Subtractive Process Research Articles

Surface-modified CMOS biosensors

Biosensors translate biological events into electronic signals that quantify biological processes. They are increasingly used in in vitro diagnostics applications that leverage their ability to process small sample volumes. One recent trend has been to integrate biosensors with complementary metal-oxide-semiconductor (CMOS) chips to provide enhanced miniaturization, parallel sensing, and low power consumption at a low cost. CMOS-enabled biosensors are used in monitoring DNA hybridization, enzymatic reactions, and cell proliferation, to name a few applications. This paper explores the materials and processes used in emerging CMOS biosensors. We discuss subtractive and additive processes for creating electrodes for electrochemical sensing applications. We discuss functionalization techniques for creating bioelectronic interfaces that allow molecular events to be transduced into the electrical domain using a plurality of modalities that are readily provided by CMOS chips. Example modalities featured are optical sensing, electrochemical detection, electrical detection, magnetic sensing, and mechanical sensing.

Efficient mass manufacturing of high-density, ultra-low-loss Si3N4 photonic integrated circuits

Silicon nitride (Si3N4) photonic integrated circuits (PICs) offer significant advantages over traditional silicon photonics, including low loss and superior power handling at optical communication wavelength bands. To facilitate high-density integration and effective nonlinearity, the use of thick, stoichiometric Si3N4 films is crucial. However, when using low-pressure chemical vapor deposition (LPCVD) to achieve high optical material transparency, Si3N4 films exhibit large tensile stress on the order of GPa, leading to wafer cracking that challenges mass production. Methods for crack prevention are therefore essential. The photonic Damascene process has addressed this issue, attaining record low-loss Si3N4 PICs, but it lacks control of the waveguide height, leading to large random variations of waveguide dispersion and unpredictable spectrum responses of critical functional devices such as optical couplers. Conversely, subtractive processes achieve better dimension control but rely on techniques unsuitable for large-scale production. To date, an outstanding challenge is to attain both lithographic precision and ultra-low loss in high-confinement Si3N4 PICs that are compatible with large-scale foundry manufacturing. Here, we present a single-step deposited, DUV-based subtractive method for producing wafer-scale ultra-low-loss Si3N4 PICs that harmonize these necessities. By employing deep etching of densely distributed, interconnected trenches into the substrate, we effectively mitigate the tensile stress in the Si3N4 layer, enabling direct deposition of thick films without cracking and substantially prolonged storage duration. A secondary ion mass spectrometry (SIMS) analysis reveals that these deep trenches simultaneously serve as gettering centers for metal impurities, in particular copper, thereby reducing the absorption loss in Si3N4 waveguides. Lastly, we identify ultraviolet (UV)-radiation-induced damage that can be remedied through a rapid thermal annealing. Collectively, we develop ultra-low-loss Si3N4 microresonators and 0.5-m-long spiral waveguides with losses down to 1.4 dB/m at 1550 nm with high production yield. This work addresses the long-standing challenges toward scalable and cost-effective production of tightly confined, low-loss Si3N4 PICs as used for quantum photonics, large-scale linear and nonlinear photonics, photonic computing, and narrow-linewidth lasers.

Micro-perforated plates constructions with approaching the theoretical limits of its sound absorption performance

Micro-perforated plates resonant absorbers have a considerable theoretical sound absorption bandwidth upper limit. Three types of MPPs with straight holes, including circular holes on thick plate, circular holes on thin plate, and slotted holes on thin plate, are investigated with approaching the theoretical limits of its sound absorption performance. It is demonstrated that thin plates are easy to obtain satisfactory sound absorption performance but hard to get high mechanical strength. Slotted holes are beneficial for extending the sound absorption bandwidth of MPP absorbers. MPPs with straight holes usually require a combination of thin plates, minute holes and high perforation ratios, which is practically difficult to apply on a large scale. Two other types of MPPs with variable cross-sectional holes, fabricated using the subtractive processing method and superposition processing method, are then proposed to achieve perfect sound absorption performance and good engineering feasibility.

