Ablation Of Thin Films Research Articles

Ultrashort-pulse-laser ablation of freestanding dielectric thin films

Ultrashort-pulse-laser ablation of dielectric thin films is strongly affected by the interference of the exciting laser pulse with itself, which causes the deposited energy to be confined to narrow regions equidistantly spaced along the propagation direction of the laser. We investigate how this affects the ablation mechanism of freestanding Al2O3\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\hbox {Al}_2\\hbox {O}_3$$\\end{document} thin films by analyzing the laser-generated structures with several post-mortem imaging and spectroscopic techniques. Close to the ablation threshold, the laser-irradiated region exhibits surface blistering. Higher intensities cause layers of material to be removed corresponding to ejection of material initiated from the regions of high excitation. Significantly above the ablation threshold, the laser-generated structure is remarkably stable and consists of a membrane of thickness corresponding to the distance between neighboring interference maxima, which is uniquely determined by the central wavelength of the laser pulse and the refractive index of the film. The electronic excitation as a function of depth is simulated using a multiple-rate-equation model in combination with finite-difference-time-domain propagation of the laser field. The simulations confirm the strongly localized excitation and thus correlate well with the observed laser-generated structures.

High efficiency laser ablation of gold thin film by 2.8 GHz intraburst repetition rate pulses

This work initially presents our progress in developing a 14 W all-polarization-maintaining (PM) Yb-doped fiber laser system. This system can generate bursts with a 2.8 GHz intra-burst repetition rate and offers flexibility in burst repetition rates, starting from 100 kHz. The laser produces pulse energies up to 210 nJ, which can be dechirped to approximately 650 fs. Subsequently, we utilized the developed laser in thin film gold processing. We sent up to 6.4 W and employed three different intraburst pulse configurations on a 100 nm-thick gold film coated on glass. We achieved a record gold removal efficiency of 125 μg/W.s\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\upmu \ ext{g}/\ ext {W.s}$$\\end{document} using ∼\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\sim$$\\end{document}5 nJ pulses. Moreover, we determined an ablation pulse energy threshold of approximately 1 nJ, representing the lowest pulse energy to the best of our knowledge.

Magnetic Nanoparticles Produced by Pulsed Laser Ablation of Thin Cobalt Films in Water

Magnetic Nanoparticles Produced by Pulsed Laser Ablation of Thin Cobalt Films in Water

Recent Developments of Femtosecond Laser Direct Writing for Meta-Optics.

Micro-optics based on the artificial adjustment of physical dimensions, such as the phase, polarization, and wavelength of light, constitute the basis of contemporary information optoelectronic technology. As the main means of optical integration, it has become one of the important ways to break through the future bottleneck of microelectronic technology. Geometric phase optical components can precisely control the polarization, phase, amplitude and other properties of the light field at the sub-wavelength scale by periodically arranging nanometer-sized unit structures. It has received extensive attention in the fields of holographic imaging and polarization optics. This paper reviews the physical mechanism of micro-nano structure modification, research progress of femtosecond laser direct-writing photoresist, femtosecond laser ablation of metal thin films, femtosecond laser-induced nanograting, and other methods for preparing polarization converters and geometric phase optics. The challenges of fabricating ultrafast optical devices using femtosecond laser technology are discussed.

Self-organized structures in thin films of phase-change material upon femtosecond laser excitation: From periodic ordering to ablation

The paper describes a multistage process of surface nanostructuring which precedes the ablation of a Ge2Sb2Te5 thin film under femtosecond laser irradiation. Three forms of surface reconfiguration can be observed depending on the intensity and/or the number of laser pulses, all of them being of different origin. Low-energy irradiation leads to the formation of regular glassy nanospheres equal in size. We assume that the spheres result from the splitting of melted thin threads, as Plateau–Rayleigh instability foretells. In turn, melted threads are electromagnetic in nature: the interference between a surface plasmon-polariton wave and an incident light wave causes spatial temperature modulation and further melting at interference pattern maxima. Higher energies induce mass transfer processes and entail transformation of chains of nanospheres into alternating ridges and valleys. The last stage is achieved at critically high energy values and is simply the evaporation of the film from the substrate.

