Surface Acoustic Wave Research Articles

Acoustofluidic Tweezers Integrated with Droplet Sensing Enable Multifunctional Closed‐Loop Droplet Manipulation

AbstractDroplet manipulation technologies with surface acoustic waves attract significant attention for applications in fluid handling and bioanalysis. However, existing technologies face challenges in automation, precision, and functional integration, limiting broader applications. In this work, a highly integrated droplet‐sensing acoustofluidic tweezer is developed, incorporating orthogonally arranged slanted finger interdigital transducers and a custom‐designed control and detection circuit system. Using a single acoustic device, this tweezer enables switchable acoustic droplet manipulation and detection, providing multifunctional closed‐loop manipulation of on‐chip microliter‐scale droplets. The platform takes advantage of the wideband frequency response characteristics of the transducers, along with an automated droplet detection algorithm, enabling high‐precision detection of central positions, edge positions, contact diameters, and the number of droplets. With this feedback, automated closed‐loop control of various droplet manipulation functions, including transportation, merging, mixing, splitting, and internal particle enrichment, is achieved for the first time on a single acoustic platform. This significantly enhances the precision, efficiency, and fault tolerance of the manipulation process. This droplet‐sensing acoustofluidic tweezer provides an innovative acoustic solution for droplet manipulation technologies in fields such as fluid processing and biosensing, demonstrating significant application potential.

Injection locking in DC-driven spintronic vortex oscillators via surface acoustic wave modulation

Control of the microwave signal generated by spin-transfer torque oscillators (STOs) is crucial for their applications in spin wave generation and neuromorphic computing. This study investigates injection locking of a DC-driven vortex STO using surface acoustic waves (SAWs) to enhance the STO’s signal and allow for its synchronization with external inputs. We employ a simplified model based on Thiele’s formalism and highlight the role of vortex deformations in achieving injection locking. Micromagnetic simulations are conducted to validate our theoretical predictions, revealing how the locking bandwidth depends on SAW amplitude, as well as on the amplitude and direction of an applied external field. Our findings are pivotal for advancing experimental research and developing efficient low-power synchronization methods for large-scale STO networks.

Emerging Trends in Integrated Digital Microfluidic Platforms for Next-Generation Immunoassays

Technologies based on digital microfluidics (DMF) have made significant advancements in the automated manipulation of microscale liquids and complex multistep processes. Due to their numerous benefits, such as automation, speed, cost-effectiveness, and minimal sample volume requirements, these systems are particularly well suited for immunoassays. In this review, an overview is provided of diverse DMF manipulation platforms and their applications in immunological analysis. Initially, droplet-driven DMF platforms based on electrowetting on dielectric (EWOD), magnetic manipulation, surface acoustic wave (SAW), and other related technologies are briefly introduced. The preparation of DMF is then described, including material selection, fabrication techniques and droplet generation. Subsequently, a comprehensive account of advancements in the integration of DMF with various immunoassay techniques is offered, encompassing colorimetric, direct chemiluminescence, enzymatic chemiluminescence, electrosensory, and other immunoassays. Ultimately, the potential challenges and future perspectives in this burgeoning field are delved into.

Analysis of Multivariable Sensor Responses to Multi-Analyte Gas Samples in the Presence of Interferents and Humidity.

This work presents an adaptive sensor signal-processing approach to enable quantification, using a single gas sensor or a small sensor array, of multianalyte mixtures of aromatic hydrocarbons in the presence of various interferents and humidity for environmental-monitoring applications. Dynamic sensor responses are analyzed by extracting multivariable sensing parameters to provide necessary sensitivity and selectivity. This is achieved by integrating the Levenberg-Marquardt-modified, exponentially weighted, recursive-least-squares-estimation (LM-modified EW-RLSE) algorithm and principal-component analysis (PCA). Achieving measured detection limits as low as 3 μg/L (≤1 ppm by volume) for 6 target analytes, the system exhibits excellent PCA cluster separation for all analytes in the mixtures, with reliable identification and accurate quantification, even in the presence of various interferents. Concentration errors of approximately ±5% are obtained for mixtures containing up to 6 BTEX compounds (including chemical isomers) and up to 4 interferents. Additionally, the study investigates the impact of humidity on the polymer/plasticizer-coated shear-horizontal surface acoustic wave (SH-SAW) sensors, demonstrating accurate concentration estimation in a relative humidity range from dry nitrogen to 65%. This sensing-and-multivariate-signal-processing approach is a promising candidate for reliable environmental monitoring in real-world applications.