Robot path planning for metrology in hybrid manufacturing

The objective of the wire arc additive manufacturing (WAAM) hybrid cell is to significantly reduce lead time associated with large scale parts. The WAAM process utilizes a 6 degree-of-freedom (DOF) robot manipulator in addition to a 2 DOF part positioner. After printing, the part is translated into position for scanning to inform the subtractive manufacturing process. Scanning in a manual setting can be a long and arduous process to generate scans of sufficient quality for the basis of informed machining. Effective path planning for scanning with the intent to reduce scanning time, increase quality of scans, and move toward a full automation of the hybrid manufacturing cell is investigated in this paper. Simulation software is used to create and verify path plans prior to importing and implementing on a 6 DOF robotic manipulator to which a GOM ATOS Q 3D scanner is mounted. The quality, amount of time necessary to produce, and number of scans required to produce a sufficient representation for machining are compared using three methods. The first method is a manual scanning configuration, the second is using a generalized path plan, and the third is using a geometry-based path plan.

3D-Printed Complete Dentures: A Review of Clinical and Patient-Based Outcomes.

There has recently been an increasing trend to shift the fabrication of complete dentures from conventional to digital workflows to shorten the treatment time and increase patient comfort and satisfaction. Digital fabrication of complete dentures can be achieved either by a subtractive process (milling)or by an additive technique (3D printing). The milling process offers numerous advantages; however, they require large-size production machines and are associated with low production efficiency, increased cost, limited block size, and a considerable waste of material. On the other hand, 3D printing technology can potentially offer the benefits of lower manufacturing and equipment costs, good surface details, and lower material waste.Hence, 3D printing is being considered lately by some researchers as a valid choice for manufacturing digital dentures. Therefore, the aim of the current review was to identify and highlight studies on 3D-printed dentures, mainly those investigating clinical and patient-centered outcomes. A search was conducted using thedatabasesPubMed/MEDLINE, Cochrane Library, Embase, and Google Scholar. After applying the inclusion and exclusion criteria, a total of 16 studies that investigated clinical outcomes (masticatory efficiency, biting force, retention and stability, computerized occlusal analysis, and post-insertion maintenance) as well as patient-based outcomes (patient satisfaction, oral health-related quality of life (OHRQoL), patient-related complications, patient preference, and willingness to pay) were included. After a thorough review and discussion of these articles, it could be concluded that 3D printing of complete dentures offers many advantages from both a clinical and patient-based perspective. Retention and comfort with 3D-printed dentures were found to be comparable or even superior to conventional dentures. Moreover, retention of 3D-printed dentures constructed from conventional impressions and digitized casts demonstrated improved retention when compared to a protocol adopting intraoral scanning (digital impressions). Masticatory efficiency, biting force, OHRQoL, and patient satisfaction with 3D-printed dentures varied and were inconsistent among the included studies. Most of the studies reported positive results in the different domains and assessed aspects, while others reported some concerns (especially in terms of aesthetics and phonetics). With regard to post-insertion maintenance, printed dentures showed comparable results to conventional dentures in the short term. The technique seems promising with numerous benefits; however, further clinical research with larger sample sizes and longer follow-up periods is still needed to confirm these conclusions and address the potential concerns.

Measuring thermomechanical response of large-format printed polymer composite structures via digital image correlation

Large-format additive manufacturing (LFAM) is a branch of additive manufacturing (AM) research with the ability to create large structures typically measuring several meters in scale. LFAM is advantageous for tooling applications, not only because it offers the ability to create complex geometries not easily made using subtractive manufacturing processes, but the cost savings of pelletized feedstock used by these systems result in larger parts printed at faster speeds than traditional AM systems. Fiber reinforced polymer (FRP) is a commonly used feedstock material in LFAM structures because it reduces the distortion experienced during printing. However, FRP introduces highly anisotropic thermomechanical properties and contributes to a nonhomogeneous microstructure that can result in critical distortion of dimensions during tooling. Measuring the global thermomechanical response of LFAM structures requires a more representative method that accounts for not only anisotropic properties but also the nonhomogeneous nature of the final part. This is where traditional techniques to measure thermomechanical response, such as thermomechanical analysis (TMA), fall short as they assume homogeneity. This study evaluated the coefficient of thermal expansion (CTE) of LFAM structures as measured by TMA as compared to a novel digital image correlation oven (DIC Oven) system. The LFAM structures were made from 20 % by weight carbon fiber reinforced acrylonitrile butadiene styrene (CF-ABS). TMA measurements showed significant variations in CTE across a single LFAM bead, confirming the need for a global technique that captures overall thermomechanical response. The CTE values measured using the DIC Oven compared well to average TMA values obtained from localized measurements across the sample. The DIC Oven was also used to quantify the effects of different layer orientations on thermomechanical properties, which cannot be easily captured using TMA. A predictive model was also developed by using localized TMA values across an LFAM bead to predict the overall thermomechanical response of an LFAM structure.

