different deposited layers, radial distribution function, and residual stress of the thin-film deposition layer of 1500 deposited Zn atoms at the initial deposition stage, during and after deposition under Mg-matrix thermal layer 500K and a deposited velocity 5 Å/ps by molecular dynamics. At the same time, the effects of temperature and deposited velocity of the Mg-matrix thermal layer on the surface morphology, roughness, and biaxial stress of the deposited films were studied.

Development and Evaluation of Voriconazole Loaded Invasomes Gel for Enhanced Antifungal Activity.

Although it has limited solubility and poor permeability to the skin, voriconazole (VRC) is a viable choice for the topical treatment of fungal infections. Owing to these constraints, treating the inflection requires several injections over an extended period. The goal of this work was to produce a VRC invasome gel with improved topical antifungal activity. The Box-Behnken design (BBD) program was utilized to optimize the IVS after it was created using the thin-film hydration process. The optimized invasome formulation through BBD has 159.9 nm of vesicle size, 68.58% of entrapment efficiency, and 23.5 mV of zeta potential. The spherical shape of the vesicle was revealed using scanning microscopy. According to FTIR spectra, the medication and polymers do not interact. The optimized invasomal VRC gel exhibited an optimum of 345 to 589 cp. Ex-vivo permeation studies of IG4 exhibited a higher flux of 0.168 as compared to pure voriconazole. An antimicrobial study was accepted to check the antimicrobial efficiency of voriconazole gel (IG4). The study confirmed a good zone of inhibition of the fungus infection (C. albicans). The voriconazole invasome’s potential diffusion and antibacterial efficacy are demonstrated here. Invasomal gel was found to be an effective carrier and a desirable strategy for improving the topical distribution of VRC to treat fungal infections.

Thickness dependence and crystallization properties of amorphous GeTe thin films on silicon dioxide

Radio frequency magnetron sputtering was used to prepare the amorphous GeTe thin films on silicon dioxide and the thickness effects on the crystallization behavior were investigated. With the film thickness reducing, the crystallization temperature, crystallization activation energy, amorphous and crystalline resistance increase remarkably, indicating the great improvement in thermal stability and power consumption. Ozawa’s model was used to estimate the crystallization kinetics of GeTe thin films, it shows that nucleation and grain growth occur simultaneously, and grain growth dominates ultimately. XRD analysis demonstrated that the grain size can be reduced and the crystallization process of GeTe thin film can be inhibited with the film thickness decreasing. Furthermore, the thinner film has smaller resistance drift index and surface roughness, which are beneficial to improve the reliability of storage device. T-type phase change memory devices based on 25 nm GeTe thin film were fabricated by 0.13 μm CMOS technology, and the current–voltage and resistance-voltage characteristics demonstrate the excellent electrical performance, including the fast resistance switching between SET and RESET processes, low threshold current and voltage. All the results proved the strong dependency relationships between the crystallization properties and film thickness of GeTe thin film, which paves the way for developing high-density phase change memory in the fields of big data and artificial intelligence.

Thin Film Stoichiometry and Defects Management for Low Threshold and Air Stable Near-Infrared Perovskite Laser.

While significant efforts have been devoted to optimize the thin-film stoichiometry and processing of perovskites for applications in photovoltaic and light-emitting diodes, there is a noticeable lack of emphasis on tailoring them for lasing applications. In this study, it is revealed that thin films engineered for efficient light-emitting diodes, with passivation of deep and shallow trap states and a tailored energetic landscape directing carriers toward low-energy emitting states, may not be optimal for light amplification systems. Instead, amplified spontaneous emission (ASE) is found to be sustained by shallow defects, driven by the positive correlation between the ASE threshold and the ratio of carrier injection rate in the emissive state to the recombination rate of excited carriers. This insight has informed the development of an optimized perovskite thin film and laser device exhibiting a low threshold (≈ 60 µJ cm-2) and stable ASE emission exceeding 21 hours in ambient conditions.

Liquid metal interface mechanochemistry disentangles energy density and biaxial stretchability tradeoff in composite capacitor film

Dielectric polymer composites for film capacitors have advanced significantly in recent decades, yet their practical implementation in industrial-scale, thin-film processing faces challenges, particularly due to limited biaxial stretchability. Here, we introduce a mechanochemical solution that applies liquid metal onto rigid dielectric fillers (e.g. boron nitride), dramatically transforming polymer-filler interface characteristics. This approach significantly reduces modulus mismatch and stress concentration at the interface region, enabling polypropylene composites to achieve biaxial stretching ratio up to 450 × 450%. Furthermore, liquid metal integration enhances boron nitride’s dielectric polarization while maintaining inherent insulation, producing high-dielectric-constant, low-loss films. These films, only microns thick yet quasi square meters in area, achieve a 55% increase in energy density over commercial biaxially-oriented polypropylene (from 2.9 to 4.5 J cm−3 at 550 MV/m), keeping 90% discharge efficiency. Coupled with improved thermal conductivity, durability, and device capacitance, this distinctive interface engineering approach makes these composites promising for high-performance film capacitors.

Enhanced forward emission by backside mirror design in micron-sized LEDs.

Tiny InGaN micro-LEDs (μ-LEDs) play a pivotal role in emerging display technologies, particularly augmented reality (AR) applications. Achieving both high internal quantum efficiency (IQE) and efficient light extraction efficiency (LEE) is essential. While wet chemical etching can recover the IQE after dry etching, it alters the pixel shape, impacting optical properties and reducing the LEE. In this study, we overcome this issue by fabricating 1 μm thin-film-based μ-LED emitter arrays with a metallic backside mirror deposited on a patterned dielectric material around the μ-LED mesa. This concave mirror can be straightforwardly integrated into a thin-film LED process chain, and it redirects photons within the μ-LED structure, enhancing the LEE in the forward direction. Electro-optical measurements show a 2.1-fold improvement in light output within the ±15∘ emission cone compared to μ-LEDs with vertical sidewalls. These findings hold significant implications for μ-LED projection displays, where maximizing the overall efficiency and directionality is critical.

Suppressed Defects by Functional Thermally Cross-Linked Fullerene for High-Efficiency Tin-Lead Perovskite Solar Cells.

Mixed tin-lead (Sn-Pb) perovskites have attracted the attention of the community due to their narrow bandgap, ideal for photovoltaic applications, especially tandem solar cells. However, the oxidation and rapid crystallization of Sn2+ and the interfacial traps hinder their development. Here, cross-linkable [6,6]-phenyl-C61-butyric styryl dendron ester (C-PCBSD) is introduced during the quenching step of perovskite thin film processing to suppress the generation of surface defects at the electron transport layer interface and improve the bulk crystallinity. The C-PCBSD has strong coordination ability with Sn2+ and Pb2+ perovskite precursors, which retards the crystallization process, suppresses the oxidation of Sn2+, and improves the perovskite bulk and surface crystallinity, yielding films with reduced nonradiative recombination and enhanced interface charge extraction. Besides, the C-PCBSD network deposited on the perovskite surface displays superior hydrophobicity and oxygen resistance. Consequently, the devices with C-PCBSD obtain PCEs of up to 23.4% and retained 97% of initial efficiency after 2000h of storage in a N2 atmosphere.