Surface Acoustic Wave Delay Line Research Articles

A Dual-Mode Surface Acoustic Wave Delay Line for the Detection of Ice on 64°-Rotated Y-Cut Lithium Niobate.

Ice accumulation on infrastructure poses severe safety risks and economic losses, necessitating effective detection and monitoring solutions. This study introduces a novel approach employing surface acoustic wave (SAW) sensors, known for their small size, wireless operation, energy self-sufficiency, and retrofit capability. Utilizing a SAW dual-mode delay line device on a 64°-rotated Y-cut lithium niobate substrate, we demonstrate a solution for combined ice detection and temperature measurement. In addition to the shear-horizontal polarized leaky SAW, our findings reveal an electrically excitable Rayleigh-type wave in the X+90° direction on the same cut. Experimental results in a temperature chamber confirm capability for reliable differentiation between liquid water and ice loading and simultaneous temperature measurements. This research presents a promising advancement in addressing safety concerns and economic losses associated with ice accretion.

Anomalies in the magnetostrictive modulation of love surface acoustic waves

A magnetic surface acoustic wave (SAW) sensor is built by growing a 100 nm galfenol (Fe72Ga28) film by sputtering between the interdigitated transducers of a SAW delay line. Love waves are produced when the shear waves excited on the piezoelectric substrate are guided by a 3.1 μm layer of amorphous SiO2. Due to the magnetostrictive nature of galfenol deposited on top, the application of magnetic fields modulates the propagation of the mechanical excitations along the sensor by the strain coupling. By introducing the delay line in a feedback loop circuit, these changes are studied as resonant frequency variations. Magnetic field cycles of ±40 mT are applied to the sample and the resonant frequency shift is tracked simultaneously. The sensor exhibited hysteretic frequency behavior that depends on the orientation of the applied magnetic field relative to the direction of Love wave propagation. In the configuration in which the wave vector and the applied field form an angle of 45°, the resonant frequency seems to increase with the magnetization induced by the external field. When the wave vector propagation is parallel to the field, two positive peaks appear close to the coercive field of the film, which has not been reported before. This is probably due to a more complex relationship between the acoustic wave and the magnetic state of the film which could be exploited to give rise to new models of magnetic sensors.

SH-BAW devices with abnormal mass-loading effect for chemical sensing

Surface acoustic wave (SAW) devices are promising for chemical and biological sensing applications. This work studies the basic operating principles and the physical behaviors of the “Rayleigh”-SAW and the “Shear Horizontal (SH-)” bulk acoustic wave (BAW), particularly in relation to the chemisorption process. A complete 3D delay line SAW model is developed and performed by the finite element analysis, and a methodology was introduced for characterizing the transmission characteristics (S21) of these devices. Notably, our investigation unveils an intriguing phenomenon in the behavior of SH-BAW in response to loading mass. We observed an anomalous shift in the central frequency, which increases as the chemical adsorbate concentration rises. Leveraging these insights, we designed and constructed a SAW-based gas sensor, and the vinyl-terminated polydimethylsiloxane was synthesized for the detection of chloroform, a challenging pollutant to identify. Through a comparative study, we illustrate distinct responses of Rayleigh-SAW and SH-BAW devices to accumulated loading mass and gaseous contaminants. These experimental results validate and corroborate our simulations. This work demonstrates a unique mass-loading effect exhibited by SH-BAW devices, which differs from the existing theories. These findings offer the opportunity to refine and enhance models for accurately describing the functionality of delay line SAW sensors, thereby contributing to improved sensor reliability.

Significant Suppression of Dark Current in a Surface Acoustic Wave Assisted MoS2 Photodetector

Abstract2D materials are considered as potential candidates for the next generation of optoelectronic materials. However, their optical absorption is typically weak due to thickness limitations, greatly restricting the photodetection capabilities of devices. To enhance the photoelectric gain of 2D materials or devices and improve detection sensitivity, various modulation methods such as strain, electric field, and magnetic field are commonly introduced. Among them, surface acoustic wave (SAW) represents a unique and effective modulation approach. In this study, photodetectors are fabricated based on few‐layer MoS2 on a SAW delay line on a LiTaO3 substrate. The interaction between SAW and MoS2 successfully manipulates the optoelectronic performance of the MoS2‐based devices. Under the influence of SAW, the dark current of the devices is significantly reduced by more than two orders of magnitude, while the photocurrent remains almost unchanged, resulting in excellent photoresponse performance. The devices provide a promising pathway for high‐performance optoelectronic applications and reveal a new possibility for acoustic devices in optoelectronics.

