Flashover is a major limiting factor for the transmission and miniaturization of high-power microwave (HPM) devices. We conducted a study to investigate the developmental process of surface flashover on HPM dielectric windows through particle-in-cell-Monte Carlo collision simulations. A one-dimensional spatial distribution and three-dimensional velocity distribution model is established, encompassing the entire process of surface flashover, which includes electrode field emission, single-surface multipactor, outgassing, and gas breakdown. The nonuniform mesh generation method is employed to enhance the simulation accuracy. The growth rates of electron and ion densities increase as gas pressure rises. Additionally, the discharge transitions gradually from multipactor to gas ionization dominance. Notably, a space-charge-limited (SCL)-like sheath occasionally forms during an rf cycle near the surface under intermediate background pressure (∼0.05 Torr). The SCL-like sheath cannot exist stably. Instead, it periodically disappears and appears as the rf electric field changes. The underlying physics are explained by the variations of the rf electric field, which lead to the variations in the surface charge density, thereby affecting the normal electric field. The normal electric field interacts with the spatial distribution of charged particles, ultimately leading to the formation of the SCL-like sheath. This work may facilitate a comprehensive understanding of the developmental processes of surface flashover.
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