Superconducting Microwave Resonators Research Articles

Electric Dipole Coupling of a Bilayer Graphene Quantum Dot to a High-Impedance Microwave Resonator.

We implement circuit quantum electrodynamics (cQED) with quantum dots in bilayer graphene, a maturing material platform that can host long-lived spin and valley states. Our device combines a high-impedance (Zr ≈ 1 kΩ) superconducting microwave resonator with a double quantum dot electrostatically defined in a graphene-based van der Waals heterostructure. Electric dipole coupling between the subsystems allows the resonator to sense the electric susceptibility of the double quantum dot from which we reconstruct its charge stability diagram. We achieve sensitive and fast detection of the interdot transition with a signal-to-noise ratio of 3.5 within 1 μs integration time. The charge-photon interaction is quantified in the dispersive and resonant regimes by comparing the resonator response to input-output theory, yielding a coupling strength of g/2π = 49.7 MHz. Our results introduce cQED as a probe for quantum dots in van der Waals materials and indicate a path toward coherent charge-photon coupling with bilayer graphene quantum dots.

Superconducting quantum memory with a suspended coaxial resonator

A promising way to store quantum information is by encoding it in the bosonic excitations of microwave resonators. This provides for long coherence times, low dephasing rates, as well as a hardware-efficient approach to quantum error correction. There are two main methods used to make superconducting microwave resonators: by traditionally machining them out of bulk material and by lithographically fabricating them on a chip in thin film. 3D resonators have few loss channels and larger mode volumes, and therefore smaller participations in the lossy parts, but it can be challenging to achieve high material quality. On-chip resonators can use low-loss thin films, but they confine the field more tightly, resulting in higher participations and additional loss channels from the dielectric substrate. In this work, we present a design in which a dielectric scaffold supports a thin-film conductor within a 3D package, thus combining the low surface participations of bulk-machined cavities with high quality and control over materials of thin-film circuits. By incorporating a separate chip containing a transmon qubit, we realize a quantum memory and measure single-photon lifetimes in excess of a millisecond. This hybrid 3D architecture has several advantages for scaling as it relaxes the importance of the package and permits modular construction with separately replaceable qubit and resonator devices.

Latched detection of zeptojoule spin echoes with a kinetic inductance parametric oscillator.

When strongly pumped at twice their resonant frequency, nonlinear resonators develop a high-amplitude intracavity field, a phenomenon known as parametric self-oscillations. The boundary over which this instability occurs can be extremely sharp and thereby presents an opportunity for realizing a detector. Here, we operate such a device based on a superconducting microwave resonator whose nonlinearity is engineered from kinetic inductance. The device indicates the absorption of low-power microwave wavepackets by transitioning to a self-oscillating state. Using calibrated pulses, we measure the detection efficiency to zeptojoule energy wavepackets. We then apply it to measurements of electron spin resonance, using an ensemble of 209Bi donors in silicon that are inductively coupled to the resonator. We achieve a latched readout of the spin signal with an amplitude that is five hundred times greater than the underlying spin echoes.

Design, fabrication, and characterization of kinetic-inductive force sensors for scanning probe applications.

We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever) whose deflection is measured via a shift in the resonant frequency of a high-Q superconducting microwave resonator at 4.5 GHz. We present design simulations including mechanical finite-element modeling of surface strain and electromagnetic simulations of meandering nanowires with large kinetic inductance. We discuss a lumped-element model of the force sensor and describe the role of an additional shunt inductance for tuning the coupling to the transmission line used to measure the microwave resonance. A detailed description of our fabrication is presented, including information about the process parameters used for each layer. We also discuss the fabrication of sharp tips on the cantilever using focused electron beam-induced deposition of platinum. Finally, we present measurements that characterize the spread of mechanical resonant frequency, the temperature dependence of the microwave resonance, and the sensor's operation as an electromechanical transducer of force.

Strong Photon-Magnon Coupling Using a Lithographically Defined Organic Ferrimagnet.

