SiBCN ceramics derived from preceramic polymers are suitable candidates for high-temperature sensors due to their remarkable high-temperature stability and semiconducting properties. However, research into their dielectric performance together with relevant sensors is meaningful but inadequate. In this work, the correlation between dielectric properties and the structure of SiBCN ceramic is identified by studying the evolution trend of the chemical composition, microstructure, and dielectric properties with pyrolysis and environment temperature. SiBCN ceramic was prepared by powder pressing process and pyrolyzed at 1000–1400 °C. As the pyrolysis temperature increased, the dielectric constant and dielectric loss tangent of SiBCN ceramic gradually increased. Within the test temperature range of 500 °C, the dielectric loss was mainly polarization loss. In addition, SiBCN ceramic wireless passive temperature sensors were prepared to test their performance from room temperature to 500 °C. The results showed that the sensitivity increased with the test temperature, and the transmission efficiency of the sensor was closely related to the dielectric properties, indicating that SiBCN ceramic has promising application prospects in the field of high-temperature sensing with good repeatability and stability.
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