Thin film solid oxide fuel cells (thin film SOFCs) were introduced to reduce the high operating temperature of traditional SOFCs. By employing thin film techniques such as sputtering, atomic layer deposition, and pulsed laser deposition, less than 1 μm-thick electrolytes have been successfully fabricated and functioned properly. Through these thin film electrolytes, the low ionic conductivity of the electrolyte materials at reduced temperature is compensated by the shortened travel length of the oxygen ions. However, low temperature also leads the poor electrode activity, and this lowered activity has not been fully overcome.In this study, we investigated various types of Ni-based cermet films to gain better electrode activity. The cermet films were fabricated by magnetron sputtering. For ion-conducting materials, yttria-stabilized zirconia (YSZ) and scandia-stabilized zirconia (ScSZ) were used. These ion-conducting materials were co-sputtered with Ni. The sputtering power of each material was varied for changing Ni contents of the films. To obtain the Ni contents, we utilized X-ray photoelectron spectroscopy (XPS). Four-point probe measurement was also conducted to verify the degree of Ni percolation of the films. In addition, the surface and cross-sectional images of the films were observed to investigate the microstructure and porosity.For analyzing the electrochemical performance of the co-sputtered cermet films at reduced temperature, we fabricated several experimental SOFCs. On the one side of the solid electrolyte pellet, the thin cermet anode was deposited, while thin Pt cathode was deposited on the other side of the pellet. Then, the experimental SOFCs were operated at below 500 oC. During the operation, the j-V characteristics and electrochemical impedance spectroscopy (EIS) of the cells were studied. The thermal stability of the cells was also characterized by potentiostatic measurement and the measured data were compared to the cell with pure Ni anode.
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