ITER’s enhanced heat flux (EHF) first wall (FW) provides thermal shielding to the other components behind it and limits its plasma boundary, consequently bearing high surface heat loads up to 4.7 MW m−2. China developed the EHF FW technologies in steady stages by making small mock-ups, semi-prototypes and a full-scale prototype (FSP), working toward series production at the Southwestern Institute of Physics. All the key technologies for bimetallic diffusion bonding, welding and assembly have been fully qualified. The Be armor tile size effects on thermal-fatigue performance have been evaluated using a pulsed high heat flux test with an EMS-400 electron beam facility. It was found that both the Be/CuCrZr bonding and its thermal-fatigue life are highly dependent on the tile size, and 12 × 12 mm2 Be tiles are acceptable for the required performance, either as individual tiles or in castellation by cutting larger ones. Small-scale mock-ups with such Be tiles survived 16 000 thermal cycles at 4.7 MW m−2, while EHF FW fingers with 16 × 16 mm2 Be tiles demonstrated unstable performance. In contrast, only BE tiles larger than 24 × 12 mm2 showed reliable diffusion bonding with the CuCrZr heat sink by hot isostatic pressing and consequently should be castellated into smaller ones. The manufacturing of the FSP finger goes through complex thermal cycles, using CuCrZr alloys in age-strengthening plus cold-rolling states, enabling it to maintain its tensile strength to the level of 285 MPa and its mean grain size less than 100 µm. The pipe welding for finger pairing and its assembly with the central beam are demonstrated, including enabling welding to be carried out twice for repair in a narrow space. The FSP showed good finger alignment, dimensional control and reliable vacuum tightness without any blockage of cooling channels.