The sintering of high purity alumina, by using a very high frequency in range sub-millimeter waves, is presented in this paper. The sintering was performed by using a 300 GHz material processing system. Achieving homogeneous and volumetric heating on submillimeter wave sintering was confirmed by the grain size distribution analysis. The densification curves were obtained for submillimeter wave (300 GHz), millimeter wave (28 GHz), and conventional processing. The enhancement of densification and early shrinkage were observed on submillimeter wave sintering. However, compared with millimeter wave method, the densification of sub-millimeter wave sintering is lower at all sintering temperatures. The grain coarsening was analyzed using SEM photographs of fracture surfaces. The grain sizes of submillimeter wave sintered samples were smaller than those of the millimeter wave sintered samples. The effect of cold isostatic pressing, was also evaluated on submillimeter wave sintering. It suggests that the cold isostatic pressing method is quite effective for densification of SMMW sintering alumina.