Computed tomography as distortion mitigation method for selective laser sintering mass production

Most additive manufacturing (AM) technologies use heat to fuse materials together to create the manufactured part. The heat used in the AM process distorts the parts. Powder bed–based 3D printers can print multiple parts in their build chamber. The distortion is not uniform across the different locations of the build volume. Parts printed in different locations will have different thermal histories and therefore different distortions. In some cases, the achievable accuracy of the parts is insufficient due to the distortion. Subtractive processes such as milling, turning, and grinding make it difficult or impossible to improve part accuracy. For AM to produce more accurate parts, a distortion reduction method must be implemented. To take advantage of the ability to print multiple parts in a powder-based polymer 3D printing process in one build unit, a distortion mitigation technique must be applied to all the parts being printed simultaneously in the build chamber. The performance of the distortion mitigation method can be evaluated by measuring the dimensional accuracy of the uncompensated and compensated parts. Uncompensated 3D printing uses the nominal 3D model, which is the normal use of the 3D printers. Compensated 3D printing uses a distorted 3D model that is used for the printing. The 3D model is compensated with the reversed distortion data obtained from uncompensated manufacturing. X-ray computed tomography (XCT) is the chosen measurement method to extract the point cloud for the dimensional measurements. Unlike optical 3D scanners and coordinate measuring machines (CMM), the XCT is able to measure undercut and internal surfaces. The nominal difference % is improved by 18% by using compensation for the 3D models in the case of distances between two parallel planes. The standard deviation of the measured values was also improved. The distortion reduction method studied can significantly reduce the calibration errors of the 3D printer build chamber. When the tolerances of the parts are close to the limit of the 3D printer, this method can reduce the number of rejected parts. The XCT measurement of the parts is costly, so this method can be cost effective for high value parts or large production volumes.

Hybrid Fabrication of Zirconia Parts with Smooth Surface Texture and Tight Tolerances

The conventional manufacturing chain for technical ceramics is too expensive for the production of small series or unique parts with complex designs. Hybrid machines that combine additive and subtractive processes can be an interesting solution to overcome this technology lock-in. However, despite the great interest in hybrid machines for metallic parts, there is a lack of data in the literature when it comes to ceramics. The purpose of this paper is to contribute to closing this gap. It is the first to evaluate the achievable geometrical tolerances according to ISO 2768-2 as well as the surface textures of composite zirconia parts shaped sequentially by pellet additive manufacturing (PAM, from ceramic injection molding feedstock) and finish milling. The green parts were then debinded and sintered to analyze the influence of these steps. Compared to the initial green parts, the sintered parts exhibited shiny and smooth surfaces with sharp edges. Flatness, parallelism and perpendicularity all achieved an H (fine) class, while the surface textures were significantly improved, resulting in arithmetic roughness (Ra) below 1.6 µm.

Fabrication of a Low-Cost Fused Filament Fabrication-based 3D Printer and Investigation of the Effect of Process Parameters on Mechanical Properties of 3D-Printed Samples

Additive Manufacturing (AM) techniques add material layer-by-layer to fabricate parts or products, compared to subtractive manufacturing processes, where the material is removed to obtain the final product. The most common method among AM techniques is fused filament fabrication (FFF), which uses filament material to print objects into end products. The present study's aims include designing and fabricating a custom FFF-based 3D printer and investigating the effects of three process parameters on the tensile properties of the 3D-printed samples. Initially, the 3D printer was successfully fabricated. The locally fabricated 3D printer uses Marlin Firmware 2.0 as programming code to control different functionalities of the printing processes. After fabrication and calibration, the printer 3D-printed a few samples successfully. Moreover, a design of experiments plan was formulated to print tensile specimens based on the levels of the process parameters. Tensile testing was performed, and the analysis of variance (ANOVA) confirmed that the process parameters significantly affected the tensile strength. The effects of the process parameters were then analyzed, along with the defect formation and microstructure analysis. Finally, optimum parameters for printing PLA parts with better tensile properties were figured out for the designed 3D printer.