A cavity-magnonic system composed of a superconducting microwave resonator coupled to a magnon mode hosted by the organic-based ferrimagnet vanadium tetracyanoethylene (V[TCNE]x) is demonstrated. This work is motivated by the challenge of scalably integrating a low-damping magnetic system with planar superconducting circuits. V[TCNE]x has ultra-low intrinsic damping, can be grown at low processing temperatures on arbitrary substrates, and can be patterned via electron beam lithography. The devices operate in the strong coupling regime, with a cooperativity exceeding 1000 for coupling between the Kittel mode and the resonator mode at T≈0.4 K, suitable for scalable quantum circuit integration. Higher-order magnon modes are also observed with much narrower linewidths than the Kittel mode. This work paves the way for high-cooperativity hybrid quantum devices in which magnonic circuits can be designed and fabricated as easily as electricalwires.

Utilizing Gate-Controlled Supercurrent for All-Metallic Tunable Superconducting Microwave Resonators.

Hybridizing a microwave mode with a quantum state requires precise frequency matching of a superconducting microwave resonator and the corresponding quantum object. However, fabrication always brings imperfections in geometry and material properties, causing deviations from the desired operating frequencies. An effective and universal strategy for their resonant coupling is to tune the frequency of a resonator, as quantum states like phonons are hardly tunable. Here, we demonstrate gate-tunable, titanium-nitride (TiN)-based superconducting resonators by implementing a nanowire inductor whose kinetic inductance is tuned via the gate-controlled supercurrent (GCS) effect. We investigate their responses for different gate biases and observe 4% (∼150 MHz) frequency tuning with decreasing internal quality factors. We also perform temperature-controlled experiments to support phonon-related mechanisms in the GCS effect and the resonance tuning. The GCS effect-based method proposed in this study provides an effective route for locally tunable resonators that can be employed in various hybrid quantum devices.

Piezoelectric loss of superconducting microwave resonators integrated with thin-film lithium niobate

Piezoelectric loss of superconducting microwave resonators integrated with thin-film lithium niobate

Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits

The large physical size of superconducting qubits and their associated on-chip control structures presents a practical challenge toward building a large-scale quantum computer. In particular, transmons require a high-quality-factor shunting capacitance that is typically achieved by using a large coplanar capacitor. Other components, such as superconducting microwave resonators used for qubit state readout, are typically constructed from coplanar waveguides, which are millimeters in length. Here, we use compact superconducting through-silicon vias to realize lumped-element capacitors in both qubits and readout resonators to significantly reduce the on-chip footprint of both of these circuit elements. We measure two types of devices to show that through-silicon vias are of sufficient quality to be used as capacitive circuit elements and provide a significant reduction in size over existing approaches.

Flexible integration of gigahertz nanomechanical resonators with a superconducting microwave resonator using a bonded flip-chip method

We demonstrate strong coupling of gigahertz-frequency nanomechanical resonators to a frequency-tunable superconducting microwave resonator via a galvanically bonded flip-chip method. By tuning the microwave resonator with an external magnetic field, we observe a series of hybridized microwave-mechanical modes and report coupling strengths of ∼15 MHz at cryogenic temperatures. The demonstrated multi-chip approach provides flexible rapid characterization and simplified fabrication and could potentially enable coupling between a variety of quantum systems. Our work represents a step toward a plug-and-play architecture for building more complex hybrid quantum systems.

Hybrid quantum systems with high-T_c superconducting resonators

Superconducting microwave resonators are crucial elements of microwave circuits, offering a wide range of potential applications in modern science and technology. While conventional low-T_c superconductors are mainly employed, high-T_c cuprates could offer enhanced temperature and magnetic field operating ranges. Here, we report the realization of textrm{YBa}_2textrm{Cu}_3textrm{O}_{7-delta } superconducting coplanar waveguide resonators, and demonstrate a continuous evolution from a lossy undercoupled regime, to a lossless overcoupled regime by adjusting the device geometry, in good agreement with circuit model theory. A high-quality factor resonator was then used to perform electron spin resonance measurements on a molecular spin ensemble across a temperature range spanning two decades. We observe spin-cavity hybridization indicating coherent coupling between the microwave field and the spins in a highly cooperative regime. The temperature dependence of the Rabi splitting and the spin relaxation time point toward an antiferromagnetic coupling of the spins below 2 K. Our findings indicate that high-Tc superconducting resonators hold great promise for the development of functional circuits. Additionally, they suggest novel approaches for achieving hybrid quantum systems based on high-T_c superconductors and for conducting electron spin resonance measurements over a wide range of magnetic fields and temperatures.