Ultraflat Cu(111) foils by surface acoustic wave-assisted annealing

Ultraflat metal foils are essential for semiconductor nanoelectronics applications and nanomaterial epitaxial growth. Numerous efforts have been devoted to metal surface engineering studies in the past decades. However, various challenges persist, including size limitations, polishing non-uniformities, and undesired contaminants. Thus, further exploration of advanced metal surface treatment techniques is essential. Here, we report a physical strategy that utilizes surface acoustic wave assisted annealing to flatten metal foils by eliminating the surface steps, eventually transforming commercial rough metal foils into ultraflat substrates. Large-area, high-quality, smooth 2D materials, including graphene and hexagonal boron nitride (hBN), were successfully grown on the resulting flat metal substrates. Further investigation into the oxidation of 2D-material-coated metal foils, both rough and flat, revealed that the hBN-coated flat metal foil exhibits enhanced anti-corrosion properties. Molecular dynamics simulations and density functional theory validate our experimental observations.

Band edge modulation for high-performance LL-SAW resonators on LiNbO3/SiC by introducing an ultra-thin intermediate oxide layer

With the exploding demand of rapid information transmission, high-frequency acoustic filtering devices are becoming an immediate need. Longitudinal leaky surface acoustic wave (LL-SAW) devices with unique advantages can be a promising platform. In this paper, we introduce a 100 nm intermediate oxide layer into the X-cut lithium niobate on silicon carbide (LiNbO3/SiC) to improve the in-band performance of LL-SAW resonators. First, the dispersion curves of the structures are analyzed by finite element method. In this part, we successfully interpret the intrinsic low quality factor (Q) of LL-SAW on LiNbO3/SiC in general design, and predict the enhancement of Q by introducing an intermediate oxide layer without degradation on spurious response. Then, one port resonators considered in the simulation are fabricated and measured. As a result, enhancements in Bode Q among the whole passband are confirmed. Compared with devices state of art, resonators with leading performances are demonstrated. The fabricated resonators have peak-valley admittance ratio of 63.87 dB, Bode Q of ∼300 at fr and ∼530 at far, keff2of 15.66 % and phase velocity of 6187.3 m/s. Additionally, the resonant frequency of SH1 mode shifts to higher frequency. This work enables the design of next generation high frequency mobile communication filters.

Optimization analysis of the particle focusing and separation parameters of a sheathless microfluidic device using standing surface acoustic waves

Flow-based particle separation usually requires a sheath flow for particle manipulation. Sheath fluid is a specialized buffer solution that directs the alignment of particles or cells into the center of the stream. By utilizing sheath flow, the particles or cells can be focused on the middle line of the microchannel, where they can be individually analyzed. However, the method requires an additional design for creating a suitable sheath flow. Purity and separation efficiency may also be influenced by the sheath flow. In this study, we present a sheathless device for particle focusing and separation using standing surface acoustic waves (SSAWs). The device comprises two regions: the focusing and separation regions. In the focusing region, particles in a continuous flow are aligned in the middle of the microchannel by SSAWs; in the separation region, tilted-angle SSAW-based particle separation is used to control particle migration. Varying particle sizes were focused in the focusing region and then separated in the separation region in the sheathless device. Experiments and simulations were also utilized to optimize a sheathless device. 10 and 20 μm particle focusing and separation were conducted in a sheathless device for the first time. We demonstrate that the separation of particles with a diameter of 10 and 20 μm has 90.8 ± 1.75% and 99.5 ± 0.8% separation efficiency, and 98 ± 3.4 and 97.9 ± 0.9% purity. Compared with other focusing and separation technologies, our device can also provide high purity, high separation efficiency, and high device density.

Design and Investigation of a High-Performance Quartz-Based SAW Temperature Sensor

In this work, a surface acoustic wave (SAW) temperature sensor based on a quartz substrate was designed and investigated. Employing the Coupling-of-Modes (COM) model, a detailed analysis was conducted on the effects of the number of interdigital transducers (IDTs), the number of reflectors, and their spacing on the performance of the SAW device. The impact of the transversal mode of quartz SAWs on the device was subsequently examined using the finite element method (FEM). The simulation results indicate that optimizing these structural parameters significantly enhances the sensor’s sensitivity and frequency stability. SAW devices with optimal structural parameters were fabricated, and their resonant frequencies were tested across a temperature range of 25–150 °C. Experimental results demonstrate that the SAW temperature sensor maintains high performance stability and data reliability throughout the entire temperature range, achieving a Bode-Q of 7700. Furthermore, the sensor exhibits excellent linearity and repeatability. An analysis of the sensor’s response under varying temperature conditions reveals a significant temperature dependency on its Temperature Coefficient of Frequency (TCF). This feature suggests that the sensor possesses potential advantages for applications in industrial process control and environmental monitoring.

