Metasurfaces made of subwavelength silicon nanopillars provide unparalleled capacity to manipulate light, and have emerged as one of the leading platforms for developing integrated photonic devices. In this study, we report on a compact, passive approach based on planar metasurface optics to generate large optical trap arrays. The unique configuration is achieved with a meta-hologram to convert a single incident laser beam into an array of individual beams, followed up with a metalens to form multiple laser foci for single rubidium atom trapping. We experimentally demonstrate two-dimensional arrays of 5 × 5 and 25 × 25 at the wavelength of 830 nm, validating the capability and scalability of our metasurface design. Beam waists ∼1.5 µm, spacings (about 15 µm), and low trap depth variations (8%) of relevance to quantum control for an atomic array are achieved in a robust and efficient fashion. The presented work highlights a compact, stable, and scalable trap array platform well-suitable for Rydberg-state mediated quantum gate operations, which will further facilitate advances in neutral atom quantum computing.
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