Nonreciprocal single-photon state conversion between microwave and optical modes in a hybrid magnonic system

Coherent quantum transduction between microwave and optical signals is of great importance for long-distance quantum communication. Here we propose a novel scheme for the implementation of nonreciprocal single-photon state conversion between microwave and optical modes based on a hybrid magnonic system. A yttrium–iron–garnet (YIG) sphere with both the optomechanical and the optomagnetic properties is exploited to couple with a three-dimensional superconducting microwave resonator. The magnetostatic mode of the YIG sphere is treated as an intermediate to interact with the microwave and optical modes simultaneously. By manipulating the amplitudes and phase differences between the couplings via external driving fields, we show that the nonreciprocal microwave-light single-photon state conversion can be realized via the quantum interference effect.

Fabrication and characterization of NbTi microwave superconducting resonators

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used and thoroughly reported in the literature. High temperature superconductors such as YBCO and low temperature superconductors such as Nb, NbN, NbTiN and Al are the major actors in the domain. In this work, we investigate the possibility to extend the family of suitable low temperature superconductors for the realization of planar superconducting microwave resonators for future ESR applications. In particular, this study focuses on NbTi, a widely used material to realize superconducting cables but not investigated for planar resonating structures at GHz frequencies. A 150 nm thick film of NbTi is sputtered and patterned on top of an Al2O3 substrate. For devices resonating around 6.8 GHz quality factors greater than 10,000 are observed at 3 K and in magnetic fields up to 250 mT.

Strong on-Chip Microwave Photon-Magnon Coupling Using Ultralow-Damping Epitaxial Y3Fe5O12 Films at 2 K.

Y3Fe5O12 is arguably the best magnetic material for magnonic quantum information science (QIS) because of its extremely low damping. We report ultralow damping at 2 K in epitaxial Y3Fe5O12 thin films grown on a diamagnetic Y3Sc2Ga3O12 substrate that contains no rare-earth elements. Using these ultralow damping YIG films, we demonstrate for the first time strong coupling between magnons in patterned YIG thin films and microwave photons in a superconducting Nb resonator. This result paves the road toward scalable hybrid quantum systems that integrate superconducting microwave resonators, YIG film magnon conduits, and superconducting qubits into on-chip QIS devices.

Hot Carrier Thermalization and Josephson Inductance Thermometry in a Graphene-Based Microwave Circuit

Due to its exceptional electronic and thermal properties, graphene is a key material for bolometry, calorimetry, and photon detection. However, despite graphene's relatively simple electronic structure, the physical processes responsible for the heat transport from the electrons to the lattice are experimentally still elusive. Here, we measure the thermal response of low-disorder graphene encapsulated in hexagonal boron nitride by integrating it within a multiterminal superconducting microwave resonator. The device geometry allows us to simultaneously apply Joule heat power to the graphene flake while performing calibrated readout of the electron temperature. We probe the thermalization rates of both electrons and holes with high precision and observe a thermalization scaling exponent not consistent with cooling through the graphene bulk and argue that instead it can be attributed to processes at the graphene-aluminum interface. Our technique provides new insights into the thermalization pathways essential for the next-generation graphene thermal detectors.

Scanning tunneling microscopy and spectroscopy characterization of Nb films for quantum applications

Niobium thin films are key components of superconducting microwave resonators. Interest in these devices has increased dramatically because of their application in quantum systems. Despite tremendous effort to improve their performance, loss mechanisms are still not well understood. Nb/substrate and Nb/air interfaces are likely culprits in contributing to decoherence and ultimately limiting the performance of superconducting devices. Here, we investigate the Nb/substrate interface by studying the effect of hydrogen-passivated H:Si(111) substrates on the local superconducting properties of ∼40 nm thick Nb films compared to Nb films grown on typical Si(001) substrates. Specifically, low-temperature scanning tunneling microscopy and spectroscopy are employed to compare nanoscale material properties. The atomically flat monohydride H:Si(111) substrates are found to yield a smoother and less defective interface with the Nb film. Correspondingly, the Nb films grown on H:Si(111) substrates present more uniform superconducting properties and exhibit less quasiparticle broadening.