Ordered creation and motion of skyrmions with surface acoustic wave

Magnetic skyrmions with a well-defined spin texture have shown unprecedented potential for various spintronic applications owning to their topologically non-trivial and quasiparticle properties. To put skyrmions into practical technology, efficient manipulation, especially the inhibition of skyrmion Hall effect (SkHE) has been intensively pursued. In spite of the recent progress made on reducing SkHE in several substituted systems, such as ferrimagnets and synthetic antiferromagnets, the organized creation and current driven motion of skyrmions with negligible SkHE in ferromagnets remain challenging. Here, by embedding the [Co/Pd] multilayer into a surface acoustic wave (SAW) delay line where the longitudinal leaky SAW is excited to provide both the strain and thermal effect, we experimentally realized the ordered generation of magnetic skyrmions. The resultant current-induced skyrmions movement with negligible SkHE was observed, which can be attributed to the energy redistribution of the system during the excitation of SAW. Our findings open up an unprecedentedly new perspective for manipulating topological solitons, which could possibly trigger the future discoveries in skyrmionics and spin acousto-electronics.

Observation of enhanced dynamic ΔG effect near ferromagnetic resonance frequency

The field-dependence elastic modulus of magnetostrictive films, also called ΔE or ΔG effect, is crucial for ultrasensitive magnetic field sensors based on surface acoustic waves (SAWs). In spite of a lot of demonstrations, rare attention was paid to the frequency-dependence of ΔE or ΔG effect. In this work, shear horizontal-type SAW delay lines coated with a thin FeCoSiB layer have been studied at various frequencies upon applying magnetic fields. The change of shear modulus of FeCoSiB has been extracted by measuring the field dependent phase shift of SAWs. It is found that the ΔG effect is significantly enhanced at high-order harmonic frequencies close to the ferromagnetic resonance frequency, increasing by ∼82% compared to that at the first SAW mode (128 MHz). In addition, the smaller the effective damping factor of a magnetostrictive layer, the more pronounced ΔG effect can be obtained, which is explained by our proposed dynamic magnetoelastic coupling model.

Preparation of MoS2 Nanospheres using a Hydrothermal Method and Their Application as Ammonia Gas Sensors Based on Delay Line Surface Acoustic Wave Devices.

An ammonia sensor based on a delay-line surface acoustic wave (SAW) device is developed in this study by coating the delay line area of the device with a nano-structured molybdenum disulfide (MoS2) sensitive material. A SAW device of 122 MHz was designed and fabricated with a pair of interdigital transducers (IDTs) defined on a 128° y-cut LiNbO3 substrate using photolithography technologies, and the aluminum IDT electrodes were deposited by a DC magnetron sputtering system. By adjusting the pH values of precursor solutions, molybdenum disulfide (MoS2) nanospheres were prepared with various structures using a hydrothermal method. Finally, an NH3 gas sensor with high sensitivity of 4878 Hz/ppm, operating at room temperature, was successfully obtained. The excellent sensitivity performance may be due to the efficient adsorption of NH3 gas molecules on the surfaces of the nanoflower-like MoS2, which has a larger specific surface area and provides more active sites, and results in a larger change in the resonant frequency of the device due to the mass loading effect.

Acousto-electric measurements at 2.5 GHz on graphene transferred onto YX128°-LiNbO3

Surface acoustic wave delay lines with an operational frequency of 2.5 GHz have been designed to measure the acousto-electric transport of carriers in graphene transferred onto YX128°-LiNbO3 piezoelectric substrate. The monolayer of graphene on LiNbO3 presented sheet resistance in the range of 733–1230 Ω/□ and ohmic contact resistance with gold of 1880 to 5200 Ωμm. The measurements with different interaction lengths on graphene bars have allowed the extraction of carrier absorption and mobility parameters from acousto-electric current. Graphene presented higher acousto-electronic interaction in the GHz range than previously reported values in the range of 100s MHz with carrier absorption losses of 109 m−1 and mobility for acoustically generated charges of 101 cm2V−1s−1.

