AbstractThe strongly increasing demand for nano‐ and microelectronics calls for new and environmentally benign reaction pathways for the preparation of one of the most important substrates in the production of semiconductor materials: Si2Cl6. We present a comprehensive study of the opportunities and challenges for the selective electrochemical formation of higher halo‐functionalized silanes to Si2Cl6 achieved by cyclic voltammetry measurements and electrochemical synthesis. Cathodic dehalo‐dimerization reaction of SiCl4 and the approach to halogen exchange for better substrate reduction are envisioned. An anodic halide‐free dimerization pathway by dehydrogenation of HSiCl3 is investigated, including Lewis acid activation of the Si−H bond. In addition, tertiary amine‐driven, Benkeser‐like in‐situ formation of a SiCl3− anion was tested as well. The target molecule Si2Cl6 is strongly promoted to direct electro‐conversions making the anodic and cathodic electrosynthesis very challenging.