Generation of gold and silver nanoparticles using laser ablation of thin bimetallic films and bulk targets in water

Generation of gold and silver nanoparticles by laser ablation in water without the addition of surfactants is very attractive due to the purity of such nanoparticles. However, such nanoparticles face the problem of long-term stability, which severely limits their applicability. Here, we demonstrate the generation of hybrid gold-silver nanoparticles using the laser ablation of thin-film composites on a glass substrate in water, and compare with the laser fabrication of nanoparticles by using bulk targets of silver and gold. Thin-film method allows the formation of stable hybrid Au–Ag nanoparticles in distilled water without any stabilizers and additional ligands with an opportunity to regulate the nanoparticle composition using different metal ratios, layer order, and thickness of films. The stability and optical properties of the hybrid nanoparticles depend on the used laser pulse energy. This study demonstrates that the thin film method produces nanoparticles with higher stability compared to the bulk target method. These outcomes are encouraging for the creation of better-performing, stable, and clean nanoparticles that can be used in a variety of applications in biomedicine, sensors, integrated circuits, filters, batteries, covid-19 tests, solar cells, dual-energy mammography (DEM), computed tomography (CT), and other components of optical and electronic devices.

Particle Re-Deposition During Ultrashort Pulse Laser Ablation of ITO Thin Films Using Single- and Multi-Beam Processing

Particle Re-Deposition During Ultrashort Pulse Laser Ablation of ITO Thin Films Using Single- and Multi-Beam Processing

Thermoelastic pulsed laser ablation of silver thin films with organic metal–SiO2 adhesion layer in water: application to the sustainable regeneration of glass microfluidic reactors for silver nanoparticles

The synthesis of metal nanoparticles (NPs) using microfluidic reactors has become a major method for limiting reagent consumption and achieve a precise control of the morphological properties. Failure in realizing the reproducibility of the results is mostly associated with the accumulation of metallic nanostructures on the walls of the microfluidic devices, periodically removed by acid treatment. In this study, we show that ns-pulsed laser ablation (PLA) in water can be a safe, effective, and green method for the regeneration of clogged microfluidic reactors. The effect of the laser-pulse fluence on the removal of metallic nanostructures was studied for the first time on silver (Ag) thin films with a thickness of 50 nm deposited over SiO2 substrates, using 3-mercaptopropyl trimethoxysilane as a chemical adhesion layer. As point of novelty, the experimental results show that at low fluence (F < 0.1 J cm−2), ablation is principally caused by delamination of the thin film associated with the thermoelastic force while thermal processes inducing phase conversion of the metal dominate at higher fluence. Low-fluence regimes are better suited for the single-pulse removal of the nanomaterial, whereas in high F regimes, we observed melting and recondensation of the metal on the SiO2 surface so that multiple pulse interactions were necessary for complete ablation of the thin film. For the delamination and the phase transformation processes, the threshold fluences were 3.7 × 10−2 and 7.0 × 10−2 J cm−2, respectively. The experimental setup in the thermoelastic PLA regime was applied to unclog glass microfluidic devices used for synthesizing citrate-stabilized AgNPs. Using this simple and easily achievable laser-scanning experimental configuration, we demonstrated that PLA in water is a reliable and efficient technique, with results comparable to acidic treatment in terms of efficiency and time necessary for the complete removal of the Ag nanomaterial.

Alloyed Au/Pd nanoparticles formed by laser ablation of thin films in liquid

The formation of alloyed Au/Pd nanoparticles (NPs) from thin magnetron-deposited Au–Pd films by nanosecond laser ablation in water is investigated. The films weight loss dependence is studied by thickness, intensity and laser pulses per point. Prepared NPs are transferred onto the silica wafer and characterized by scanning and transmission electron microscopy as well as optical and energy-dispersive x-ray spectroscopies. NPs size distribution was obtained using the dynamic light scattering (DLS) method.