Impacts of material design on heat dissipation and power handling of acoustic-wave devices based on bonding wafers

Heat dissipation in surface acoustic wave (SAW) devices has never been researched in detail previously. With the arrival of the 5G era, more SAW devices with more complicated structures such as bonding wafers need to be integrated, easily leading to heat accumulation, so investigating heat dissipation in SAW devices is now necessary and urgent. Learning from the thermal-management researches in other fields and considering the mechanism and properties of SAW devices, this work believes that optimizing material design is efficient for heat dissipation enhancement. Therefore, this work for the first time systematically investigates the impacts of material design on heat dissipation and power handling which is significantly influenced by heat dissipation, building up a thermal-management theory for SAW devices based on bonding wafers. This work proposes a theoretical thermal calculation method for SAW devices, building a model and coding a calculation program. This work develops an experimental method by which the impacts of material design on heat dissipation can be deduced from those on power handling, designing and fabricating band-8 duplexers based on bonding wafers with different material designs. This work reveals that SiO2 and epoxy both weaken heat dissipation and impair power handling, while Si, sapphire, and SiC can all be chosen as heat-sink materials. Cost-efficient Si is quite proper for supporting substrates, and metal bumps are effective for thermal dissipation. This work gives guidance on enhancements of heat dissipation and power handling, helping researchers manage thermal properties in SAW devices and promoting the development of 5G communication.

Design of a Novel SiP Integrated RF Front-End Module Based on SOI Switch and SAW Filter

This paper proposes a novel System-in-Package (SiP) integrated architecture that incorporates Silicon-On-Insulator (SOI) switches and Surface Acoustic Wave (SAW) filters within the chip, aiming to fulfill the demands for miniaturization and multi-functionality for application in emerging wireless technologies. The proposed architecture not only reduces the integration complexity but also considers the architectural design of the integrated module, impedance matching techniques, and signal integrity for carrier aggregation (CA) technology realization. The feasibility of employing SOI switches and SAW filters based on SiP design has been validated through the trial production of a Sub-3GHz radio frequency (RF) front-end diversity receiver module. The resulting RF front-end module demonstrates exceptionally high packaging density and enhanced communication reliability, rendering it suitable for diverse applications in miniaturized RF systems.

Single-Ended Surface Acoustic Wave Pressure Resonators

Abstract Surface acoustic wave (SAW) sensors exhibit advantageous attributes for pressure detection, including compact dimensions, cost-effectiveness, facile integration, elevated sensitivity, and a high quality factor (Q value). In this study, the single-ended resonant configuration of SAW pressure sensing element based on ST-X cut quartz was simulated and fabricated. The influence of the interdigitated transducer (IDT) and applied pressure on the resonance frequency of SAW were simulated and analyzed. The designed phase velocity (3159.344 m/s) without IDT is closest to the theoretical phase velocity (3158 m/s) of SAW propagation in the substrate, and the relative error is about 0.043%. The designed phase velocity of SAW dropped to 3149.198 m/s due to the loading of the IDT mass. With an increase in applied pressure from 0 to 350 kPa, the resonance frequency of the SAW decreases from 157.05 to 154.02 MHz, yielding a maximum linear pressure sensitivity of approximately 8.6 kHz/kPa. The measured center frequencies of the fabricated single-ended SAW devices are predominantly clustered around 157 MHz, exhibiting a deviation of 0.46 MHz from the simulated results. The present work establishes a foundation for subsequent experimental investigations into pressure sensing.

Movable surface acoustic wave tweezers: a versatile toolbox for micromanipulation

Surface acoustic wave (SAW) tweezers are a promising multifunctional micromanipulation method that controls microscale targets via patterned acoustic fields. Owing to their device structure and bonding process, most SAW tweezers have limitations in terms of controlling the position and motion of the acoustic traps, as they generate an acoustic field with a fixed region and adjust the manipulation effects via signal modulation. To address this challenge, we propose movable SAW tweezers with a multilayer structure, achieving dynamic control of their wave field and acoustic trap positions; we demonstrate their precise manipulation functions, such as translation, in-plane rotation, out-of-plane rotation, and cluster formation, on a wide spectrum of samples, including particles, bubbles, droplets, cells, and microorganisms. Our method not only improves the degree of freedom and working range of SAW tweezers but also allows for precise and selective manipulation of microtargets via microtools and localized wavefields. Owing to their flexibility, versatility, and biocompatibility, the movable SAW tweezers can be a practical platform for achieving arbitrary manipulation of microscale targets and have the potential to play significant roles in biomedical microrobotics.

