AbstractOrganotrialkoxysilanes are unique compounds that play an important role in modern science and industry. Their structure determines their varied use both in production and academic research. The development of the synthesis of organotrialkoxysilanes and polymers based on them, taking into account environmental realities, is an important task. In our work, we present an original approach for the preparation of organotriethoxysilanes, starting from azidoalkyltriethoxysilanes and various types of substrates containing a terminal triple bond, by the azide‐alkyne cycloaddition (CuAAC) mechanism without the use of solvents, catalyst ligands, and amines. We also found the self‐catalyzing effect of the triazole fragment resulting from the azide‐alkyne cycloaddition in the reaction of hydrolysis and condensation of alkoxy groups, which made it possible to obtain a series of silsesquioxane products only by adding water, without the use of catalysts. As a result, a new, original scheme for the preparation of organosilicon organotrialkoxysilanes of a monomeric structure with their subsequent transformation into silsesquioxane polymers under “green” conditions is built.