Surface Acoustic Wave Signal Research Articles

Transient grating spectroscopy on a DyCo5 thin film with femtosecond extreme ultraviolet pulses.

Surface acoustic waves (SAWs) are excited by femtosecond extreme ultraviolet (EUV) transient gratings (TGs) in a room-temperature ferrimagnetic DyCo5 alloy. TGs are generated by crossing a pair of EUV pulses from a free electron laser with the wavelength of 20.8 nm matching the Co M-edge, resulting in a SAW wavelength of Λ = 44 nm. Using the pump-probe transient grating scheme in reflection geometry, the excited SAWs could be followed in the time range of -10 to 100 ps in the thin film. Coherent generation of TGs by ultrafast EUV pulses allows to excite SAW in any material and to investigate their couplings to other dynamics, such as spin waves and orbital dynamics. In contrast, we encountered challenges in detecting electronic and magnetic signals, potentially due to the dominance of the larger SAW signal and the weakened reflection signal from underlying layers. A potential solution for the latter challenge involves employing soft x-ray probes, albeit introducing additional complexities associated with the required grazing incidence geometry.

Simultaneous Determination of Young's Modulus and Density of Ultrathin Low‐k Films Using Surface Acoustic Waves

The nondestructive testing (NDT) of mechanical properties in ultrathin low dielectric constant (low‐k) films is a major challenge in integrated circuit manufacturing. Young's modulus and density are closely related parameters for low‐k films. This study presents a method for NDT of Young's modulus and density of porous low‐k black diamond (SiOC:H, BD) films. A linear frequency modulation (LFM) surface acoustic wave (SAW) interdigital transducer (IDT) with a frequency range of 20–250 MHz is designed to generate SAW signals on the samples. The series of SAW waveforms obtained on the samples are processed to obtain experimental SAW dispersion curves across a broad frequency range. By comparing these experimental curves with theoretical dispersion curves, as well as their first‐order derivatives, Young's modulus and density of porous low‐k BD films with thicknesses of 100, 300, 500, and 1000 nm are characterized. To verify Young's modulus measurements from the SAW method, a control experiment using nanoindentation is conducted. The results demonstrate that the SAW method can reduce the impact of the substrate and is independent of the film thickness. This study presents a highly accurate measuring method for simultaneous multiparameter evaluation of ultra‐thin low‐k films.

Influence of surface acoustic wave (SAW) on nanoscale in-plane magnetic tunnel junctions

The use of voltage induced strain to switch magnetic tunnel junctions (MTJs) is a promising solution for reducing the switching energy in MRAM technologies. The MTJ is integrated with a piezoelectric layer to generate the strain. A very thin layer is needed to switch with small voltages and small energy dissipation. It is challenging to synthesize ultrathin piezoelectric layers that retain a high degree of piezoelectricity. An alternate approach is to use time-varying strain generated by a surface acoustic wave (SAW). This approach does not require a thin piezoelectric layer since the SAW is confined to the surface of the layer. In this study, we fabricated in-plane MTJs on piezoelectric LiNbO3 substrates and used IDTs to generate the SAW signal within the substrate. Our results showed that the SAW signal had a significant influence on the resistance and the tunneling magnetoresistance (TMR) ratio of the MTJs. The influence was much less significant in nanometer size MTJs than in micrometer sized ones. Most surprisingly, the SAW signal caused the tunneling magnetoresistance ratio (TMR) to drop below zero for the micrometer size MTJ, meaning that the antiparallel resistance RAP is temporarily less than the parallel resistance RP under SAW excitation. Our results provide insight into the dynamic behavior of MTJs under periodic strain and the dependence of this behavior on the device dimensions as they are scaled down to nanometer sizes.

Pulsed surface acoustic waves accelerate wound healing and reveal new parameter limits for cell stimulation in vitro

The use of surface acoustic waves (SAW) in cell biology has gained high attention in the past years. Previous works show that SAW treatment of artificial wounds in vitro can accelerate wound healing by up to +135%. However, little is known about the mechanobiology behind these effects, and a stimulation has only been proven for continuous SAW signals so far. We here show that the stimulation efficacy observed in previous studies is preserved for pulsed stimuli applied to Madin-Darby canine kidney (MDCK-II) cells in wound healing assays on SAW chips at a resonance frequency f SAW = 160 MHz. Moreover, for a reproducible and reliable image analysis, we present the SegFormer-based deep learning algorithm Neural Cell Edge Detector for the cell edge segmentation and image binarization, that allows an automated determination of the stimulation efficacy. With these tools, we explore a wider range of applicable SAW intensities up to P in = 21 dBm (128 mW) with a maximum stimulation efficacy of E = 201%. We show that the order of magnitude of the stimulation effect is reproducible under the variation of SAW signal characteristics power P in, duty cycle D and pulse width τ, while the mean energy over time is constant. Below a distinct pulse duration limit τ = 100 ms, no direct stimulation effect was observed. From a mechanobiological point of view, these findings and time scales could narrow down the potentially triggered cellular mechanisms during the stimulation.

