AbstractGeophysical observations indicate that patches of localized fracturing occur within otherwise viscous regions of subduction plate boundaries. These observations place uncertainty on the possible down‐dip extent of the seismogenic zone, and as a result the maximum magnitude of subduction thrust earthquakes. However, the processes controlling where and how localized fracturing occurs within otherwise viscous shear zones are unclear. We examined three exposures of exhumed plate boundary on Kyushu, Japan, which contain subducted sediments and hydrated oceanic crust deformed at ∼300 to ∼500°C. These exposures preserve subduction‐related viscous deformation, which in two of the studied exposures has a mutually overprinting relationship with quartz veins, indicating localized cyclical embrittlement. Where observed, fractures are commonly near lithological contacts that form viscosity contrasts. Mineral equilibrium calculations for a metabasalt composition indicate that exposures showing cyclical embrittlement deformed at pressure‐temperature conditions near dehydration reactions that consume prehnite and chlorite. In contrast, dominantly viscous deformation occurred at intervening pressure‐temperature conditions. We infer that at conditions close to metamorphic dehydration reactions, only small stress perturbations are required for transient embrittlement, driven by localized dehydration reactions reducing effective stress, and/or locally increased shear stresses along rheological contrasts. Our results show that the protolith composition of the subducting oceanic lithosphere controls the locations and magnitudes of dehydration reactions, and the viscosity of metamorphosed oceanic crust. Therefore, compositional variations might drive substantial variations in slip style.