Application of Graphene in Acoustoelectronics.

An interdigital transducer structure was fabricated from multilayer graphene on the surface of the YZ-cut of a LiNbO3 ferroelectric crystal. The multilayer graphene was prepared by CVD method and transferred onto the surface of the LiNbO3 substrate. The properties of the multilayer graphene film were studied by Raman spectroscopy. A multilayer graphene (MLG) interdigital transducer (IDT) structure for surface acoustic wave (SAW) excitation with a wavelength of Λ=60 μm was fabricated on the surface of the LiNbO3 crystal using electron beam lithography (EBL) and plasma chemical etching. The amplitude-frequency response of the SAW delay time line was measured. The process of SAW excitation by graphene IDT was visualized by scanning electron microscopy. It was demonstrated that the increase in the SAW velocity using graphene was related to the minimization of the IDT mass.

Wireless Powered Surface Acoustic Wave Platform for Achieving Integrated Functions of Fogging/Icing Protection and Monitoring.

In this study, we introduced an integrated approach using piezoelectric thin film-based surface acoustic wave (SAW) and wireless power transfer (WPT) technologies, designed for both passive monitoring and active defogging/icing functions. We systematically investigated the resonant frequency shifts of ZnO/glass SAW devices, establishing their correlations with variations in humidity and temperature under cold conditions. Acoustic waves generated through the ZnO/glass SAW device were used for defogging and deicing functions with effects of RF powers and acousto-heating thoroughly evaluated. More significantly, the WPT system was successfully applied for achieving defogging and deicing functions, with its performance comparable to that of conventional wired SAW systems. Our findings demonstrated that the WPT SAW system significantly minimizes localized acousto-heating effects, although the time taken for both defogging and deicing was slightly longer than the wired system. This work represents a significant advancement in developing multifunctional, optically compatible, and wireless-integrated solutions for SAW based ice protection.

Evaluation of fatigue damage of structural steel based on attenuation of laser-induced surface acoustic wave

ABSTRACT In this paper, the fatigue damage degree of low-alloy structural steel is evaluated by using the attenuation characteristics of laser-induced surface acoustic wave (SAW) during propagation. Taking the typical structural steel material Q345 as an example, a cracks model of fatigue damage is established, and the finite element method is used to solve the model. The results showed that the attenuation coefficient of SAW can reflect the depth and density of fatigue cracks. The surface measurement experiments of specimens with stress cycles of 0, 50000, 100000, 150000, and 200,000 showed that with the increase of stress cycles, the attenuation coefficient of SAW increases as a whole, indicating that it is feasible to evaluate the fatigue damage degree based on the attenuation of SAW. A method of applying tensile stress to the material to improve the sensitivity of fatigue damage evaluation is proposed. The tensile stress is used to offset the horizontal amplitude of the SAW, keeping the fatigue cracks in an open state and increasing the attenuation coefficient of SAW. The attenuation coefficient measurement experiment shows that this method is feasible.

Nonreciprocal transmission of surface acoustic waves induced by magneotoelastic coupling with an anti-magnetostrictive bilayer

In this study, we report giant nonreciprocal transmission of shear-horizontal surface acoustic waves (SH-SAWs) in a ferromagnetic bilayer structure with negative–positive magnetostriction configuration. Although the directions of magnetization in the neighboring layers are parallel, SH-SAWs can excite optical-mode spin waves (SWs) via magnetoelastic coupling at relatively low frequencies, which is much stronger than acoustic-mode SWs at high frequencies. The measured magnitude nonreciprocity or isolation of SH-SAWs exceeds 40 dB (or 80 dB/mm) at 2.333 GHz. In addition, maximum nonreciprocal phase accumulation reaches 188° (376°/mm). Our theoretical model and calculations provide an insight into the observed phenomena and demonstrate a pathway for further improving nonreciprocal acoustic devices toward highly compact microwave isolators and circulators.

