Ta2O5 Waveguide Research Articles

High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE).

We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon fabricated by the photolithography-assisted chemo-mechanical etching technique. Low-confinement waveguides of larger than 70% coupling efficiency with optical fibers and medium propagation loss around 1 dB/cm are investigated in the experiment. Monolithic microring resonators based on Ta2O5 waveguides have shown the quality factors to be above 105 near 1550 nm. The demonstrated Ta2O5 waveguides and their fabrication method hold great promise in various cost-effective applications, such as optical interconnecting and switching.

Low-loss tantalum pentoxide photonics with a CMOS-compatible process.

We report a Ta2O5 photonic platform with a propagation loss of 0.49 dB/cm at 1550 nm, of 0.86 dB/cm at 780 nm, and of 3.76 dB/cm at 2000 nm. The thermal bistability measurement is conducted in the entire C-band for the first time to reveal the absorption loss of Ta2O5 waveguides, offering guidelines for further reduction of the waveguide loss. We also characterize the Ta2O5 waveguide temperature response, which shows favorable thermal stability. The fabrication process temperature is below 350°C, which is friendly to integration with active optoelectronic components.

2.5-Octave supercontinuum generation in a Ta2O5 waveguide pumped by a dual-wavelength fiber laser

2.5-Octave supercontinuum generation in a Ta2O5 waveguide pumped by a dual-wavelength fiber laser

On-chip Er-doped Ta2O5 waveguide amplifiers with a high internal net gain.

We designed and fabricated a double-layered structure Er3+:Ta2O5 waveguide and investigated its optical amplification performance in C band. The pump laser threshold for zero gain at 1533 nm was 2.5 mW, and the internal net gain was ∼4.63 dB/cm for a lunched pump power of 36.1 mW at 980 nm and signal input power of -30.0 dBm (1 µW). The relationship between the internal gain and the signal input power was also investigated, and a large internal net gain of 10.58 dB/cm was achieved at a signal input power of ∼-47.1 dBm. The results confirm the potentials of the use of Ta2O5 as a host material for optical waveguide amplification.

Near visible pump high efficiency supercontinuum generation spanning from high-order-mode within Ta2O5 waveguides

Broadband optical sources emitting low pulse energy have attracted significant attention owing to their remarkable potential for quantum technology. One of the obstacles to achieving this objective is the weak anomalous dispersion. In this study, supercontinuum generation (SCG) from 645.3 nm to 851 nm pumped by a Ti:sapphire femtosecond laser at a center wavelength of 800 nm is demonstrated by using a high-order mode (transverse electric TE20) and engineering the dispersion within the high nonlinear refractive index material, the tantalum pentoxide (Ta2O5) waveguide. The total on-chip average pulse energy of around few pJ used to excite SCG shows clear future for applications.

Improved designs for short wavelength amplification based on a thulium-doped Ta2O5 waveguide

Abstract This study aims to design a thulium-doped Ta2O5 amplifier for short wavelength amplification at 1.7 µm waveband. The waveguide width of the proposed design is theoretically optimized to ensure the condition of single mode guidance and the appropriate width must be less than 3.2 µm. Finite element method based edge element is applied to compute the optical field distribution of the fundamental mode across the waveguide length and to find the values of the overlapping factor and the effective mode field area of the proposed waveguide. The numerical results display that 0.83 and 6.8 µm2 are the computed values of the overlapping factor and the effective mode field area, respectively at 1.72 µm wavelength. The amplification performance of a Tm:Ta2O5 amplifier is presented based on the rate equations and the power distribution equations. The effects of the waveguide length and the pump power are investigated on the signal amplification at 1.72 µm wavelength. The simulation results reveal that about 25 dB small signal gain and 8.7 dB noise figure could be achieved at 1.72 µm wavelength when pumped with only 100 mW pump power at 1630 nm wavelength. As a result, it is possible to achieve an efficient laser and amplifier source at the 1.7 µm waveband based on a Tm:Ta2O5 waveguide.