In situ amplification of spin echoes within a kinetic inductance parametric amplifier

The use of superconducting microresonators together with quantum-limited Josephson parametric amplifiers has enhanced the sensitivity of pulsed electron spin resonance (ESR) measurements by more than four orders of magnitude. So far, the microwave resonators and amplifiers have been designed as separate components due to the incompatibility of Josephson junction-based devices with magnetic fields. This has produced complex spectrometers and raised technical barriers toward adoption of the technique. Here, we circumvent this issue by coupling an ensemble of spins directly to a weakly nonlinear and magnetic field-resilient superconducting microwave resonator. We perform pulsed ESR measurements with a 1-pL mode volume containing 6 × 107 spins and amplify the resulting signals within the device. When considering only those spins that contribute to the detected signals, we find a sensitivity of [Formula: see text] for a Hahn echo sequence at a temperature of 400 mK. In situ amplification is demonstrated at fields up to 254 mT, highlighting the technique's potential for application under conventional ESR operating conditions.

Strong coupling between a photon and a hole spin in silicon.

Spins in semiconductor quantum dots constitute a promising platform for scalable quantum information processing. Coupling them strongly to the photonic modes of superconducting microwave resonators would enable fast non-demolition readout and long-range, on-chip connectivity, well beyond nearest-neighbour quantum interactions. Here we demonstrate strong coupling between a microwave photon in a superconducting resonator and a hole spin in a silicon-based double quantum dot issued from a foundry-compatible metal-oxide-semiconductor fabrication process. By leveraging the strong spin-orbit interaction intrinsically present in the valence band of silicon, we achieve a spin-photon coupling rate as high as 330 MHz, largely exceeding the combined spin-photon decoherence rate. This result, together with the recently demonstrated long coherence of hole spins in silicon, opens a new realistic pathway to the development of circuit quantum electrodynamics with spins in semiconductor quantum dots.

Toward the realization of a primary low-pressure standard using a superconducting microwave resonator.

We describe a primary gas pressure standard based on the measurement of the refractive index of helium gas using a microwave resonant cavity in the range between 500Pa and 20kPa. To operate in this range, the sensitivity of the microwave refractive gas manometer (MRGM) to low-pressure variations is substantially enhanced by a niobium coating of the resonator surface, which becomes superconducting at temperatures below 9K, allowing one to achieve a frequency resolution of about 0.3Hz at 5.2GHz, corresponding to a pressure resolution below 3 mPa at 20Pa. The determination of helium pressure requires precise thermometry but is favored by the remarkable accuracy achieved by ab initio calculations of the thermodynamic and electromagnetic properties of the gas. The overall standard uncertainty of the MRGM is estimated to be of the order of 0.04%, corresponding to 0.2Pa at 500 and 8.1Pa at 20kPa, with major contributions from thermometry and the repeatability of microwave frequency measurements. A direct comparison of the pressures realized by the MRGM with the reference provided by a traceable quartz transducer shows relative pressure differences between 0.025% at 20kPa and -1.4% at 500Pa.

Multi-mode analysis of surface losses in a superconducting microwave resonator in high magnetic fields.

This paper reports on a surface impedance measurement of a bulk metal niobium-titanium superconducting radio frequency (SRF) cavity in a magnetic field (up to 10T). A novel method is employed to decompose the surface resistance contributions of the cylindrical cavity end caps and walls using measurements from multiple TM cavity modes. The results confirm that quality factor degradation of a NbTi SRF cavity in a high magnetic field is primarily from surfaces perpendicular to the field (the cavity end caps), while parallel surface resistances (the walls) remain relatively constant. This result is encouraging for applications needing high Q cavities in strong magnetic fields, such as the Axion Dark Matter eXperiment because it opens the possibility of hybrid SRF cavity construction to replace conventional copper cavities.

Microwave-to-optical transduction with erbium ions coupled to planar photonic and superconducting resonators

Optical quantum networks can connect distant quantum processors to enable secure quantum communication and distributed quantum computing. Superconducting qubits are a leading technology for quantum information processing but cannot couple to long-distance optical networks without an efficient, coherent, and low noise interface between microwave and optical photons. Here, we demonstrate a microwave-to-optical transducer using an ensemble of erbium ions that is simultaneously coupled to a superconducting microwave resonator and a nanophotonic optical resonator. The coherent atomic transitions of the ions mediate the frequency conversion from microwave photons to optical photons and using photon counting we observed device conversion efficiency approaching 10−7. With pulsed operation at a low duty cycle, the device maintained a spin temperature below 100 mK and microwave resonator heating of less than 0.15 quanta.