UV Sensor Based on Surface Acoustic Waves in ZnO/Fused Silica.

Zinc oxide (ZnO) thin films have been grown by radio frequency sputtering technique on fused silica substrates. Optical and morphological characteristics of as-grown ZnO samples were measured by various techniques; an X-ray diffraction spectrum showed that the films exhibited hexagonal wurtzite structure and were c-axis-oriented normal to the substrate surface. Scanning electron microscopy images showed the dense columnar structure of the ZnO layers, and light absorption measurements allowed us to estimate the penetration depth of the optical radiation in the 200 to 480 nm wavelength range and the ZnO band-gap. ZnO layers were used as a basic material for surface acoustic wave (SAW) delay lines consisting of two Al interdigitated transducers (IDTs) photolithographically implemented on the surface of the piezoelectric layer. The Rayleigh wave propagation characteristics were tested in darkness and under incident UV light illumination from the top surface of the ZnO layer and from the fused silica/ZnO interface. The sensor response, i.e., the wave velocity shift due to the acoustoelectric interaction between the photogenerated charge carriers and the electric potential associated with the acoustic wave, was measured for different UV power densities. The reversibility and repeatability of the sensor responses were assessed. The time response of the UV sensor showed a rise time and a recovery time of about 10 and 13 s, respectively, and a sensitivity of about 318 and 341 ppm/(mW/cm2) for top and bottom illumination, respectively. The ZnO/fused silica-based SAW UV sensors can be interrogated across the fused silica substrate thanks to its optical transparency in the UV range. The backlighting interrogation can find applications in harsh environments, as it prevents the sensing photoconductive layer from aggressive environmental effects or from any damage caused by cleaning the surface from dust which could deteriorate the sensor's performance. Moreover, since the SAW sensors, by their operating principle, are suitable for wireless reading via radio signals, the ZnO/fused-silica-based sensors have the potential to be the first choice for UV sensing in harsh environments.

Optimization of SAW Sensors for Nanoplastics and Grapevine Virus Detection

In this work, we report the parametric optimization of surface acoustic wave (SAW) delay lines on Lithium niobate for environmental monitoring applications. First, we show that the device performance can be improved by acting opportunely on geometrical design parameters of the interdigital transducers such as the number of finger pairs, the finger overlap length and the distance between the emitter and the receiver. Then, the best-performing configuration is employed to realize SAW sensors. As aerosol particulate matter (PM) is a major threat, we first demonstrate a capability for the detection of polystyrene particles simulating nanoparticulates/nanoplastics, and achieve a limit of detection (LOD) of 0.3 ng, beyond the present state-of-the-art. Next, the SAW sensors were used for the first time to implement diagnostic tools able to detect Grapevine leafroll-associated virus 3 (GLRaV-3), one of the most widespread viruses in wine-growing areas, outperforming electrochemical impedance sensors thanks to a five-times better LOD. These two proofs of concept demonstrate the ability of miniaturized SAW sensors for carrying out on-field monitoring campaigns and their potential to replace the presently used heavy and expensive laboratory instrumentation.

Enhanced Frequency Stability of SAW Yarn Tension Sensor by Using the Dual Differential Channel Surface Acoustic Wave Oscillator.

This paper presents a 60 MHz surface acoustic wave (SAW) yarn tension sensor incorporating a novel SAW oscillator with high-frequency stability. A SAW delay line was fabricated on ST-X quartz substrate using the unbalanced-split electrode and bi-directional engraving slots. The dual differential channel delay linear acoustic surface wave oscillator is designed and implemented to test yarn tension, which can effectively remove the interference of temperature, humidity, and other peripheral factors through differential design. The yarn tension sensor using the surface acoustic wave has high-precision characteristics, and the SAW delay line oscillator is designed to ensure the test system’s stable operation. The effect of time and tension on oscillator frequency stability is studied in detail, and the single oscillator and the dual differential channel system were tested, respectively. After using the dual differential channel system, the short-term frequency stability from is reduced from 1.0163 ppm to 0.17726 ppm, the frequency accuracy of the tension sensor is improved from 134 Hz to 27 Hz, and the max frequency jump steady is reduced from 2.2395 ppm to 0.45123 ppm.