Bridging additive and subtractive manufacturing

AbstractAdditive manufacturing with laser powder‐bed fusion (PBF‐LB/M) can generate complex metal parts with a high degree of design freedom, which are already being used in various industries. However, the PBF‐LB/M process faces some limitations in achievable surface quality and feature size. To address these challenges, we have developed a novel hybrid manufacturing approach that combines additive manufacturing via PBF‐LB/M with subtractive manufacturing via ultrafast laser machining. By alternating between additive and subtractive processes, it is possible to not only mitigate the limitations of each process but also to introduce new functionality. This synergistic combination enables the creation of parts with superior surface finishes and deep and narrow internal features that are not possible with a single method alone.

Digital Twin in Process Planning of the Additive and Subtractive Process Chain for Laser Metal Deposition and Micro Milling of Stainless Steel

Abstract Additive and subtractive (Add/Sub) manufacturing processes are increasingly being combined to produce complex parts with unique geometries and properties. However, the design of such combined processes is often challenging as it requires a deep understanding of the interaction between the different processes. On the other hand, digital twin (DT) technology has become a powerful tool in recent years for optimizing manufacturing processes. This article explores the use of the digital twin technology for a holistic process planning of combined additive and subtractive processes. The article describes the integration of laser metal deposition (LMD) and micro-milling prediction models of resulting geometry (width and height), hardness, and surface roughness into the digital twin. This is then used for combined process planning to achieve different target values regarding resulting geometry and surface roughness. For the planning of this combined process chain, further criteria such as tool life, energy, and process time are considered in the optimization, showing the potential for sustainable and efficient production. Sensorless cutting force estimation is also used to detect small cutting forces, with the potential to use this as a soft sensor for roughness estimation. The measured width, height, and roughness as a result of the process parameters suggested by the optimization algorithms showed a mean absolute percentage error (MAPE) of 4, 17, and 16%, respectively.

A compact tri-notched flexible UWB antenna based on an inkjet-printable and plasma-activated silver nano ink

The rapid development of ultrawideband (UWB) communication systems has resulted in increasing performance requirements for the antenna system. In addition to a wide bandwidth, fast propagation rates and compact dimensions, flexibility, wearability or portability are also desirable for UWB antennas, as are excellent notch characteristics. Although progress has been made in the development of flexible/wearable antennas desired notch properties are still rather limited. Moreover, most presently available flexible UWB antennas are fabricated using environmentally not attractive subtractive etching-based processes. The usage of facile additive sustainably inkjet printing processes also utilizing low temperature plasma-activated conductive inks is rarely reported. In addition, the currently used tri-notched flexible UWB antenna designs have a relatively large footprint, which poses difficulties when integrated into miniaturized and compact communication devices. In this work, a silver nano ink is used to fabricate the antenna via inkjet printing and an efficient plasma sintering procedure. For the targeted UWB applications miniaturized tri-notched flexible antenna is realized on a flexible polyethylene terephthalate (PET) substrate with a compact size of 17.6 mm × 16 mm × 0.12 mm. The antenna operates in the UWB frequency band (2.9–10.61 GHz), and can shield interferences from WiMAX (3.3–3.6 GHz), WLAN (5.150–5.825 GHz) and X-uplink (7.9–8.4 GHz) bands, as well as exhibits a certain of bendability. Three nested "C" slots of different sizes were adopted to achieve notch features. The simulation and test results demonstrate that the proposed antenna can generate signal radiation in the desired UWB frequency band while retaining the desired notch properties and having acceptable SAR values on-body, making it a viable candidate for usage in flexible or wearable communication transmission devices. The research provides a facile and highly efficient method for fabricating flexible/wearable UWB antennas, that is, the effective combination of inkjet printing processing, flexible substrates, low temperature-activated conductive ink and antenna structure design.

Ultrafast Laser Processing of 2D Materials: Novel Routes to Advanced Devices.

Ultrafast laser processing has emerged as a versatile technique for modifying materials and introducing novel functionalities. Over the past decade, this method has demonstrated remarkable advantages in the manipulation of 2D layered materials, including synthesis, structuring, functionalization, and local patterning. Unlike continuous-wave and long-pulsed optical methods, ultrafast lasers offer a solution for thermal heating issues. Nonlinear interactions between ultrafast laser pulses and the atomic lattice of 2D materials substantially influence their chemical and physical properties. This paper highlights the transformative role of ultrafast laser pulses in maskless green technology, enabling subtractive, and additive processes that unveil ways for advanced devices. Utilizing the synergetic effect between the energy states within the atomic layers and ultrafast laser irradiation, it is feasible to achieve unprecedented resolutions down to several nanometers. Recent advancements are discussed in functionalization, doping, atomic reconstruction, phase transformation, and 2D and 3D micro- and nanopatterning. A forward-looking perspective on a wide array of applications of 2D materials, along with device fabrication featuring novel physical and chemical properties through direct ultrafast laser writing, is also provided.

