This study focuses on the tribological behaviour of Cu-layer covered a-C:H films and the transfer film formation mechanisms, by means of tribological test, surface profiling, Raman spectroscopy and in-depth transmission electron microscopy, etc. Results showed that introducing a Cu cover layer with proper thickness would significantly enhance the tribological performance of a-C:H films at low sliding speed. The CoF of a-C:H was reduced to 0.004 (superlubricating) at the optimal Cu-layer thickness of ∼32 nm. The transferred material on counterpart was composed of a dense Cu layer and an a-C/(nc-Cu/Cu2O) composite layer, which promoted the formation of a similar layer on a-C:H wear track. The strength and durability of a-C/(nc-Cu/Cu2O) composite layer was double-reinforced by “physical pinning” and Cu-O-C “chemical bonding”.
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