Improvement of Surface Acoustic Wave Delay Lines Using c-Axis Tilted AlScN Thin Film

Improvement of Surface Acoustic Wave Delay Lines Using c-Axis Tilted AlScN Thin Film

Finite Element Analysis of the Distribution Parameters of a Metal Dot Array in a SAW Gyroscope

A surface acoustic wave (SAW) gyroscope has many unique advantages, but a low detection sensitivity limits its development. Previous studies have shown that adding a metal dot array to the acoustic wave propagation path of the SAW delay line can enhance the Coriolis force and further improve sensitivity. Therefore, in order to optimize the detection sensitivity performance of the sensor, 128°YX-LiNbO3, ST-X Quartz and X112°Y-LiTaO3 piezoelectric substrates were selected by finite element method to analyze the influence of the metal dot array size on the SAW gyroscopic effect in this paper. The most suitable metal dot size for 128°YX-LiNbO3 and X112°Y-LiTaO3 obtained by simulation are 5/16λ and 1/16λ, respectively; for example, when the normalized angular velocity is 1 × 10−3, the SAW gyroscopic effect factor g of the two piezoelectric substrates distributing the optimum size metal dots can reach 22.4 kHz and 5.2 kHz. For ST-X quartz, there is a threshold between the rotation speed of the substrate and the optimum size of the metal dot. When the rotating speed is lower than the threshold, the SAW gyroscopic effect is strongest when the metal dot size is 3/16λ; otherwise, the SAW gyroscopic effect is strongest when the size is 11/16λ. These research results provide new ideas for improvement of the SAW gyroscope.

Equivalent Circuit Models for SAW Delay Line Sensors

Surface acoustic wave (SAW) devices are widely used as high quality factor filters for telecommunications. In recent years they have been investigated as sensors, which calls for application-specific electronic systems that interact with them. To design such circuits, it is important to understand the peculiarities of the devices, which may be a barrier for system designers. In this work, we explore different models that can be simulated in any circuit simulation environment, facilitating the creation of systems that interact with SAW delay lines, devices in which a signal is delayed by a constant time between piezoelectric transducers. The equivalent circuits of acoustic delay lines can be divided in two categories: a lumped-element model, based on frequency-dependent impedances implemented through the Foster and Mittag-Leffler theorems, and a distributed-element model, based on transmission lines. We compare qualitative frequency and time-domain characteristics among these categories so their limitations are clear, with the lumped-element model not being usable in the time domain due to its singularity at the center frequency. We also describe the process of implementation to achieve the model, while proposing a simple circuit block that can be included to represent perturbations on the device, which allows adjusting of the model response to different perturbations. Our model is also suitable for tests in distinct liquid media, provided that the parallel capacitor is fitted accordingly to model the electromagnetic wave induced in the device.

Development of Highly Sensitive and Stable Surface Acoustic Wave‐Based Hydrogen Sensor and Its Interface Electronics

AbstractA surface acoustic wave (SAW)‐based hydrogen sensor and its corresponding interface electronics have been developed to measure the hydrogen concentration in air at room temperature. Two SAW delay lines with center frequencies of 284 and 284.3 MHz are employed for the sensor system to eliminate any environmental disturbances emerging from temperature and humidity variations on a sensor output. A beehive‐configured and Cu‐doped SnO2 nanostructure is used as a hydrogen‐sensitive material to have a high surface to volume ratio, high sensitivity, and selectivity for the target hydrogen. The smallest frequency difference detectable in our sensor system including oscillator, mixer, low pass filter, comparator, and field programmable gate array (FPGA) was ≈1 Hz, which is a significant output value that can sufficiently detect hydrogen concentrations below 1 ppm. Compared with pure SnO2, 3D Cu (3%)‐doped SnO2 nanostructure based‐SAW sensor exhibited the highest response to hydrogen gas. The elevated response of the 3D Cu‐doped SnO2 based SAW sensor to hydrogen gas is mainly attributed to the acoustoelectric interaction. Photoluminescence and X‐ray photoelectron spectroscopy analysis divulged that Cu‐doping in SnO2 produces a large number of surface oxygen vacancies, which enhances the hydrogen adsorption on the SnO2 surface, resulting in a significant improvement in the response to hydrogen gas. The sensor characteristics at the system level showed excellent selectivity, repeatability, and long‐term stability to hydrogen gas. The sensing mechanisms (mass loading and acoustoelectric interaction) in the SAW sensor due to hydrogen adsorption have been experimentally investigated and the obtained results are discussed in detail.