Optimization of nanoparticle yield for biomedical applications at femto-, pico- and nanosecond laser ablation of thin gold films in water

The paper considers the generation of colloidal gold nanoparticles by laser ablation of thin gold films of variable thickness in deionized water. The effect of laser fluence, pulsewidth, exposure, and film thickness on the generation of nanoparticles, its productivity and ergonomicity, particle dispersion and size is studied along with the related ablative mass loss from the films.

Features of structuring and ablation of thin titanium films by femtosecond laser pulses

The processes of structuring and ablation of a titanium film by femtosecond laser pulses at wavelengths of 515 nm and 1030 nm have been studied in both single-pulse and multi-pulse modes. The optimal energy regimes for the selective removal of film material without damaging the substrate, as well as the regimes for the generation of the periodic structures on the surface, are determined. The evolution of periodic structures with an increase in the number of laser pulses is shown. The precision removal of titanium film is associated with thermomechanical explosive boiling and the corresponding energy contribution, which ensures the cascade appearance of ablation craters.. Keywords: thin films, femtosecond laser pulses, surface treatment

Patterning of WOx, VOx, and MoOx thin-films with picosecond and nanosecond laser sources

Transition metal oxide (TMOs) layers have interesting properties as selective contacts, i.e., hole or electron transport layers for novel semiconductor devices. Especially, oxides of molybdenum (MoO3), vanadium (V2O5), and tungsten (WO3) show good bahaviour acting as front hole-selective contacts for n-type crystalline-silicon heterojunction solar cells. Laser scribing has been widely used for thin-film ablation and seems the appropriate technology for device manufacturing with such non-conventional materials. In this work, we study the laser scribing of non-stoichiometric evaporated WOx, VOx, and MoOx films with three different wavelengths (1064, 532, and 355 nm) with pulse duration in the nanosecond and picosecond regimes. The selection of the proper laser source allows a wide parametric window, with complete removal of the TMO films and no alteration of the silicon substrate. The results on the isolation of diodes and their electrical characteristics show the quality of the laser scribing processes.

Controllable ablative machining of Al/Ti and Ti/Al nano-layers on a Si substrate by single-pulse femtosecond laser irradiation.

Results concerning the controllable ablation of nano-layered thin films (NLTF) by femtosecond laser pulses are presented. Investigated samples were titanium-aluminum bilayers, deposited on a silicon substrate, with the top titanium or aluminum layer of variable thickness on the surface. Irradiation was done in ambient air with single femtosecond laser pulses under standard laboratory conditions. The samples were analyzed by complementary methods of optical and scanning electron microscopy and optical profilometry, exhibiting laser-fluence-dependent ablative removal either of the top layer or the entire bilayer or even partial ablation of the underlying silicon substrate. The removal (spallation) threshold fluences for the topmost layer are scalable versus its thickness almost irrespectively of its material, being rather selective for the Ti-coated samples and much less selective for the Al-coated samples. The removal of the entire bilayers was found to be strongly influenced by electronic properties of the underlying metallic layer, dictating the NLTF-Si adhesion, heat conduction, and capacity in the NLTFs toward the NLTF-Si interface and beyond, as well as by their thermophysical characteristics, e.g., almost twice higher melting temperature and enthalpy for Ti. As a result, precise fs-laser machining of the entire NLTFs is pronounced and selective for the samples with the fusible Al at the low-adhesion Al-Si interfaces, compared with the incomplete NLTF removal from the high-adhesion and refractory Ti-Si interfaces.

Lift-Off Ablation of Metal Thin Films for Micropatterning Using Ultrashort Laser Pulses

Laser ablation of metal thin films draws attention as a fast means of clean micropatterning. In this study, we attempt to remove only the metal thin film layer selectively without leaving thermal damage on the underneath substrate. Specifically, our single-pulse ablation experiment followed by two-temperature analysis explains that selective ablation can be achieved for gold (Au) films of 50–100 nm thickness by the lift-off process induced as a result of vaporization of the titanium (Ti) interlayer with a strong electron–phonon coupling. With increasing the film thickness comparable to the mean free path of electrons (100 nm), the pulse duration has to be taken shorter than 10 ps, as high-temperature electrons generated by the ultrashort pulses transfer heat to the Ti interlayer. We verify the lift-off ablation by implementing millimeters-scale micropatterning of optoelectronic devices without degradation of optical properties.

