To improve the dielectric strength in vacuum, spark conditioning through repetitive breakdowns by AC or impulse voltage is an effective method. AC conditioning at commercial power frequencies has been widely used due to its cost‐effectiveness, but the breakdown voltage after AC conditioning is generally lower compared to impulse conditioning. We have confirmed that multiple breakdowns occur successively in a half cycle of AC voltage application. It is considered that the multiple breakdowns are harmful for conditioning and triggered due to the previous breakdown in the same half cycle. In this paper, we discuss dielectric strength improvement by high frequency AC conditioning and how the multiple breakdowns are induced. We experimentally confirmed that the AC conditioning effect is improved by increasing the frequency of AC voltage for different applied AC conditioning voltages in a sphere‐plane electrode system. We focused on the breakdown position from the light emission images during AC conditioning to investigate whether the multiple breakdowns were induced or affected by the previous breakdown. We found that the multiple breakdowns occurred close to the previous breakdown position. The multiple breakdowns would be induced by the collision of metal particles due to the previous breakdown with the counter electrode. These breakdowns do not contribute to removing protrusion and would lead to damage to the electrode surface. The increasing frequency of AC conditioning would suppress the multiple breakdowns and improve the dielectric strength in vacuum. © 2024 The Author(s). IEEJ Transactions on Electrical and Electronic Engineering published by Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.