Front-end Readout Electronics Research Articles

Test result of the new ASD2 chips for Phase-II upgrade of the ATLAS MDT chambers at HL-LHC

For the Phase-II upgrade of the ATLAS Muon Spectrometer to High-Luminosity LHC, new front-end readout electronics for the Monitored Drift Tube chambers is required, as the old one no longer meets the demands. The first stage in the Monitored Drift Tubes readout chain is the Amplifier-Shaper-Discriminator chip. For the upgrade, the new ASD2 ASIC chip in IBM 130 nm CMOS technology has been developed. For the ATLAS experiment, 80000 ASD2 chips are produced, which have to be tested before integration in order to obtain the required 50000 well-performing chips in the end. Using a prototype tester board and pre-production ASD2 chips, the overall performance and the influence on programmable parameters is investigated. Based on these results, 1775 production chips are tested to define final optimized cut values for the automated production testing of all chips in the company.

Design and characterization of multichannel front-end electronics for detectors at HIRFL and HIAF

A multichannel front-end readout electronics (MFEE) has been designed for readout in detectors in the heavy ion facility in Lanzhou (HIRFL) and the high-intensity heavy-ion accelerator facility (HIAF). With 40 different adjustable gains, this MFEE can meet the need for most of the experiment. One MFEE can read and process the output signals of 128 channels of a detector at the same time. MFEE is based on the AD8488 chip and uses Xilinx Kintex 7 series FPGA, combined with the periphery circuits design, to complete the detector's output charge signal readout. This paper will discuss the design and performance of the MFEE.

Ingestible pH sensing device for gastrointestinal health monitoring based on thread-based electrochemical sensors.

There exists a strong correlation between the pH levels of the gastrointestinal (GI) tract and GI diseases such as inflammatory bowel disease (IBS), ulcerative colitis, and pancreatis. Existing methods for diagnosing many GI diseases predominantly rely on invasive, expensive, and time-consuming techniques such as colonoscopy and endoscopy. In this study, an autonomous ingestible smart biosensing system in a pill format with integrated pH sensors is reported. The smart sensing pills will measure the pH profile as they transit through the GI tract. The data is then downloaded from the pills after they are collected from the feces. The sensor is based on electrodeposited PANI on carbon-coated conductive threads providing high pH sensitivity. Engineering innovations allowed integration of thread-based sensors on 3D-printed pill surfaces with front-end readout electronics, memory, and microcontroller assembled on mm-size circular printed circuit boards. The entire smart sensing pill possesses an overall length of 22.1 mm and an outer diameter of 9mm. The modular biosensing system allows integration of thread-based biosensors to monitor other biomarkers in GI tract that mitigates the complex sensor fabrication process as well as overall pill assembly.

Development of multichannel readout electronics prototype system for TPC detector of CSR External-Target Experiment

We present a multichannel readout electronics prototype system developed for the Time Projection Chamber (TPC) detector of CSR External-Target Experiment (CEE). The whole system consists of two Front-End readout Electronics (FEE) boards, fiber converters, host computers and a trigger fan-out board. A single FEE board is mainly equipped with four SAMPA chips and a Field Programmable Logic Array (FPGA), processing 128 channels of signals from the TPC detector. The SAMPA chips convert the charge signals into digital signals and send them to FPGA for data processing, and then transmit the data to the host computer through a fiber converter. The control commands from the host computer software realize the control of SAMPA and monitor temperature and current. In the dynamic range of input charge from 2 fC to 100 fC, the readout electronics output amplitude linearity is better than 1%. The relative energy resolution of electronics is about 23% at a minimum input charge of 1.4 fC. The test results with TPC illustrate that with a 55Fe source, an energy resolution of 28.5% was acquired, and with cosmic rays, the track resolution on the pad plane is less than 390μm.