Selective laser ablation of molybdenum from aluminium in a multi-layered thin film system

It is challenging to selectively remove a thin film with a high melting temperature from an underlying one with a low melting temperature where precise stops at layer interfaces are required. In this study, an ultrashort laser pulse is used to cleanly ablate a 40 nm thin molybdenum layer from an aluminium thin film in a commercially relevant heterostructure. We observe clean delamination of molybdenum from aluminium. We observe that columnar nanostructures in Mo are generated well below the damage threshold fluence. Both delamination and nanostructure formation are considered in terms of electromechanical forces. At low fluence, only selective removal of the very near surface of the Mo thin film was observed. At higher fluences, ablation of the Mo film occurred without melting of the underlying Al layer. Our computational results confirm the important role of thermionic electron emission and near surface electron-phonon coupling in nanostructure generation. We introduce a thermal boundary resistance effect in the heat diffusion by electrons to more accurately describe the release of the Mo from the Al layer. The comparison of experimental and simulation results confirms that electromechanical stresses can be an important mechanism in selective thin film ablation.

Nanosecond laser ablation of composite thin films in liquid

We present a study on nanosecond laser ablation of thin composite films immersed in liquids. The composite films are obtained using a classical on-axis pulsed laser deposition technology, where the target consists of two sectors with different composition. Multicomponent films containing ZnO, TiO2, and Ag, are thus deposited on a substrate. The as-prepared composite films are then immersed in double distiled water and irradiated by nanosecond laser pulses. This results in the production of colloids composed by multicomponent nanoparticles. The optical properties of the colloids are evaluated by optical transmittance measurements in the UV-VIS spectral range. Transmission electron microscopy is used to visualize the nanostructures formed in the solution, as well as to evaluate their size distribution. The phase composition of the samples is determined by selected area electron diffraction.

Limited Elemental Mixing in Nanoparticles Generated by Ultrashort Pulse Laser Ablation of AgCu Bilayer Thin Films in a Liquid Environment: Atomistic Modeling and Experiments

Pulsed laser ablation in liquids (PLAL) is a promising technique for the generation of colloidal alloy nanoparticles that are of high demand in a broad range of fields, including catalysis, additive manufacturing, and biomedicine. Many of the applications have stringent requirements on the nanoparticle composition and size distributions, which can only be met through innovations in the PLAL technique guided by a clear understanding of the nanoparticle formation mechanisms. In this work, we undertake a combined computational and experimental study of the nanoparticle formation mechanisms in ultrashort PLAL of Ag/Cu and Cu/Ag bilayer thin films. Experimental probing of the composition of individual nanoparticles and predictions from large-scale atomistic simulations provide consistent evidence of limited mixing between the two components from bilayer films by PLAL. The simulated and experimental distributions of nanoparticle compositions exhibit an enhanced abundance of Ag-rich and Cu-rich nanoparticles, as well as a strongly depressed population of well-mixed alloy nanoparticles. The surprising observation that the nanoscale phase separation of the two components in the bilayer films manifests itself in the sharp departure from the complete quantitative mixing in the colloidal nanoparticles is explained by the complex dynamic interaction between the ablation plume and liquid environment revealed in the simulations of the initial stage of the ablation process. The simulations predict that rapid deceleration of the ablation plume by the liquid environment results in the formation of a transient hot and dense metal region at the front of the plume, which hampers the mixing of the two components and, at the same time, contributes to the stratification of the plume in the emerging cavitation bubble. As a result, nanoparticles of different sizes and compositions are produced in different parts of the emerging cavitation bubble during the first nanoseconds of the ablation process. Notably, the diameters of the largest nanoparticles generated in the simulations of the initial stage of the ablation process are more than twice larger than the thickness of the original bilayer films. This observation provides a plausible scenario for the formation of large nanoparticles observed in the experiments. The conclusion on limited elemental mixing in the nanoparticles is validated in simulations of bilayers with different spatial order of Cu and Ag layers, even though the two systems exhibit some notable quantitative differences mainly related to the different strength of electron–phonon coupling in Cu and Ag. Overall, the results of this study provide new insights into the formation mechanism of bimetallic nanoparticles in ultrashort PLAL from thin bilayer targets and suggest that the formation of alloy nanoparticles from immiscible elements may be hampered for targets featuring distinctive elemental segregation.

