The level and distribution of residual stresses have great impact on dimensional stability, while Vibratory Stress Relief (VSR) is an effective technology to relax or homogenize residual stresses. Experimental study on residual stresses distribution, residual strain energy and machining deformation of 7075 high-strength aluminum alloy thick plate under different aging process status shows that VSR can effectively decrease the amplitude and strain energy density, and enhance stability of dislocation structures and phase states in metal microscopic volume, then internal residual stresses are homogenized to enhance components’ anti-deformation capacity. In addition, the capability in maintaining dimensional stability from VSR is better than that from traditional mechanical stretching process