Higher order mode supercontinuum generation in tantalum pentoxide (Ta2O5) channel waveguide

We fabricated tantalum pentoxide (Ta2O5) channel waveguides and used them to experimentally demonstrate higher-order mode supercontinuum (SC) generation. The Ta2O5 waveguide has a high nonlinear refractive index which was in an order magnitude of 10–14 cm2/W and was designed to be anomalously dispersive at the pumping wavelength. To the best of our knowledge, this is the first time a higher-order mode femtosecond pump based broadband SC has been measured from a nonlinear waveguide using the phase-matching method. This enabled us to demonstrate a SC spectrum spanning from 842 to 1462 nm (at − 30 dB), which corresponds to 0.83 octaves, when using the TM10 waveguide mode. When using the TE10 mode, the SC bandwidth is slightly reduced for the same excitation peak power. In addition, we theoretically estimated and discussed the possibility of using the broadband higher-order modes emitted from the Ta2O5 waveguide for trapping nanoparticles. Hence, we believe that demonstrated Ta2O5 waveguide are a promising broadband light source for optical applications such as frequency metrology, Raman spectroscopy, molecular spectroscopy and optical coherence tomography.

Low-loss low thermo-optic coefficient Ta2O5 on crystal quartz planar optical waveguides

Optical resonator-based frequency stabilization plays a critical role in ultra-low linewidth laser emission and precision sensing, atom clocks, and quantum applications. However, there has been limited success in translating traditional bench-top stabilization cavities to compact on-chip integrated waveguide structures that are compatible with photonic integration. The challenge lies in realizing waveguides that not only deliver low optical loss but also exhibit a low thermo-optic coefficient and frequency noise stability. Given the problematic sources of frequency noise within dielectrics, such as thermorefractive noise, resonators with small thermo-optic response are desirable for on-chip reference cavities. We report the first demonstration of a Ta2O5 (tantala) waveguide core fabricated on a crystal quartz substrate lower cladding with TEOS-PECVD SiO2 upper cladding. This waveguide offers significant advantages over other waveguides in terms of its low thermo-optic coefficient and reduced thermorefractive-related frequency noise. We describe the waveguide structure and key design parameters as well as fabrication considerations for processing tantala on quartz waveguides. We report a waveguide thermo-optic coefficient of −1.14 × 10−6 RIU/K, a value that is over 6 times smaller in magnitude than that of SiO2-substrate tantala waveguides, with a propagation loss of 1.19 dB/cm at 1550 nm and <1.33 dB/cm across the 1525 nm–1610 nm wavelength range. Within a 1.6 mm radius ring resonator, we demonstrate a 2.54 × 105 intrinsic Q factor. With the potential for very low loss and the ability to control the thermal response, this waveguide platform takes a key step toward creating thermally stable integrated resonators for on-chip laser frequency stabilization and other applications.

Spectroscopy of thulium-doped tantalum pentoxide waveguides on silicon

The spectroscopic properties and laser operation of thulium-doped tantalum pentoxide (Tm:Ta2O5) waveguides are reported in this paper. Fluorescence ranging from 1600 nm to 2200 nm, corresponding to the 3F4 → 3H6 transition was observed from 3 wt% Tm:Ta2O5 waveguides pumped at a wavelength of 795 nm. Measurements of excited-state lifetime, the emission and absorption spectra, with subsequent calculation of the cross-sections for the deposited films, reveal its potential as a gain medium. Laser operation at a wavelength of 1865 nm was obtained with feedback from the polished end faces alone, demonstrating gain of >9 dB/cm.

Tantalum pentoxide (Ta2O5) based athermal micro-ring resonator

By analyzing the temperature-dependent transmission spectrum of a Ta2O5 micro-ring resonator, the thermal-optical coefficient at the optical communication wavelength regime has been determined. The temperature-dependent resonance wavelength shift of the resonator with radius 50 µm was measured as 7.8 pm/K, and the thermal-optical coefficient at ∼1543 nm was estimated to be 6×10−6 /K. Furthermore, a power-dependent transmission of the micro-ring resonator was performed to characterize the effects of local heating and nonlinear absorption. No significant power-dependent wavelength shift and asymmetric response were observed in the optical wavelength up to 125 mW. This suggests the absence of nonlinear absorption and thermal expansion effects in the Ta2O5 ring resonator. The Ta2O5 waveguide is potentially a superior candidate for applications in optical communication systems or high-power nonlinear waveguides due to its thermal stability, thermal insensitivity, and absence of nonlinear absorption.

Visible to near-infrared octave spanning supercontinuum generation in tantalum pentoxide (Ta2O5) air-cladding waveguide.