Studies and optimization of scintillation light measurements for the development of the 3-gamma medical imaging XEMIS2 liquid xenon Compton camera

We report the studies and optimization of scintillation light measurements in an updated version of the XEMIS1 prototype for the development of the XEMIS2 camera. A novel monolithic liquid xenon Compton camera, named XEMIS2 (XEnon Medical Imaging System), attempts to achieve low-activity small-animal imaging using the 3-gamma imaging technique. This emerging detector relies on the time projection chamber technique: it will be able to perform a simultaneous detection of the three γ -rays emitted by a specific radionuclide, such as scandium-44, and to produce a good quality image with a remarkable diminution of radiopharmaceutical activity at the same time. Vacuum Ultraviolet (VUV) scintillation light and ionization charge carriers generated from the recoiling particles within the detector are detected and used to reconstruct the interaction position and deposited energy. A cost-effective self-triggering scintillation signal read-out and data acquisition (DAQ) system has been developed to achieve a continuous data read-out with negligible electronics dead time. The DAQ prototype has been installed and qualified in an updated version of the XEMIS1 detector. It reaches the performance specifications in scintillation light measurements. Moreover, scintillation signals can also be used for the virtual segmentation of the monolithic detection volume through the matching algorithm of the scintillation and ionization signals based on the light collection map (LCM). This spatial pre-localization of the physical events, called the virtual fiducialization of the active volume, is used to lower the detector occupancy rate when the administered activity is increased to lessen the examination time. The XEMIS1 experimental LCMs indicate that each PMT owns an individual field of view so as to segment the active volume virtually. The preparation work for the XEMIS2 camera operation has been completed in the updated XEMIS1 detector while the XEMIS2 scintillation light measurement system is under commissioning in Nantes Centre Hospitalier Universitaire. • The XEMIS2 camera oriented to the whole-body small animal 3-gamma medical imaging is presented. • The XEMIS2 system is a monolithic liquid xenon Compton camera with a 24 cm axial field of view. • A dedicated cost-effective 16-channel self-triggering scintillation signal front-end read-out electronics called XSRETOT is described. • The experimental light collection maps of an updated version of the XEMIS1 detector have been built, which can be used for the virtual segmentation of the monolithic detection volume to reduce the detector occupancy rate in the context of increasing the administered activity.

Charged particle identification performance of the TOP counters in Belle II

The Time-Of-Propagation (TOP) counter is a novel ring-imaging Cherenkov detector that primarily consists of a quartz bar radiator, micro-channel plate photomultipliers and front-end readout electronics. These TOP counters are installed in the central region of the Belle II detector to provide the crucial information on the charged particle identification (PID). Here, we present an overview of PID studies in Belle II, with a focus on the performance of the TOP detector. The results presented are from the recently recorded data which show reasonable agreement with the expectations from the simulation studies.

Ingestible pH Sensing Capsule with Thread-Based Electrochemical Sensors.

Existing techniques for diagnosing gastrointestinal disorders in stomach, small and large intestines, and colon depend on biopsy, endoscopy or colonoscopy methods which are invasive, expensive and time-consuming. In fact, such methods also lack the ability to access large parts of the small intestine. In this article, we demonstrate a smart ingestible biosensing capsule that is capable of monitoring pH activity in small and large intestines. pH is a known biomarker for several gastrointestinal disorders such as inflammatory bowel disease. Functionalized threads utilized as pH sensing mechanism are integrated with front-end readout electronics and 3D-printed case. This paper demonstrates a modular sensing system design that alleviates the sensor fabrication difficulties as well as the overall assembly of the ingestible capsule.

The Timepix4 analog front-end design: Lessons learnt on fundamental limits to noise and time resolution in highly segmented hybrid pixel detectors

This manuscript describes the optimization of the front-end readout electronics for high granularity hybrid pixel detectors. The theoretical study aims at minimizing the noise and jitter. The model presented here is validated with both circuit post layout simulations and measurements on the Timepix4 Application Specific Integrated Circuit (ASIC). The analog front-end circuit and the procedure to optimize the dimensions of the main transistors are described with detail.The Timepix4 is the most recent ASIC designed in the framework of the Medipix4 Collaboration. It was manufactured in 65nm CMOS process, and consists of a four side buttable matrix of 448 × 512 pixels with 55µm pitch. The analog front-end has a gain of ∼36mV/ke- when configured in High Gain Mode, and ∼20mV/ke- when configured in Low Gain Mode. The Equivalent Noise Charge (ENC) is ∼68e-rms and ∼80e-rms in High Gain Mode and in Low Gain Mode respectively. In event driven mode the incoming hits can be time stamped within a ∼ 200ps time bin and the chip can deal with a maximum flux of ∼ 3.6MHzmm−2s−1. In photon counting mode, the chip can deal with up to ∼ 5GHzmm−2s−1.The routine designed to optimize the Timepix4 front-end is then used to analyze the performance limits in terms of jitter and noise for Charge Sensitive Amplifiers in pixel detectors.

