This study aims to advance gas sensor technology, particularly focusing on chemiresistive gas sensors known for their simplicity and cost-effectiveness. SU-8, an epoxy-based negative photoresist characterized by the presence of eight epoxy groups, is employed as a precursor to laser-induced graphene. Under CO2 laser irradiation, SU-8 rapidly dissociates, forming a porous graphite-like surface and transforming into reduced graphene oxide (rGO). This rGO exhibits exceptional sensitivity, detecting 20 ppb of NO2 at room temperature (25℃), representing a significant achievement for singular materials. Furthermore, the study demonstrates the scalability of rGO not only as a sensing material but also as a framework through a straightforward deposition process. The deposition of SnO2 on rGO shows remarkable selectivity and sensitivity toward NO2 gas, achieving an ultra-low limit of detection of 26.2 ppt. Subsequent Pd deposition enhances the gas sensor's selectivity for hydrogen gas, highlighting its scalability as a framework for diverse gas sensors beyond NO2. In summary, this study showcases the capability of carbonized SU-8 to detect low-concentration NO2 using a singular material. It underscores the material's potential as a versatile framework for gas sensors, demonstrating its adaptability across various gas sensing applications.
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