In this study, we use the Haacke’s figure of Merit (FOMH) as a valuable parameter for determining suitable Indium Sulphide thin films among a set of samples processed with different deposition parameters, in order to use them as window layers in the usual configuration of photovoltaic devices. Two sets of In2S3 thin films were deposited by radiofrequency (RF) magnetron sputtering technique with an average thickness around 90 nm and using different deposition parameters. One set of samples was processed using different RF power in the range of 75–250 W at room temperature, the second set was obtained using different substrate temperatures 24 °C–350 °C keeping a constant RF power at 75 W. The FOMH consider optical and electrical properties of In2S3 thin films in order to evaluate the feasibility of the thin film to be used as a window layer in photovoltaics devices. The In2S3 thin films processed by RF-Sputtering were analyzed by scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), Ultraviolet-Visible spectroscopy, Raman spectroscopy, x-ray diffraction (XRD) and four-probe method. The In2S3 thin films had a high optical transmittance of 84% and the energy band gap values of the films decreased from 2.48 to 2.38 with the increase in substrate temperature and deposition power. The estimated grain size decreasing from 65 to 45 nm as the RF power increased. Additionally, the crystallinity of the selected In2S3 thin films was analyzed by Raman and XRD and showing that the cubic and tetragonal β-In2S3 phases can coexist in the films. The In2S3 thin films showed resistivity vales around Higher values of FOMH were obtained for In2S3 thin films processed at 75 W, 250 W, 100 °C and 300 °C, therefore these layer are feasible candidates to be used as window layers in photovoltaic devices.
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