Application of Nonlinear Analysis in Evaluating Additive Manufacturing Process for Engineering Design Features: A Study and Recommendations

In today’s world, Additive Manufacturing (AM) is quickly becoming the dominant manufacturing technology. Massive development has occurred in recent decades, and it is occurring at a much faster rate. It has also progressed from simple prototype to actual end-use items and manufacturing tools. Various manufacturing processes, such as SLS, LENS, FDM, PolyJet, SLA, LTP, DMLS FDM, and binder jet printing, are produced using additive manufacturing techniques. Layer by layer material deposition/addition is a critical component in all these operations, which is why this technology is known as additive manufacturing. Rapid prototyping, 3D printing, digital manufacturing, and other such names are used. Automotive, Aerospace components, medical equipment parts, consumer goods and gadgets, fashion sector, jewelry, and other industries employ additive manufacturing.Currently all designed parts can manufacture using either subtractive or additive manufacturing processes. However, distinct design elements established for production provide additional manufacturing obstacles in metal substation and metal addition manufacturing procedures. As the number of parts made directly utilizing additive manufacturing techniques grows, it is critical to compile a list of the best design for manufacturing principles applicable for various additive manufacturing procedures. This will assist the design community in ensuring that items are developed for additive manufacturing rather than generic strategy and produced.The primary goal of this effort is to evaluate and comprehend the various additive processes and choose the optimal design for manufacturing procedures to be used. As a result, one should be prepared to select a suitable additive manufacturing process for printing based on the design aspects of the component to be produced.

Numerical and experimental analysis of edge wave defect control during TA2 circular tube cold roll forming

AbstractThe increasing application of TA2 titanium profiles in marine and petrochemical industries has spurred in a growing demand for diverse forms, including U‐shaped, rectangular, and tubular thin‐walled profiles. Traditional methods like mechanical subtractive processing and extrusion, despite their prevalence, suffer from high production costs and low efficiency. As a metal sheet forming technology, roll forming stands out for its efficiency, accuracy, and capability of producing complex shapes continuously. Nevertheless, the application of cold rolling to TA2 profiles is challenging primarily due to its low elastic modulus and high yield strength. In view of this, this study employed finite element simulation to analyze the stress and strain distribution during the TA2 roll forming process, aiming to have a better understanding of edge wave defect formation mechanism. Orthogonal experiments were performed to assess the influence of frame spacing, forming speed, roll gap, and downhill amount, on edge wave defects. The findings revealed a predominant influence of the downhill amount. Maintaining the downhill volume at 0.6 times the tube diameter kept the longitudinal strain below 0.9%, effectively mitigating edge wave defects. Implementation of these optimized parameters in an actual TA2 roll forming process confirmed the reliability of the simulations. This study establishes a solid foundation for advancing the TA2 tube cold roll forming process, enhancing the production efficiency of titanium profiles, and shedding some light on current energy conservation and emission reduction.

Patterning and epitaxy of large-area arrays of nanoscale complex oxide epitaxial heterostructures

A combination of block copolymer (BCP) lithography and solid-phase epitaxy can be employed to form large areas, on the order of square centimeters, of a high density of epitaxial crystalline complex oxide nanostructures. We have used BCP lithography with a poly(styrene-block-methyl methacrylate) (PS-b-PMMA) copolymer to template a nanohole array either directly on an (001)-oriented SrTiO3 (STO) single crystal substrate or on a 20 nm-thick Si3N4 layer deposited on the STO substrate. BCPs with the selected compositions assembled in a cylindrical phase with 16 nm diameter PMMA cylinders and a cylinder-to-cylinder spacing of 32 nm. The substrate was modified with an energetically non-preferential polymer layer to allow for the vertical alignment of the cylinders. The PMMA cylinders were removed using a subtractive process, leaving an array of cylindrical holes. For BCPs assembled on Si3N4/STO, the pattern was transferred to the Si3N4 layer using reactive ion etching, exposing the underlying STO substrate in the nanoholes. An amorphous LaAlO3 (LAO) layer was deposited on the patterned Si3N4/STO at room temperature. The amorphous LAO epitaxially crystallized within the nanoscale-patterned holes with fully relaxed lattice parameters through solid phase epitaxy, resulting in the formation of nanoscale LAO/STO epitaxial heterostructures.

