Permethylated cyclolinear polysilanes and polyoxasilanes were synthesized by the reaction of 1,3- and 1,4-dichlorodecamethylcyclohexasilanes with metallic sodium (the Wurtz-type reaction) and cis-1,3-dihydroxydecamethylcyclohexasilane (heterofunctional polycondensation reaction). Thermal and thermooxidative stability, as well as spectroscopic properties of the polymers obtained and products of their thermal decomposition were studied.