Precision polishing of small modulus gears is a difficult task due to the complexity of their geometry. Electrolytic plasma polishing technology as a green and efficient processing method, it can effectively decrease the friction between parts and improve the service life. However, considering the uneven distribution of gas layers on the surface of workpieces in electrolytic plasma polishing, which affects the precision of workpiece shapes after polishing, this study proposed the use of ultrasonic vibrations to generate pressure waves to improve the fluid characteristics. Comparative experiments on small modulus gear electrolytic plasma polishing with and without ultrasonic vibration were conducted. A high-speed camera was utilized to monitor the distribution of gas layers around the workpiece during the polishing process in real-time. The optical measurement methods were used to evaluate the gear precision. The results indicate that ultrasonic assistance is beneficial in improving the uniformity of the gas layers surrounding the workpiece, achieving higher gear precision, and obtaining a lower surface roughness after polishing. Through orthogonal experiments, this study analyzed the effects of various process parameters on the surface roughness of gear profiles and the uniformity of material removal after polishing. These parameters included power voltage, polishing time, workpiece immersion depth, ultrasonic frequency, and workpiece posture angle. An optimal combination of process parameters was identified. The results show that the best surface roughness and gear precision were achieved with a power voltage of 300 V, a polishing time of 4 min, a workpiece immersion depth of about 10 mm, an ultrasonic frequency of 40 kHz, and a workpiece tilt angle of 45°.
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