In this work, for the first time, to the best of our knowledge, an anomalous dispersion CMOS-compatible Ta2O5 waveguide was realized, and broadband on-chip supercontinuum generation (SCG) was accordingly demonstrated. When pumped at a center wavelength of 1056nm with pulses of 100fs duration and peak power of 396W, a supercontinuum ranging from 585nm to 1697nm was generated, comprising a bandwidth of more than 1.5 octaves and leading to an efficient SCG source. The excellent performance for Ta2O5 to generate SCG benefits mainly from its high nonlinear refractive index, which enhances the efficiency of the nonlinear conversion process.

Optical spectrometer based on continuously-chirped guided mode resonance filter.

In this work we introduce a tunable GMR filter based on continuously period-chirped (ΔP = 130 nm) gratings using a Ta2O5 waveguide layer with graded thickness (ΔT = 36 nm). The structure of the gradient-period grating is defined using a modified Lloyd's mirror interferometer with a convex mirror, and Ta2O5 film used for the gradient is deposited using masked e-beam evaporation. The as-realized chirped GMR filter provides sharp transmission dips at resonant wavelengths with a filter bandwidth of approximately 4.2 nm and 0.78 nm when respectively applied to TE and TM polarized light under normal incidence. Gradually sweeping the chirped GMR filter makes it possible to monotonically sweep through resonant wavelengths from 500 to 700 nm, while maintaining stable filter bandwidth and transmission intensity. The optical spectrum of the incoming light can then be loyally reconstructed accordingly. We successfully demonstrate the spectrum reconstruction of a white light emitting diode and a dual-peak laser beam using the proposed chirped GMR filter as a dispersive device.

Optical fiber–Ta2O5 waveguide coupler covered with hydrophobic zeolite film for vapor sensing

Coupler comprising side-polished optical fiber and tantalum pentoxide (Ta2O5) waveguide coated with 330nm hydrophobic MFI-type zeolite films was utilized as chemical sensor for acetone vapors. The thickness of the zeolite films was selected through theoretical modeling of the resonant wavelength shift in order to achieve the highest possible sensitivity. The spectral positions of the resonances were determined through solving of the characteristics equations for the coupled waveguides and finding their mode effective refractive indices. The optical quality of the coupler surface, that is responsible for the proper operation of the device, was controlled through 3D optical imaging prior to and after deposition of the zeolite films. The application of side-polished optical fiber–Ta2O5 waveguide coupler covered with hydrophobic zeolite film for acetone vapor sensing was demonstrated and discussed.

Power Budget Analysis for Waveguide-Enhanced Raman Spectroscopy.

Waveguide-enhanced Raman spectroscopy (WERS) is emerging as an attractive alternative to plasmonic surface-enhanced Raman spectroscopy approaches as it can provide more reproducible quantitative spectra on a robust chip without the need for nanostructured plasmonic materials. Realizing portable WERS systems with high sensitivity using low-cost laser diodes and compact spectrometers requires a detailed analysis of the power budget from laser to spectrometer chip. In this paper, we describe theoretical optimization of planar waveguides for maximum Raman excitation efficiency, demonstrate WERS for toluene on a silicon process compatible high index contrast tantalum pentoxide waveguide, measure the absolute conversion efficiency from pump power to received power in an individual Raman line, and compare this with a power budget analysis of the complete system including collection with an optical fiber and interfacing to a compact spectrometer. Optimized 110 nm thick Ta2O5 waveguides on silica substrates excited at a wavelength of 637 nm are shown experimentally to yield overall system power conversion efficiency of ∼0.5 × 10(-12) from the pump power in the waveguide to the collected Raman power in the 1002 cm(-1) Raman line of toluene, in comparison with a calculated efficiency of 3.9 × 10(-12) Collection efficiency is dictated by the numerical and physical apertures of the spectral detection system but may be improved by further engineering the spatial and angular Raman scattering distributions.

Four-wave-mixing in the loss low submicrometer Ta₂O₅ channel waveguide.

A degenerate four-wave-mixing (FWM) operation in the Ta2O5 submicrometer channel waveguide has been successfully demonstrated. The propagation loss of 1.5 dB/cm and total insertion loss of 5.1 dB are realized in a 12.6 mm long waveguide with inverse taper structure. The wavelength and quadratic pumping power-dependent measurements on optical transmission confirm FWM performance and characterize the nonlinearity of waveguide. The conversion efficiency of -50 dB at coupled pump power of 40 mW is observed, suggesting that the nonlinear refractive index of Ta2O5 waveguide at 1550 nm is estimated to be 1×10(-14) cm2/W. Our primary results indicate that the Ta2O5 submicrometer channel waveguide has great potential in developing nonlinear waveguide applications.