Non-contact measurements of residual stress distribution and grain size in titanium alloys with laser ultrasonic system

In this study, a laser ultrasonic method is proposed for nondestructive non-contact measurement of both the residual stress depth profile and grain size in Ti-6Al-4 V alloy processed by warm shot peening (WSP). The method utilizes a pulsed laser to generate a surface acoustic wave (SAW) along the cross-section of the sample, and a laser interferometer to detect SAW signals. Laser ultrasonic measurements were performed on the samples treated by WSP at different temperatures (32, 100, 200 and 300 °C). A theoretical model for calculating the residual stress profile and a model to correlate the center frequency shift and the mean grain size of the sample were presented. The results obtained by the laser ultrasonic method were compared with those obtained by X-ray stress measurement, center-hole drilling (CHD), and electron backscattering diffraction (EBSD). The proposed method can measure and locate the maximum compressive residual stress (CRS) in a peened surface layer with a high spatial resolution of approximately 30 µm, allowing for precise extraction of the residual stress profile. This method can also provide an estimation of the grain size through the same experiment. The developed method is promising for the quick and nondestructive measurement of the residual stress profiles and grain size of surface treated metallic materials.

Injection locking of spin torque nano oscillators using surface acoustic waves

Conventional methods use RF currents or magnetic fields for injection locking the Spin Torque Nano Oscillators (STNO) devices. In this paper, we demonstrate the injection locking of STNO devices using the Surface Acoustic Waves (SAW). The SAW interacts with the free layer of the STNO devices through magneto elastic coupling. This interaction produces some effective magnetic field, which we show, can be used for injection locking of the STNO device. We have studied the dynamics of the injection locking process and how it depends upon the characteristics of the driving SAW signal in great details. This is done through macrospin as well as micromagnetic simulations. Our results suggest that SAW can be very good candidates for injection locking of the STNO devices with a locking range of 50 MHz and locking time of 10 ns for a strain of 100 ppm. This roughly corresponds to the requirement of RF current of amplitude 0.05 mA or field of amplitude 5 Oe, if we use the conventional methods. To explain our simulation results, we use the universal auto oscillator model. The amplitude of the locking signal depends strongly upon the power of the oscillations in case of SAW. We have extended the universal auto oscillator model to consider this effect and explain our results.

Using deep learning to identify the depth of metal surface defects with narrowband SAW signals

An effective nondestructive testing technique that enables the detection and quantification of surface and subsurface defects is highly demanded for assuring the safety and reliability of materials. In this paper, we classified and regressed defects with different depths. A transient thermal grating (TTG) method induced by a pulsed laser is used to characterize the properties of surface defects. Based on thermo-elasticity theory, a theoretical model with different types of surface defects is established with the finite element method (FEM). Surface acoustic waves (SAWs) excited by the TTG method propagate at the surface of a sample with defects at different penetration depths and are measured by a vibrometer.By combining the simulation and experimental results, the time–frequency scalograms of 8200 images were obtained by wavelet transform analysis. 70 % of the images are randomly selected to train the residual network (Resnet) model, and the remaining data (2460 images), as well as 10 scalograms in an independent experiment, are used as previously unknown experimental signals to test the robustness of the Resnet model. The results indicate that the Resnet with scalograms via wavelet transform achieves a 96.21 % classification accuracy on the validation set, with a prediction accuracy of 90.00 % for the 10 scalograms. Moreover, compared with three widely used machine learning algorithms, VGG16, back propagation (BP), and support vector machine (SVM), this method achieves the highest classification accuracy. Finally, 500 data selected randomly from the previously trained experimental database and 10 data in an independent experiment are used for regression prediction. The result shows that the data are well located along or close to a straight line with a slope of 1. The statistical results suggest that 80.6 % (66.0 %) of the residuals of the experimental data fell within the size range ±10 μm (±5 μm). This work proves the feasibility and reliability of the combination of the Resnet model with wavelet transform and numerical simulation to identify the depth of surface defects using laser ultrasonics.