Femtosecond Double-Pulse Laser Ablation and Deposition of Co-Doped ZnS Thin Films.

Nanostructured thin films of Co-doped zinc sulfide were synthesized through femtosecond pulsed laser deposition. The scheme involved ablation of physically mixed Co and ZnS with pairs of ultrashort pulses separated in time in the 0–300 ps range. In situ monitorization of the deposition process was carried out through a simultaneous reflectivity measurement. The crystallinity of generated nanoparticles and the inclusion of Co in the ZnS lattice is demonstrated by transmission electron microscopy and energy dispersive X-ray microanalysis (TEM-EDX) characterization. Surface morphology, Raman response, and photoluminescence of the films have also been assessed. The role of interpulse temporal separation is most visible in the thickness of the films obtained at the same total fluence, with much thicker films deposited with short delays than with individual uncoupled pulses. The proportion of Co in the synthesized doped ZnS nanoparticles is found to be substantially lower than the original proportion, and practically independent on interpulse delay.

Fabrication of Microsensor for Detection of Low-Concentration Formaldehyde Gas in Formalin-Treated Fish

Here, an ultrafast direct laser patterning technique to fabricate a low-cost microsensor and its application for formaldehyde detection are reported. The patterns of microheater and interdigitated electrodes (IDEs) were realized using laser micromachining techniques by ablation of gold thin film on alumina substrate. The thin film of gold microheater showed good stability up to 300 °C with a fast response time of 80 s and temperature coefficient of resistance (TCR) was calculated as 1.37 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> /°C. Moreover, gold microheater exhibited long-term reliability under self-heating mode with a negligible resistance drift <; 0.5% over a period of 330 h at 250 °C through consuming low power with a heating efficiency of 0.23 °C/mW. Thermal imaging camera revealed the uniform temperature distribution with negligible heat gradient profile over the whole microsensor platform. To state-of-the-art gas sensing application of this coplanar sensing platform, a nanostructured SnO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> was deposited on IDE, which exhibited high sensitivity (13.96% ppm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> ) to formaldehyde even to detect sub-ppm concentrations with fast response (32 s) and recovery kinetics (72 s). Moreover, the microsensor was also used on-site rapid screening for the detection and quantification of formaldehyde concentration in formalin-treated fish sample.

Methodology of selective metallic thin film ablation from susceptible polymer substrate using pulsed femtosecond laser.

Electronic devices on flexible polymeric substrates allow new fields of applications. A maskless and flexible structuring process for such systems is offered by ablation using ultra-short pulse laser irradiation. Hereby, certain areas of a functional thin film coating (e.g. nickel-chromium) are locally removed from a substrate (e.g. polyimide) to yield the needed device structures. Micro laser patterning quality is influenced by the beam properties (beam profile, fluence) as well as by the pulse overlap, the substrate material and many other factors. A clear distinction must be made between the material ablation at the surface of a bulk material and the substrate selective removal of a thin metallic film. For the latter, general rules for the prediction of ablation results especially in the case of areal ablation, which were not known from the literature so far, are derived here in the form of mathematical criteria. A methodology for the parameter finding in different cases of ablation (dot, line, areal) is presented and exemplified using a practical example, but is also applicable to other flexible thin film based systems.