Using scientific-grade CCDs for the direct detection of dark matter with the DAMIC-M experiment

The DAMIC-M [1] project is devoted to the exploration of the hidden sector and the search for light dark matter particles using Charge-Coupled Devices (CCDs). It follows the DAMIC at SNOLAB [2] experiment which pioneered the detection of new particles through their interaction with the nucleus or the electrons of the bulk silicon of fully depleted CCDs. A kilogram-sized target mass will be installed at the Modane underground laboratory (LSM, France) which offers an excellent low background environment for rare-event search. DAMIC-M detectors demonstrate several technological advancements including the implementation of the skipper technique, and custom front-end control and read-out electronics. Skipper CCDs can perform multiple non-destructive measurements of the pixel charge which can lead to a read-out noise of a fraction of an electron. With a 15 μm × 15 μm pixel area, 675 μm thickness and the ability of 3D reconstruction using the diffusion of the particle track, the spatial resolution of our CCDs allows for the follow-up of radioactive chains, a powerful tool to discriminate genuine particle interaction from in situ radioactive decays. Together with an extremely careful fabrication procedure that controls the contaminant and the generation of bulk radioactive contamination by cosmic ray spallation, the single electron resolution will guarantee a detection energy threshold of only a few eVs, pushing the sensitivity of DAMIC-M by at least one order of magnitude better than previous experiments. I will present the current status of DAMIC-M describing our technological challenges and the solutions we have adopted. I will introduce our method to measure and mitigate the bulk radioactive contamination and discuss the ongoing assembly of a prototype detector, the Low Background Chamber (LBC), aiming at validating our design options.

The VMM3a ASIC

The VMM3a is a custom low-noise application-specific integrated circuit. It is intended to be used in the front-end readout electronics of both the Micromegas and sTGC detectors of the ATLAS New Small Wheels upgrade project at CERN. It is fabricated in the 130-nm GlobalFoundries 8RF-DM process. The 64 channels with highly configurable parameters, although designed for a specific project, can meet the processing needs of signals from various detector types in several other applications. In this note, the VMM3a, which is the production version of the VMM family, will be presented along with the features incorporated and its performance.

Study on the radiofrequency transparency of electrically floating and ground PET inserts in a 3T clinical MRI system.

The positron emission tomography (PET) insert for a magnetic resonance imaging (MRI) system that implements the radiofrequency (RF) built-in body coil of the MRI system as a transmitter is designed to be RF-transparent, as the coil resides outside the RF-shielded PET ring. This approach reduces the design complexities (e.g., large PET ring diameter) related to implementing a transmit coil inside the PET ring. However, achieving the required field transmission into the imaging region of interest (ROI) becomes challenging because of the RF shield of the PET insert. In this study, a modularly RF-shielded PET insert is used to investigate the RF transparency considering two electrical configurations of the RF shield, namely the electrical floating and ground configurations. The purpose is to find the differences, advantages and disadvantages of these two configurations. Eight copper-shielded PET detector modules (intermodular gap: 3mm) were oriented cylindrically with an inner diameter of 234mm. Each PET module included four-layer Lutetium-yttrium oxyorthosilicate scintillation crystal blocks and front-end readout electronics. RF-shielded twisted-pair cables were used to connect the front-end electronics with the power sources and PET data acquisition systems located outside the MRI room. In the ground configuration, both the detector and cable shields were connected to the RF ground of the MRI system. In the floating configuration, only the RF shields of the PET modules were isolated from the RF ground. Experiments were conducted using two cylindrical homogeneous phantoms in a 3T clinical MRI system, in which the built-in body RF coil (a cylindrical volume coil of diameter 700mm and length 540mm) was implemented as a transceiver. For both PET configurations, the RF and MR imaging performances were lower than those for the MRI-only case, and the MRI system provided specific absorption ratio (SAR) values that were almost double. The RF homogeneity and field strength, and the signal-to-noise ratio (SNR) of the MR images were mostly higher for the floating PET configuration than they were for the ground PET configuration. However, for a shorter axial field-of-view (FOV) of 125mm, both configurations offered almost the same performance with high RF homogeneities (e.g., 76±10%). Moreover, for both PET configurations, 56±6% larger RF pulse amplitudes were required for MR imaging purposes. The increased power is mostly absorbed in the conductive shields in the form of shielding RF eddy currents; as a result, the SAR values only in the phantoms were estimated to be close to the MRI-only values. The floating PET configuration showed higher RF transparency under all experimental setups. For a relatively short axial FOV of 125mm, the ground configuration also performed well which indicated that an RF-penetrable PET insert with the conventional design (e.g., the ground configuration) might also become possible. However, some design modifications (e.g., a wider intermodular gap and using the RF receiver coil inside the PET insert) should improve the RF performance to the level of the MRI-only case.

