Abstract High voltage DC relays are a crucial component in new energy vehicles. Due to the high failure rate caused by contact sticking (fusion welding), existing technologies can only analyze contact morphology after failure. There is an urgent need to determine the quantitative characterization value of contact surface morphology and the correlation between morphology, failure mechanisms, and working conditions. In this study, an Olympus DSX1000 microscope is used to extract surface topography data, and a quantitative topography characterization method based on a machine vision system is proposed to quantitatively analyze contact surface changes after arc erosion. Grey correlation analysis was applied to explore the relationship between electrical parameters such as voltage, current, and capacitance, and the contact morphology features. The results show that current and capacitance have the greatest influence on contact surface features after arc erosion, while voltage has a relatively smaller influence. This conclusion is consistent with the experimentally observed arc erosion features. Finally, an arc ion sputtering deposition model was developed to analyze the material transfer mode and its influence on the contact failure mechanism. The results provide a scientific basis for the analysis and design improvement of high voltage DC relays.