An Algorithm for Solving the Phase Ambiguity Problem of SAW Delay-Line Sensor Systems.

Solving the phase ambiguity problem is crucial to achieving a wide-range and high-precision measurement for the frequency-domain sampling (FDS)-based surface acoustic wave (SAW) delay-line sensor systems. This study proposes an improved phase estimation algorithm called dual-band phase estimation (DBPE) to solve the problem. By using DBPE, the SAW sensor system can obtain an extensive and alterable measuring range without further requirements for sensor design or transmitted signals. Thus, it can be widely used in various FDS-based SAW delay-line sensor systems. Monte Carlo simulations and temperature measuring experiments, based on a YZ-cut LiNbO3 SAW delay-line sensor and a switched frequency-stepped continuous wave (S-FSCW) reader, are performed to demonstrate the algorithm's validity. The Monte Carlo simulations show that DBPE can effectively solve the phase ambiguity problem and has better performance than frequency estimation in measuring precision at a low signal-to-noise ratio (SNR). The temperature-sensing experiments show that DBPE has a good performance in measuring range and precision, serving as a phase ambiguity solver in the temperature sensor system.

Interface and Sensitive Characteristics of the Viscoelastic Film Used in a Surface Acoustic Wave Gas Sensor.

The surface morphology of viscoelastic-sensitive films significantly affects sensing characteristics of surface acoustic wave (SAW) sensors. Uniformity and compactness of the film surface directly influences detectability of the SAW sensor toward target gases. Viscoelastic fluoroalcoholpolysiloxane (SXFA) was prepared in this work using spin coating technology on an SAW delay line of 200 MHz and then used as coating for detection of dimethyl methylphosphonate (DMMP). Polarizing, atomic force, and scanning electron microscopies confirmed the uniformity of the SXFA surface. The particle diameter in the cluster region was 10-15 μm. The contact angle (5.72-26.69°), surface tension (21.053-29.155 mN/m), Gibbs free energy (-160.68 to -153.45 J/m2), and spreading coefficient (0.3028-6.9453 J/m2) of different concentrations of SXFA were obtained through experiments, and their relation was analyzed using the Young T equation and Gibbs adsorption isotherm. The glass transition temperature (-19.7 °C) and elasticity of SXFA were also discussed. The consistency of sensor preparation was confirmed by detecting DMMP with five SAW sensors prepared simultaneously. Seven consecutive tests showed that the SAW sensor presents satisfactory repeatability (standard deviation, s, 1.134; coefficient of variance, v, 0.065; and population mean deviation, δ, 0.913) at a concentration of 1.71 mg/m3 and acceptable linear relationship at a concentration range of 0.058-1.92 mg/m3, with a sensitivity of around 1.21 mv/(mg/m3). The sensor exhibited outstanding sensitivity and satisfactory linearity and repeatability to DMMP. Meanwhile, the sensing mechanism in gas adsorption was also discussed in terms of LSER formulation and hydrogen bonding formation between SXFA and DMMP.

