A series of PbZr 0.53Ti 0.47O 3 (PZT)/La 1.85Sr 0.15CuO 4 (LSCO) integrated films were grown on SrTiO 3 (STO)(001) substrates by DC/RF magnetron sputtering method. The film thickness of the PZT changes from 500 to 9000 Å, while that of the LSCO is kept at 1000 Å. The microstructures of interface and surface of the bilayer film have been investigated by small-angle X-ray reflection, high-resolution X-ray diffraction (XRD) using synchrotron radiation, scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The SEM images show island-like growth of the PZT layers with the particle size changing from 0.1 to 0.4 μm, while the thickness of the PZT layer increased from 500 to 9000 Å. The Full width at half maximums (FWHMs) of diffraction peak of the PZT layers are dramatically larger than that of LSCO layers, and the internal strains of the PZT layers are larger than that of LSCO films by an order. This indicated that the crystal perfection of the LSCO layers are better compared with PZT layers, and we attribute this to the different growth molds for PZT and LSCO films. However, no grand strain transition layers were found either in the PZT/LSCO or in the LSCO/PZT interfaces.