Ceramic CaCu3Ti4O12 (ССТО), Ca0.98Cu3Ti4O11.96F0.04 (CΔCTOF), and CaCu3Ti4O11.92F0.08 (CCTOF) were synthesized by the solid-state reaction technique. Fluorine stimulates the formation of Cu-depleted grains, Cu3+ ions, and Cu-rich composites CuO-xCCTO-yTiO2-zSiO2-wСaF2 (w < z < y < x < 1), which include parts of grinding bodies. The observed structures are distinct from simple grain boundaries of the perovskite phase. They exhibit a terrace-ledge-kink (TLK) morphology and, in some cases, the presence of twinning planes, both independent of fluorine content. They are responsible for the nanoscale barrier layer capacitance (NBLC) component of the dielectric response of both CCTO and CuO ceramics. Changes in the unit cell parameter a, and titanium and copper valences indicate that Ca2+ ions occupy part of Cu vacancies in the grains of CCTO and CCTOF. In CΔCTOF, Ti3+ ions in the copper sublattice were found for the first time using NMR. The maximum ε′1kHz = 6.9 × 104 demonstrates CΔCTOF and the minimum tan δ = 0.045 is characteristic of CCTOF.
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