Despite the non-contact nature of electrical discharge machining (EDM) process makes it become one of most promising methods to fabricate array micro structures, the low consistent accuracy, serious tool wear and low prepared efficiency has hindered the development and applications of EDM technology in fabricating array micro structures. To fill this gap, the mixture feeding model was firstly introduced to fabricate array microelectrodes by low speed wire electrical discharge machining (LS- WEDM) to balance the contradiction between consistent accuracy and prepared efficiency. Firstly, the contrast experiments of preparing array microelectrodes with various feeding models were conducted, and results indicated that the processing efficiency of square array microelectrodes obtained by mixture model was increased by 36.4% compared to constant velocity model. Besides, the consistent accuracy, corner radius and taper accuracy of square array micro holes were investigated in detail. The effects of lifting model and lifting speed on surface roughness parameters of inner wall of square array micro holes were disclosed. Moreover, the transverse and longitudinal tool electrode wear of square array microelectrodes were qualitatively measured and analyzed, and the mechanism for tool electrode loss involved in preparation of array micro holes in Ni-base single crystal superalloy was revealed. The research results are of great significance for improving the prepared accuracy of array microelectrodes and promoting engineering application of EDM technology in preparing array micro structures.