Comparative study to evaluate the subtractive and additive process in dentistry: a systematic review

The objective of this study was focused on carrying out an analysis on the main contributions of additive manufacturing in dental pieces and the benefits of this procedure in dentistry, as well as establishing the advantages and limitations that this modality entails. The research was based on a systematic review with adaptability to Prisma and Tranfield methodology, through which the impact of additive manufacturing in dental clinics and in the various clients who acquire the pieces in terms of taste and adherence to product, likewise, in terms of contribution to knowledge, the study remains as a precedent for other investigations that are carried out later on this topic. Articles published in the last five years from the Scopus and Web of Science databases were reviewed. The process was developed through inclusion and exclusion criteria, wherein its final instance the material criteria, type of printing, and post-processing were reviewed, to which a final filter was made that yielded the articles for review of the literature. This project contributes to the knowledge of the processes that are carried out in additive manufacturing in dental pieces, the advantages and disadvantages, thus leaving a precedent for the adherence of dental clinics to this method.

Driving mechanisms of soil bacterial α and β diversity under long-term nitrogen addition: Subtractive heterogenization based on the environment selection

Soil bacterial α and β diversity patterns under nitrogen (N) addition have been intensively examined, but γ diversity patterns remain largely unknown, especially, the mechanisms that concurrently control changes in α, β and γ diversity remain elusive. Therefore, we formulated a conceptual framework that simultaneously considers candidate drivers including ubiquitous species, rare species, and community assembly processes to elucidate the driving mechanisms of α, β and γ diversity under N addition. The conceptual framework was tested by compiling the sequence data of seven studies published from January 1997 to May 2022 and following the same analysis as our own two long-term multilevel N addition experiments. We demonstrate that subtractive heterogenization based on environment selection simultaneously predicts the changes in α, β and γ diversity under long-term N addition. That is, long-term N addition led to the decline of ubiquitous species (subtractive processes) through low soil pH, and promoted the strength of heterogeneous selection (heterogeneous processes) via enhancing environmental heterogeneity, subsequently causing lower α diversity and γ diversity but higher β diversity. These results mean that N addition may lead to a significant loss of soil bacterial diversity around the world. Together, these findings offer a way to simultaneously predict soil bacterial α, β and γ diversity responses to the ongoing atmospheric nitrogen deposition.

Analysis of the machining process of short carbon fiber-reinforced polyamide additive manufactured parts

In recent years, additive manufacturing technologies have revolutionized the production of parts, particularly in the aeronautical sector. This new manufacturing paradigm has created significant challenges and opportunities for researchers in materials and manufacturing processes. One important aspect is the development of optimal strategies for finishing-oriented machining of parts produced through additive manufacturing.This article focuses on the analysis of reinforced polyamide materials and the integration of large-scale additive manufacturing using Big Area Additive Manufacturing (BAAM) technology, along with robotic systems for subtractive machining. The aim is to explore the potential of integrating additive and subtractive processes to produce high-quality, large-scale components.The study examines the production and subsequent machining of reinforced polyamide parts using BAAM technology, showcasing the advantages and promising results observed. By combining additive manufacturing with subtractive machining, this research contributes to the ongoing advancements in the field of manufacturing, particularly in relation to reinforced polyamide materials. The findings presented in this article shed light on the potential of integrating additive and subtractive processes in the manufacturing industry, paving the way for more efficient and high-quality production methods.

Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration

In recent years, resistive memories have emerged as a pivotal advancement in the realm of electronics, offering numerous advantages in terms of energy efficiency, scalability, and non-volatility [1]. Characterized by their unique resistive switching behavior, these memories are well-suited for a variety of applications, ranging from high-density data storage to neuromorphic computing [2]. Their potential is further enhanced by their compatibility with advanced semiconductor processes, enabling seamless integration into modern electronic circuits [3]. A particularly promising avenue for resistive memory lies in its integration at the Back-End-of-Line (BEOL) stage of semiconductor manufacturing [4]. BEOL integration involves processes that occur after the fabrication of the transistors, primarily focusing on creating interconnections that electrically link these transistors. Integrating resistive memories at this stage can lead to compact, efficient, and high-performance architectures, pivotal for in-memory computing applications where data storage and processing are co-located [5]. This paper studies three ways to integrate TiOx-based resistive memory into passive crossbar array structures, using chemical mechanical polishing (CMP) processes, focusing on identifying the optimal integration techniques.