Effect of Partial Ba Substitutions on the Crystallization of Sr2TiSi2O8 (STS) Glass-Ceramics and on the Generation of a SAW Signal at High Temperatures.

Because of their characteristics, including a d33 of 10–15 pC/N and high stability up to temperatures over 1000 °C, polar glass–ceramics containing fresnoite crystals can be regarded as highly effective materials for applications requiring piezoelectricity at high temperatures. In the present paper we investigate barium substitutions in an Sr-fresnoite (STS) glass–ceramic. Two aspects are studied: first, the effect of the substitution on the preferential orientation of the crystallization, and second, the ability of the glass–ceramics to generate and propagate surface acoustic waves (SAW) at high temperatures. XRD analyses show that a 10 at.% substitution of Ba allows us to keep a strong preferential orientation of the (00l) planes of the fresnoite crystals down to more than 1 mm below the surfaces. Higher substitution levels (25 and 50 at.%), induce a non-oriented volume crystallization mechanism that competes with the surface mechanism. SAW devices were fabricated from glass–ceramic substrates with 0, 10 and 25 at.% Ba substitutions. Temperature testing reveals the high stability of the frequency and delay for all of these devices. The glass–ceramic with a 10 at.% Ba substitution gives the strongest amplitude of the SAW signal. This is attributed to the high (00l) preferential orientation and the absence of disoriented volume crystallization.

Shear-horizontal surface acoustic wave sensor for non-invasive monitoring of dynamic cell spreading and attachment in wound healing assays

A Love-wave based biosensor is introduced for analyzing a standardized wound healing assay by observing cell growth and quantifying cell detachment processes. Utilizing the piezoelectric material LiTaO3 36° XY-cut with a thin SiO2-cover layer, shear horizontal surface acoustic waves (SAW) are excited and detected by a set of Interdigital Transducers. Epithelial cells, being cultivated on the substrate and invading the sensors delay line cause a phase shift in the transmitted SAW signal. This phase shift correlates exactly with the surface coverage of the invading cells. After wound healing, emerging fluctuations in the phase shift signal provide information about the cell growth in a confluent cell layer. Additionally, the signal slope allows to quantify the cell detachment process induced by apoptosis, necrosis or cell lysis substances, respectively. Furthermore, culture conditions like temperature or osmolality can be simultaneously monitored by SAW. Based on a theoretical approach and using FEM simulations, we identified the acoustoelectric interaction as the main reason for the phase shift in various frequency- and time-dependent studies. Our model is validated by experimental data and allows predicting the phase change caused by variations in the cell-substrate distance or the volume ratio of the nucleus and the complete cell.

Surface acoustic waves as a sensitive probe for photoresponsive polarization memory in SrTiO3

Transient electric polarization in single crystalline SrTiO3 (STO) substrates was studied by measuring the transmission of surface acoustic waves (SAWs). We applied a large dc electric field (8 × 106 Vm−1) to interdigital transducers (IDTs) on STO substrates in order to induce local piezoelectricity, which is required to generate and transmit SAWs. The resulting electric polarization and the retention thereof were analyzed as a function of time after the applied electric field was removed, by measuring transient SAW signals. The retained polarization turned out to provide strong electromechanical coupling, comparable to that resulting from the dc-field-induced piezoelectricity. SAW signals were observed for more than 30 h (in absence of an external dc electric field), which is evidence for a long-lasting retention of electric polarization. Remarkably, this polarization was found to be rapidly suppressed as the sample was exposed to visible light. By measuring the transient SAW transmission under illumination with light at different wavelengths, we identified photoconductivity and/or acceleration of oxygen vacancy migration by photon-induced splitting of bound vacancy pairs as the main mechanisms behind this photoresponsive memory effect.

Tunable surface acoustic waves on strain-engineered relaxor K0.7Na0.3NbO3 thin films

In this work, we demonstrate the electronic tunability of surface acoustic waves (SAWs) in epitaxially strained relaxor-type ferroelectric thin films. Epitaxial K0.7Na0.3NbO3 thin films of typically 30 nm in thickness are grown via pulsed laser deposition on (110)-oriented TbScO3. A partial plastic lattice relaxation of the epitaxial strain in these samples leads to a relaxor-type ferroelectricity of these films, which strongly affects the SAW properties. Without electronic bias, only tiny SAW signals of ∼0.2 dB can be detected at room temperature, which can be boosted up to ∼4 dB by a static voltage bias added to the high frequency driving current of the SAW transducers. Upon field cooling below the freezing temperature of polar nanoregions (PNRs), this strong SAW signal can be preserved and is even enhanced due to a release of the electronically fixed PNRs if the bias is removed. In contrast, at elevated temperatures, a reversible switching of the SAW signal is possible. The switching shows relaxation dynamics that are typical for relaxor ferroelectrics. The relaxation time τ decreases exponentially from several hours at freezing temperature to a few seconds (<5 s) at room temperature.

