Microscratch test was conducted on four different diamond-like carbon (DLC) films by Vickers indenter to study the scratch resistance of films under progressive normal load linearly increasing from 5 mN to 15 N. With the increase of normal load, penetration depth, lateral force, residual and contact scratch widths increase nonlinearly; scratch hardness and lateral hardness decrease nonlinearly; scratch friction coefficient increases under small loads, and then tends to be a constant under large loads. DLC-H has the smallest scratch friction coefficient among the four films, and different targets have little effect on scratch friction coefficient. DLC-Si and DLC-Cr have almost the same scratch resistance (or penetration depth), and larger than that of DLC, whose scratch resistance is almost the same as that of DLC-H. Fracture toughness was obtained by scratch-based methodologies: the additional Si or Cr target can enhance fracture properties of DLC film-steel substrate systems, whereas C4H10 can harm fracture properties. Fracture toughness of DLC-Si (about 17 MPa·m1/2) was larger than that of DLC-Cr (about 15 MPa·m1/2) with the large values of fracture toughness obtained under penetration depth larger than film thickness attributed to substrate effect.