Silicon 3D Microdosimeters for Advanced Quality Assurance in Particle Therapy

The Centre for Medical Radiation Physics introduced the concept of Silicon On Insulator (SOI) microdosimeters with 3-Dimensional (3D) cylindrical sensitive volumes (SVs) mimicking the dimensions of cells in an array. Several designs of high-definition 3D SVs fabricated using 3D MEMS technology were implemented. 3D SVs were fabricated in different sizes and configurations with diameters between 18 and 30 µm, thicknesses of 2–50 µm and at a pitch of 50 µm in matrices with volumes of 20 × 20 and 50 × 50. SVs were segmented into sub-arrays to reduce capacitance and avoid pile up in high-dose rate pencil beam scanning applications. Detailed TCAD simulations and charge collection studies in individual SVs have been performed. The microdosimetry probe (MicroPlus) is composed of the silicon microdosimeter and low-noise front–end readout electronics housed in a PMMA waterproof sheath that allows measurements of lineal energies as low as 0.4 keV/µm in water or PMMA. Microdosimetric quantities measured with SOI microdosimeters and the MicroPlus probe were used to evaluate the relative biological effectiveness (RBE) of heavy ions and protons delivered by pencil-beam scanning and passive scattering systems in different particle therapy centres. The 3D detectors and MicroPlus probe developed for microdosimetry have the potential to provide confidence in the delivery of RBE optimized particle therapy when introduced into routine clinical practice.

A Diamond-Based Dose-per-Pulse X-ray Detector for Radiation Therapy

One of the goals of modern dynamic radiotherapy treatments is to deliver high-dose values in the shortest irradiation time possible. In such a context, fast X-ray detectors and reliable front-end readout electronics for beam diagnostics are crucial to meet the necessary quality assurance requirements of care plans. This work describes a diamond-based detection system able to acquire and process the dose delivered by every single pulse sourced by a linear accelerator (LINAC) generating 6-MV X-ray beams. The proposed system is able to measure the intensity of X-ray pulses in a limited integration period around each pulse, thus reducing the inaccuracy induced by unnecessarily long acquisition times. Detector sensitivity under 6-MV X-photons in the 0.1–10 Gy dose range was measured to be 302.2 nC/Gy at a bias voltage of 10 V. Pulse-by-pulse measurements returned a charge-per-pulse value of 84.68 pC, in excellent agreement with the value estimated (but not directly measured) with a commercial electrometer operating in a continuous integration mode. Significantly, by intrinsically holding the acquired signal, the proposed system enables signal processing even in the millisecond period between two consecutive pulses, thus allowing for effective real-time dose-per-pulse monitoring.

A multi-functional front end readout electronics system for PET detector application

A compact, 96-ch, multi-functional and practical front-end readout electronics system for a SiPM based PET detector is developed. This electronics system is based on the latest Sigma Delta Modulation (SDM) circuit, which implements a charge-to-digital conversion (QDC) that keeps energy, timing information. In order to achieve a compact size, the system has a stacked structure including two kinds of boards, analog board and digital board. The analog board is responsible for charge integration of SDM while the digital board is for discharging feedback of the SDM circuit. Also, the digital board is applied for energy calculation, timing pickoff and data buffering and transferring. In comparison to the initial version of the SDM QDC, the input signal polarity on the electronics system is improved from negative only to both positive and negative polarities so that it can process both SiPM anode and cathode signals. Several SiPM based PET detectors are applied to validate the capability of dual polarity readout and multi-functionality. Overall, the prototype electronics system demonstrated its good performance for PET application.

