Hydrogenated amorphous carbon (a-C:H) film has emerged as a significant contender for solid lubrication applications in low-temperature environments. Here, a set of a-C:H films doped with varying contents of elements (Al, Cr, Si) (AlCrSi/a-C:H) were fabricated, and their low-temperature frictional evolution pattern and mechanisms were explored. The results revealed that the films maintained a superlubricity state as the temperature decreased to − 40 °C, and when the temperature further decreased, the coefficient of friction increased followed by a significant fluctuation. It was related to the competition between shear graphitization, abrasive wear, transfer film formation, and film embrittlement in different low temperature ranges. This work provides new evidence for understanding the carbon film low-temperature friction behavior.