Wide-Band Nonreciprocity of Surface Acoustic Waves Induced by Magnetoelastic Coupling with a Synthetic Antiferromagnet

One of the major challenges in surface acoustic wave (SAW) technology, which is widely used in modern signal processing, is the absence of wave nonreciprocity (one-way propagation). To tackle this problem, the authors propose an approach based on magnetoelastic coupling of SAWs to spin waves possessing a suitable spectrum. This approach allows the creation of nonreciprocal SAW devices with almost no limitations on the working-frequency band (in contrast to the severe band limitations of traditional approaches), to realize the full potential of magnetoelastically induced SAW nonreciprocity. These results could become a breakthrough step toward nonreciprocal SAW signal processing.

Surface Acoustic Wave Resonator Echo Signal Frequency Estimation

Surface Acoustic Wave (SAW) resonator measuring technology can be used in high temperature and high pressure, strong electromagnetic radiation and strong electromagnetic interference to realize wireless passive parameter detection. Based on the the non-stationary characteristics of the SAW signal, a kind of echo signal frequency estimation method, Digital Frequency Significant Place Tracking (DFSPT) method is put forward. Compared with the existing methods based on Fast Fourier Transform (FFT) and Singular Value Decomposition (SVD), the simulation results show that the method can determine the number of significant digits of digital frequency according to the difference of signal-to-noise ratio. Thus, it can increases stability and accuracy. The experiment of wireless SAW temperature sensor shows that the frequency estimation standard deviation of this method is small and the robustness is high.

Magnetically Controlled Surface Acoustic Waves on Multiferroic BiFeO3

A surface acoustic wave (SAW) device, consisting of a pair of transducers on a piezoelectric substrate, works as a high-frequency band-pass filter. Usually the substrate is nonmagnetic, and the transmission strength and frequency cannot be controlled by an external field. This study reports a SAW device based instead on multiferroic BiFeO${}_{3}$; in this case, the amplitude and phase of the SAW signal $c\phantom{\rule{0}{0ex}}a\phantom{\rule{0}{0ex}}n$ be modulated by an external magnetic field, thanks to the coupled magnetoelastic response of the ferrite. This approach extends the functionality of such SAW devices, which are indispensable in communication technology (your mobile phone uses one, for example).

Excitation and time resolved spectroscopy of SAW harmonics up to GHz regime in photolithographed GaAs devices

In this work, we demonstrate the excitation of surface acoustic waves (SAW) harmonics up to GHz regime in photolitographed devices fabricated on gallium arsenide (GaAs) by acting on the IDT metallization ratio among the finger width and pitch. Specifically, we observed up to the 13th harmonic, which corresponds to a frequency of about 1.7 GHz. Moreover, we employed time-resolved spectroscopy for isolating the shape of the SAW bandpass-filter response (for each harmonic) eliminating the interference between acoustic and electromagnetic waves. Notably, the extracted SAW spectra are characterized by a bandwidth which remains constant for the different harmonic modes, unlike the case of traditional SAW filters (having a 0.5 metallization ratio) where the pass band increases with the working frequency. These results are relevant for applications where high frequencies and multiple harmonics excitation are desirable, or where quantitative measurements of the direct SAW signal are required.

Towards an ultra-rapid smartphone- connected test for infectious diseases

The development is reported of an ultra-rapid, point-of-care diagnostic device which harnesses surface acoustic wave (SAW) biochips, to detect HIV in a finger prick of blood within 10 seconds (sample-in-result-out). The disposable quartz biochip, based on microelectronic components found in every consumer smartphone, is extremely fast because no complex labelling, amplification or wash steps are needed. A pocket-sized control box reads out the SAW signal and displays results electronically. High analytical sensitivity and specificity are found with model and real patient blood samples. The findings presented here open up the potential of consumer electronics to cut lengthy test waiting times, giving patients on the spot access to potentially life-saving treatment and supporting more timely public health interventions to prevent disease transmission.