Behavioral Model of Silicon Photo-Multipliers Suitable for Transistor-Level Circuit Simulation

Silicon Photomultipliers (SiPMs) are photo-electronic devices able to detect single photons and permit the measurement of weak optical signals. Single-photon detection is accomplished through high-performance read-out front-end electronics whose design needs accurate modeling of the photomultiplier device. In the past, a useful model was developed, but it is limited to the device electrical characteristic and its parameter extraction procedure requires several measurement steps. A new silicon photomultiplier model is proposed in this paper. It exploits the Verilog-a behavioral language and is appropriate to transistor-level circuit simulations. The photon detection of a single cell is modeled using the traditional electrical model. A statistical model is included to describe the silicon photomultiplier noise caused by dark-count or after-pulsing effects. The paper also includes a procedure for the extraction of the model parameters through measurements. The Verilog-a model and the extraction procedure are validated by comparing simulations to experimental results.

Characterization and QC practice of 16-channel ADC ASIC at cryogenic temperature for Liquid Argon TPC front-end readout electronics system in DUNE experiment

ColdADC is a low-noise 16-channel analog-to-digital converter ASIC designed for cold readout electronics of Liquid Argon Time Projection Chambers (LArTPCs) in the Deep Underground Neutrino Experiment (DUNE). ColdADC was specifically designed for operation at cryogenic temperatures (77 K–89 K). Cold electronics is considered to be an enabling technology for liquid argon detectors in neutrino experiments. The main function of the chip is to digitize signals from the 16-channel charge-sensitive amplifier designed at BNL (LArASIC) and send digitized signals to the data aggregator and serializer chip (COLDATA). ColdADC operates with a resolution of 12 bits and a sampling rate of 2 MS/s per channel. A complete characterization of prototype chips was conducted at cryogenic temperature, involving power consumption, noise and linearity performance. In the first DUNE Far-Detector module, 384000 data channels will be read out, corresponding to 24000 ColdADC chips. Therefore, systematic testing of ColdADC chips at cryogenic temperature is vital for the quality and reliability of DUNE Single-Phase modules. We have developed a Quality Control (QC) test stand that includes ColdADC evaluation and characterization at cryogenic temperature. The QC procedure was applied to a first batch of 33 chips, corresponding to 528 data channels. The obtained results meet all the required DUNE specifications for ColdADC. Moreover, the testing outcome allowed us to identify possibilities of performance optimization that are currently being addressed in the design of the next version of the chip. The Quality Control procedure is proved to be successful and will be a reference design for future large-batch production testing of final ColdADC ASICs.

The Ariel Instrument Control Unit

Ariel, the Atmospheric Remote-sensing Infrared Exoplanet Large-survey mission (Tinetti 2019; Puig et al. 2018; Pascale et al. 2018), has been selected in March 2018 by ESA for the fourth medium-class mission (M4) launch opportunity of the Cosmic Vision Program, with an expected lift off in late 2028. It is the first mission dedicated to measuring the chemical composition and thermal structures of the atmospheres of hundreds of transiting exoplanets, enabling planetary science far beyond the boundaries of our own Solar System. Its Payload (P/L) (Eccleston and Tinetti 2018; Eccleston et al. 2017; Middleton et al. 2019), has been designed to perform transit spectroscopy from space during primary and secondary planetary eclipses in order to achieve a large unbiased survey concerning the nature of exoplanets atmospheres and their interiors, to determine the key factors affecting the formation and evolution of planetary systems (Tinetti et al. 2017, 2018). Ariel will observe hundreds of warm and hot transiting gas giants, Neptunes and super-Earths around a wide range of host star types, targeting planets hotter than $\sim $ 600 K to take advantage of their well-mixed atmospheres. It will exploit primary and secondary transit spectroscopy in the 1.10 to 7.80 μm spectral range and broad-band photometry in the optical (0.50 - 0.80 μm) and Near IR (0.80 - 1.10 μm) . One of the two instruments of the Ariel Payload is the Fine Guidance System (FGS), including three photometric channels (two used for guiding as well as science) between 0.5-1.1 μm plus a low resolution NIR spectrometer for 1.1-1.95 μm range. Along with FGS an IR Spectrometer (AIRS) (Amiaux et al. 2017) is foreseen, providing low-resolution spectroscopy in two IR channels: Channel 0 (CH0) for the 1.95 − 3.90 μm band and Channel 1 (CH1) for the 3.90 − 7.80 μm range. Finally, an Active Cooler System (ACS) including a Ne Joule-Thomson cooler is adopted to provide active cooling capability to the AIRS detectors working at cryogenic temperatures. AIRS is located at the intermediate focal plane of the telescope and common optical system and it hosts two HgCdTe-based hybrid IR detectors and two cold front-end electronics (CFEE) for detectors control and readout. Each CFEE is driven by a Detector Control Unit (DCU) part of AIRS but hosted within and managed by the Instrument Control Unit (ICU) of the Payload (Focardi et al. 2018). ICU is a warm unit residing into the S/C Service Module (SVM) and it is based on a cold redundant configuration involving the Power Supply Unit (PSU) and the Commanding and Data Processing Unit (CDPU) boards; both DCUs are instead cross-strapped and can be managed by the nominal or the redundant (PSU+CDPU) chain. ICU is in charge of AIRS management, collecting scientific and housekeeping (HK) telemetries from the spectrometer and HK from the telescope (temperatures readings), the P/L Optical Bench (OB) and other Subsystems (SS), thanks to a warm slave unit (TCU, Telescope Control Unit) interfaced to the ICU. Science and HK telemetries are then forwarded to the S/C, for temporary storage, before sending them to Ground. Here we describe the status of the ICU design at the end of B1 Phase, prior to the Mission Adoption Review (MAR) by ESA, with some still open architectural choices to be addressed and finalised once selected the ICU industrial Prime contractor.