Spectroscopy of high index contrast Yb:Ta2O5 waveguides for lasing applications

Ytterbium-doped waveguides are required for compact integrated lasers and Yb- doped Ta2O5 is a promising candidate material. The design, fabrication and spectroscopic characterisation of Yb:Ta2O5 rib waveguides are described. The peak absorption cross-section was measured to be 2.75×10-20 cm2 at 975 nm. The emission spectrum was found to have a fluorescence emission peak at a wavelength of 976 nm with a peak cross-section of 2.9×10-20 cm2 and a second broad fluorescence band spanning from 990 nm to 1090 nm. The excited- state life time was measured to be 260 μs.

Spectroscopy, Modeling, and Performance of Erbium-Doped Ta$_{2}$O$_{5}$ Waveguide Amplifiers

The design, fabrication, spectroscopic characterization, and performance of an Er:Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> rib waveguide amplifier is described. Rib waveguides with low loss (<; 0.65 dB/cm at 1600 nm) were obtained. Their absorption spectrum was measured and McCumber theory was employed to obtain the emission spectrum, leading to the absorption and emission cross sections. Numerical modeling for gain optimization in Er:Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> waveguide amplifiers is presented, employing the experimentally determined parameters. Finally, net optical gain of 2.1 dB/cm at 1531.5 nm is demonstrated in a 2.3 cm long Er:Ta <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> rib waveguide when pumped with 977 nm laser diode, and compared with simulations to deduce the extent of upconversion.

Chi 3 dispersion in planar tantalum pentoxide waveguides in the telecommunications window

We report on the dispersion of the third-order nonlinear susceptibility (chi(3) or "Chi 3") in planar Ta2O5 waveguides in the telecommunications spectral window. We utilize the observation of third-harmonic generation under ultrashort pulsed excitation as a reference-free characterization method of chi(3) and obtain a large nonlinear coefficient, 2x10(-13) esu, at 1550 nm. Our observation of efficient third-harmonic generation in Ta2O5 waveguides in the telecoms window reveals the potential of this material system in high-speed integrated nonlinear optical switches.

Planar integrated optical waveguide used as a transducer to yield chemical information: detection of the activity of proteolytic enzymes e.g. serine-proteases

The paper shows the very first results of a feasibility study where the activity of proteolytic enzymes towards dye-labelled artificial substrates immobilized on the surface of planar optical Ta2O5 waveguide was investigated. Within this project, a chromophore label was developed, synthesized and attached to the carboxy-terminus of specific tripeptides. The goal was to develop a highly sensitive optical assay in order to monitor the activity of serine-proteases by cleavage of the amide bond between peptide and chromophore. On the one hand, a strategy was developed to immobilize the labeled tripeptide unto integrated planar waveguides. On the other hand, an instrument, the so-called “chip-reader” was developed to detect the biological process on the surface of the integrated planar optical waveguide. Surface characteristics were analyzed by XPS, TOF-SIMS and contact angle measurements. A comparison between the effectivity of ATR-photometry on chip using TE0 mode and photometry in transmission mode is discussed.

Fluorescence-based array biosensors for detection of biohazards.

Total internal reflection fluorescence (TIRF) is a process whereby fluorophores that are either attached to or are in close proximity with the surface of a waveguide are selectively excited via an evanescent wave. Planar waveguides provide the possibility of immobilizing multiple capture biomolecules onto a single surface and therefore, offer the exciting prospect of multi-analyte detection. The production of arrays and the results of various groups which use TIRF to interrogate such surfaces is reviewed, along with a look at how far the field has advanced toward the production of an automated, portable, multi-analyte array biosensor for real-time biohazard detection. In particular, a miniaturized, fully automated, stand-alone array biosensor developed at the Naval Research Laboratory is reported that monitors interactions between binding partners either as the final image or in real-time. A variety of analytes including toxins, bacteria and viruses have been detected both in buffer and complex matrices, such as blood and soil suspensions, with comparable detection limits. A number of developments have led to a TIRF array biosensor weighing only 5.5 kg which is automated for environmental, clinical and food monitoring or for detection of bioterrorist agents.