Non-contact detection of low carbon steel using laser generated ultrasound at high temperature

Theoretical and experimental studies on non-contact detection of high temperature metal using laser ultrasound are carried out. Based on the theory of laser ultrasound, effects of high temperature on the laser generated surface acoustic wave (SAW) are discussed. Results of simulation show that the velocity and the amplitude of SAW will decrease with the increase of the temperature. An experimental system was set up, which in a non-contact mode, by utilizing a point laser source to generate the SAW, and an interferometer to detect the SAW signal. The corresponding experimental results have verified the feasibility of the numerical simulation and the achieved result of the relationship between the velocity of SAW and the temperature. The research findings provide a potential application for online monitoring of high temperature metal.

All-fiber-integrated linearly polarized fiber laser delivering 476 μJ, 50 kHz, nanosecond pulses for ultrasonic generation.

We demonstrate a high-energy linearly polarized pulsed fiber laser for ultrasonic generation based on a master oscillator power amplification (MOPA) scheme, which delivers nanosecond pulses with duration of 4.8 ns and pulse energy of 476 μJ at the repetition rate of 50 kHz. The MOPA is seeded by a gain switch semiconductor laser diode at 1064 nm. In the pre-amplification stages, a double-pass amplification structure is designed and successfully applied to amplify the low-power seed laser for the consideration of suppressing amplified spontaneous emission, decreasing the number of amplification stages, and reducing the nonlinear effects. A highly ytterbium-doped fiber is utilized in the main amplifier to shorten the fiber length and reduce the fiber nonlinearity. The average power is finally boosted to 23.8 W with corresponding optical-to-optical efficiency of 66.9% and a polarization extinction rate of ∼10.5 dB. The corresponding peak power is calculated to be 87.1 kW. Finally, the established laser system is successfully used for ultrasonic generation based on a line excitation configuration and grating excitation configuration, and clear surface acoustic wave signals are detected. Many potential applications in laser ultrasonics can be foreseen.

Ir-Rh thin films as high-temperature electrodes for surface acoustic wave sensor applications

The achievement of surface acoustic wave (SAW) devices stable in high-temperature oxidizing atmospheres requires the development of conductive thin film electrodes that can withstand such harsh conditions. Recent studies have demonstrated the suitability of Pt-based alloys, multilayers or nanocomposite films for temperatures up to 800°C. Electrodes based on new materials and structures still have to be developed for applications taking place at higher temperatures. In this perspective, thin films based on iridium could be good candidates regarding the high melting point, and thus the low diffusion coefficients of this noble metal. In particular, Ir-Rh bulk alloys have shown superior performance as spark plug electrodes, which have to resist concurrently to physical and chemical wear such as high-temperature SAW electrodes. Consequently, this paper deals with the high-temperature behavior of Ir-Rh thin films. Ir-Rh alloys and multilayers films, with an Ir atomic ratio between 10 and 50%, are deposited by one-gun electron beam evaporation method. The impact on the films of a 4days annealing treatment at 800°C in air is studied by X-ray diffraction, scanning and transmission electron microscopy, electron energy loss spectroscopy and four-points probe resistivity measurements. It turns out that all the films oxidized during the annealing period. The post-annealing electrical properties are highly dependent of the initial composition of the film: the higher is the Ir rate in the film, the lower is the electrical resistivity after annealing. Moreover, an Rh2O3 overlayer, with a thickness of some tens of nanometers, forms at the surface of the film, confirming previous observations made on Ir-Rh bulk alloys. First SAW measurements made on devices based on Ir30Rh70 alloy electrodes are very promising as a SAW signal is still clearly visible after the 4days annealing process, while no agglomeration phenomenon can be observed.

Study on the interfacial adhesion property of low-k thin film by the surface acoustic waves with cohesive zone model

The cohesive zone model being increasingly used in discrete fracture processes simulation is adopted to study the interfacial adhesion property of low dielectric constant film deposited on the silicon substrate in this work. The two parameters, maximum normal traction and normal interface characteristic length in cohesive zone model, are taken into account to calculate the theoretical surface acoustic wave dispersion curves. Broadband surface acoustic wave signals with effective frequency up to 200MHz are generated by short pulse ultraviolet laser source and detected by a piezoelectric transducer. The interfacial adhesion properties of dense and porous films determined accurately by matching the experimental dispersion curves with the calculated theoretical dispersion curves are 10.7PPa/m and 2.8PPa/m, respectively. The results show that the adhesion quality of dense low dielectric constant film is better than that of the porous. The study exhibits that the adhesion properties determined by improved laser-generated surface acoustic wave technique have the same trends with the test results of the nanoscratch technique, which indicates that the surface acoustic wave technique with cohesive zone model is a promising and nondestructive method for determining interfacial adhesion properties between low dielectric constant film and substrate.