Silicon strip defects and their impact on electrical performance of readout electronics

In preparation for the High Luminosity LHC (HL-LHC) runs, the ATLAS inner detector will be completely replaced with an all silicon Inner Tracker (ITk). Hybrid silicon pixel modules will be used for the innermost tracking layers, and silicon micro-strip detectors will be used the outer layers of the tracker. During the production of the detector, the sensors, readout electronics, and other components will undergo a series of quality control (QC) and quality assurance tests. Defects in the fabrication of the sensors will be flagged early in the manufacturer's and ATLAS QC tests. A study of the influence of sensor defects was performed to assess the characteristics of these defects in completed modules, and whether any defect posed a risk to the operation of the front-end readout electronics. All defects were found to have no impact on the performance of the front-end readout electronics for healthy amplifier channels, and defects that short the coupling between the strip implant and the metal readout electrode were only noticeable for strip leakage currents in excess of 250 nA, beyond the end-of-life currents expected for most sensors at the HL-LHC.

Температурная зависимость чувствительности кремниевых фотоумножителей в режиме пофотонной регистрации ультрафиолетового излучения

In the context of the development of a new detecting camera for the Cherenkov gamma-ray telescope TAIGA-IACT, the temperature dependences of the dark count rate and the efficiency of ultraviolet photon detection of two silicon avalanche photodetectors: OnSemi / SensL MicroFJ-60035 and Hamamatsu VUV4 S13371-6050CQ-02 at a wavelength of 277 nm were experimentally investigated. It is shown that the main characteristics of these detectors correspond to those declared by the manufacturers. Front-end readout electronics was developed and tested. Conclusions are drawn about the applicability of such detectors in the detecting cameras of Cherenkov gamma-ray telescopes.

Toward a Self-Sensing Piezoresistive Pressure Sensor for All-SiC Monolithic Integration

This work focusses on the design and fabrication of surface micromachined pressure sensors, designed in a modular way for the integration with analog front-end read-out electronics. Polycrystalline 3C silicon carbide (SiC) was used to fabricate free-standing high topography cavities exploiting surface micromaching. The poly-SiC was in-situ doped and the membrane itself is used as piezoresistive element, thereby forming a so-called self-sensing membrane, easing fabrication. After sacrificial release, the cavity is sealed by conformal deposition of poly-SiC whereby the reference pressure of the absolute pressure sensor is determined. Aluminum and titanium metallizations were used and ohmic contacts were confirmed by wafer-scale measurements. Measurements were carried out on different devices ranging from 100 kPa down to 10 Pa at room temperature. The Wheatstone bridge yields a logarithmic response of 1.1 mVbar $^{-}1\text{V}^{-}1$ . A square 300 $\mu \text{m}$ device exhibits a logarithmic impedance behavior yielding a response of $\Delta {R} / {R}$ of $1.6\times 10^{-3}$ bar $^{-1}$ . The realized pressure devices are a first step toward a SiC ASIC + MEMS platform for intended operation in harsh environments, such as industrial process monitoring, combustion control or structural health monitoring. The future outlook of the integration concept implies extended functionality by front-end transducer read-out, signal amplification and communication.