Event Abstract Back to Event A novel multisite silicon probe fabricated by using an economical wet etching process for high quality laminar neural recordings László Grand1, 2*, Anita Pongrácz3, Éva Vázsonyi3, Gergely Márton3, Dorottya Gubán3, Gábor Battistig3, György Karmos1, 2 and István Ulbert1, 2 1 Institute for Psychology of the Hungarian Academy of Sciences, Hungary 2 Pázmány Péter Catholic University, Faculty of Information Technology, Hungary 3 Research Institute for Technical Physics and Materials Science, Hungary For the construction of multiple site silicon based neural interface a novel process has been carried out. The applied economical wet etching method for the formation of the body of the probe ensures a wide variety of thickness and length dimensions for this neural interface. The probe contains 24 evenly spaced (100μm) recording sites, with shaft dimensions of: 280μm wide, 80μm thickness and 12mm length. It can easily penetrate both the dura and pia mater and exhibit excellent performance in Local Field Potential (LFP), Multiunit (MUA) and Single Unit Activity (SUA) recordings. In addition, the used special wet etching process form rounded edges while keeping the tip of the probe sharp, which makes it minimally invasive. Standard 3 inch diameter, <100> oriented, p-type Si wafer with 200μm thickness, polished on both sides was used for the probe fabrication that proceeded in several technological steps. The initial phase consisted of various thin-film depositions to form the bottom insulating layers, the Pt electrode contacts and leads, the passivation layer, the contact holes and bonding pads. The subsequent two phases consisted of different types of wet chemical etching processes for the probe shaping in order to obtain sharp tip with rounded edge. The final phase of the probe fabrication process series is the removal of protecting and masking layers and packaging of the probe. The probe was implanted into the caudate putamen nucleus of a ketamine/xylazine anesthetized rat. We recorded wide bandwidth neural data, good quality MUA was apparent on several channels, some of the sites that located closest to tip, recorded clearly distinguishable SUA as well. LFP recordings were also of satisfactory quality. Here we have reported on the production technology and electrophysiology results of the first working, purely Hungarian origin silicone probe prototype. Our preliminary results are encouraging for the further technological refinement and experimental utilization. Conference: IBRO International Workshop 2010, Pécs, Hungary, 21 Jan - 23 Jan, 2010. Presentation Type: Poster Presentation Topic: Abstracts Citation: Grand L, Pongrácz A, Vázsonyi É, Márton G, Gubán D, Battistig G, Karmos G and Ulbert I (2010). A novel multisite silicon probe fabricated by using an economical wet etching process for high quality laminar neural recordings. Front. Neurosci. Conference Abstract: IBRO International Workshop 2010. doi: 10.3389/conf.fnins.2010.10.00231 Copyright: The abstracts in this collection have not been subject to any Frontiers peer review or checks, and are not endorsed by Frontiers. They are made available through the Frontiers publishing platform as a service to conference organizers and presenters. The copyright in the individual abstracts is owned by the author of each abstract or his/her employer unless otherwise stated. Each abstract, as well as the collection of abstracts, are published under a Creative Commons CC-BY 4.0 (attribution) licence (https://creativecommons.org/licenses/by/4.0/) and may thus be reproduced, translated, adapted and be the subject of derivative works provided the authors and Frontiers are attributed. For Frontiers’ terms and conditions please see https://www.frontiersin.org/legal/terms-and-conditions. Received: 04 May 2010; Published Online: 04 May 2010. * Correspondence: László Grand, Institute for Psychology of the Hungarian Academy of Sciences, Budapest, Hungary, grand@cogpsyphy.hu Login Required This action requires you to be registered with Frontiers and logged in. To register or login click here. Abstract Info Abstract The Authors in Frontiers László Grand Anita Pongrácz Éva Vázsonyi Gergely Márton Dorottya Gubán Gábor Battistig György Karmos István Ulbert Google László Grand Anita Pongrácz Éva Vázsonyi Gergely Márton Dorottya Gubán Gábor Battistig György Karmos István Ulbert Google Scholar László Grand Anita Pongrácz Éva Vázsonyi Gergely Márton Dorottya Gubán Gábor Battistig György Karmos István Ulbert PubMed László Grand Anita Pongrácz Éva Vázsonyi Gergely Márton Dorottya Gubán Gábor Battistig György Karmos István Ulbert Related Article in Frontiers Google Scholar PubMed Abstract Close Back to top Javascript is disabled. Please enable Javascript in your browser settings in order to see all the content on this page.