Application of quantum graph theory to metamaterial design: Negative refraction of acoustic waveguide modes

We leverage quantum graph theory to quickly and accurately characterize acoustic metamaterials comprising networks of interconnected pipes. Anisotropic bond lengths are incorporated in the model that correspond to space-coiled acoustic structures to exhibit dispersion spectra reminiscent of hyperbolic metamaterials. We construct two metasurfaces with embedded graph structure and, motivated by the graph theory, infer and fine-tune their dispersive properties to engineer nonresonant negative refraction of acoustic surface waves at their interface. Agreement between the graph model, full-wave simulations, and experiments bolsters quantum graph theory as a new paradigm for metamaterial design. Published by the American Physical Society 2024

Scanning Acousto-Optoelectric Spectroscopy on a Transition Metal Dichalcogenide Monolayer.

The charge carrier dynamics are investigated by surface acoustic waves (SAWs) inside a WSe2 monolayer on LiNbO3 by scanning acousto-optoelectric spectroscopy. A strong enhancement of the PL emission intensity is observed almost over the entire area of the flake. This enhancement increases with increasing amplitude of the wave and is especially strong at or in the vicinity to defects. The latter is attributed to the SAW-driven Poole-Frenkel activation of trapped charge carriers bound to trapping sites at these defects. In addition, the PL intensity exhibit clear periodic modulations at the SAW's frequencyfSAW and at 2 fSAW. These modulations are clear and unambiguous fingerprints of spatio-temporal carrier dynamics driven by the SAW. These occur on sub-nanosecond timescales which are found in good agreement with calculated exciton dissociation times. Mapping and analyzing both effects, this study shows that scanning acousto-electric spectroscopy provides a highly sensitive and local contact-free probe which uncovers distinct local features not resolved by conventional quasi-static photoluminescence techniques. The method is ideally suited to study carrier transport in 2D and other types of nanoscale materials and to reveal dynamic exciton modulation, and carrier localization and activation dynamics in the technologically important megahertz to gigahertz frequency range.

Numerical simulation of impulse-induced surface acoustic waves for elastography purposes using k-Wave simulation toolbox

As elastography, an emerging medical imaging strategy, advances, surface acoustic waves have been utilized to examine superficial tissues quantitatively. So far, most studies are experimental, and a numerical method is needed to cost-effectively investigate surface acoustic wave generation and propagation for technical development and optimization purposes. This study aims to develop a reliable numerical method for simulating impulse-induced surface acoustic waves using the k-wave simulation toolbox. According to the physical process of surface acoustic wave based elastography, the proposed simulation method consists of two stages: compressional wave simulation and elastic wave simulation, which aim to generate acoustic radiation force impulse and elastic waves, respectively. The technical procedures were demonstrated by a wave simulation on a water–tissue model. Meanwhile, three acoustic radiation force modeling methods were adopted. The compressional wave simulation showed that the three force modeling methods could produce similar force distribution in space but largely different amplitudes. The elastic wave simulation confirmed the feasibility of numerically generating surface acoustic waves. The reliability of the simulated waves was verified by a quantitative comparison between the numerically acquired sound speeds and their theoretical expectations and by a qualitative comparison between the numerically generated waves and the experimental observations under similar conditions. In summary, this study confirms k-wave as an effective numerical method for simulating surface acoustic waves for elastography purposes. This study provides an immediate simulation platform for investigating Scholte waves, the surface acoustic wave at a liquid–solid interface, and also, a potential numerical framework to investigate other surface acoustic waves.

Conductive metal-organic framework for ppb-concentration and highly selective SAW hydrogen sulfide sensing at room temperature

Hydrogen sulfide (H2S) sensing is utilized for monitoring the concentration in environment protection and industrial process control, of which high selectivity and ppb detection limit are required. Here, a ppb-concentration and highly selective surface acoustic wave (SAW) H2S sensing has been developed with the Cu3(HHTP)2 MOFs conductive metal-organic frameworks (MOFs), which have been synthesized by connecting Cu2+ with the organic ligands via hydrothermal process. Typically, as-prepared Cu3(HHTP)2 MOFs take on shapes including nanoparticles and nanorods. Beneficially, the SAW H2S sensing presents excellent selectivity to H2S and enables to detection of H2S as low as 6 ppb at room temperature (∼ 26 °C). Remarkably, the SAW sensor prototypes exhibit high sensitivity (0.02 mV/ppb) to 50–2000 ppb H2S, fast response (T90: 281 s) and 46 day-long stability at room temperature. Theoretically, such excellent H2S SAW sensing performance might be attributed to the interaction between Cu ions and H2S molecules and the strong acoustoelectric effect of SAW. Practically, our ppb-concentration and highly selective H2S SAW sensing have the potential in the real-time detection of H2S.