Ultrasonic investigation of the evaporation dynamics of subnanoliter droplets

With the development of ink jet printers or spotters for biological applications, the control size and homogeneity of small fluids as well as their successful deposition on various substrates has gained significant importance. We study the impingement process of such small droplets onto a solid substrate and investigate their evaporation and drying process by means of surface acoustic wave (SAW) transmission experiments. We observe a strong fluid-SAW interaction resulting in an attenuation which toward the end of the evaporation and drying process exhibits characteristic oscillations being related to temperature, SAW amplitude, and fluid properties such as viscosity and wetting angle. It is found that oscillations can only be seen in pinned, very flat droplets, while the pinning can be roughly controlled via the SAW amplitude. The frequency of those characteristic oscillations is superlinear with respect to temperature, rather proportional to the evaporation rate and can change drastically depending on the liquid used. In our experiments, isopropanol, ethanol, and water with various glycerol concentrations were loaded onto the SAW delay line. Based on the experimental results, simulations using the finite element method were performed. We find that a standing wave pattern within the droplet is responsible for the transmission oscillations. These findings might lead to new methods, e.g., sensory systems, being able to examine droplets according to their physical or chemical properties.

Design and Optimization of a Novel SAW Gyroscope Structure Based on Amplitude Modulation with 1-D Phononic Crystals.

Surface acoustic wave gyroscopes (SAWGs), as a kind of all-solid-state micro-electro-mechanical system (MEMS) gyroscopes, can work normally under extremely high-impact environmental conditions. Among the current SAWGs, amplitude-modulated gyroscopes (AMGs) are all based on the same gyro effect, which was proved weak, and their sensitivity and intensity of the output are both lower than frequency-modulated gyroscopes (FMGs). However, because FMGs need to process a series of frequency signals, their signal processing and circuits are far less straightforward and simple than AMGs. In order to own both high-sensitivity and simple signal processing, a novel surface acoustic traveling wave gyroscope based on amplitude modulation is proposed, using one-dimensional phononic crystals (PCs) in this paper. In view of its specific structure, the proposed gyroscope consists of a surface acoustic wave oscillator and a surface acoustic wave delay line within a one-dimensional phononic crystal with a high-Q defect mode. In this paper, the working principle is analyzed theoretically through the partial wave method (PWM), and the gyroscopes with different numbers of PCs are also designed and studied by using the finite element method (FEM) and multiphysics simulation. The research results demonstrate that under a 1 V oscillator voltage output, the higher sensitivity of −23.1 mV·(rad/s)−1 in the linear range from −8 rad/s to 8 rad/s is reached when the gyro with three PC walls, and the wider linear range from −15 rad/s to 17.5 rad/s with the sensitivity of −6.7 mV·(rad/s)−1 with only one PC wall. Compared with the existing AMGs using metal dots to enhance the gyro effect, the sensitivity of the proposed gyro is increased by 15 to 112 times, and the linear range is increased by 4.6 to 186 times, even without the enhancement of the metal dots.

Surface acoustic wave sensor based on Au/TiO2/PEDOT with dual response to carbon dioxide and humidity

A surface acoustic wave (SAW) gas sensor with an Au/TiO2/poly(3,4-ethylenedioxythiophene) (PEDOT, which is a conductive polymer with photoelectric conversion function) sensing film was constructed for the quantitative detection of water vapor and CO2. The Au/TiO2/PEDOT sensing film was assembled on the delayed region of the 204 MHz SAW delay line, which was used as the base device for the gas sensor. The center frequency of the sensor decreases with an increase in relative humidity (RH), and the center frequency increases with increasing CO2 concentration, so that not only can the two gases be identified, but quantitative analysis can also be performed. The SAW sensor has a response range of 5%–90% for RH and a response range of 500–2000 ppm for CO2 gas. The shifts in center frequency varied linearly with the concentrations, giving rise to the sensitivities of −0.0068 and −0.1880 kHz %−1 for RH and ∼0.003 kHz ppm−1 CO2. The response/recovery time is 9 s/9.2 s for 700 ppm CO2 and 15 s/14 s for 70% RH. The experimental results show that the SAW sensor offers excellent selectivity, wide response range, rapid response, and good stability and repeatability. The mechanism of humidity and CO2 sensing is attributed to the hydrophilic porous structure of the Au/TiO2/PEDOT sensing film, and also to the reversible variation of its viscoelasticity under illumination conditions. The sensor, combined with the communication function of its own SAW device, has several prospective applications in the monitoring of atmospheric conditions.