Precise Control Of Stoichiometry Research Articles

Engineering polar distortions in multiferroic Sr1−xBaxMnO3−δ thin films

The physical properties of perovskite oxide thin films are governed by the subtle interplay between chemical composition and crystal symmetry variations, which can be altered by epitaxial growth. In the case of perovskite-type multiferroic thin films, precise control of stoichiometry and epitaxial strain allows for gaining control over the ferroic properties through selective crystal distortions. Here, we demonstrate the chemical tailoring of the polar atomic displacements by tuning the stoichiometry of multiferroic Sr1−xBaxMnO3−δ (0 ≤ x ≤ 0.5) epitaxial thin films. A combination of x-ray diffraction and aberration-corrected scanning transmission electron microscopy enables unraveling the local polarization orientation at the nanoscale as a function of the film’s composition and induced crystalline structure. We demonstrate experimentally that the orientation of polarization is intimately linked to the Ba doping and O stoichiometry of the films and, with the biaxial strain induced by the substrate, it can be tuned either in-plane or out-of-plane with respect to the substrate by the appropriate choice of the post-growth annealing temperature and O2 atmosphere. This chemistry-mediated engineering of the polarization orientation of oxide thin films opens new venues for the design of functional multiferroic architectures and the exploration of novel physics and applications of ferroelectric textures with exotic topological properties.

Stoichiometric growth of SrTiO3 films via Bayesian optimization with adaptive prior mean

Perovskite insulator SrTiO3 (STO) is expected to be applied to the next generation of electronic and photonic devices as high-k capacitors and photocatalysts. However, reproducible growth of highly insulating stoichiometric (STO) films remains challenging due to the difficulty of precise stoichiometry control in perovskite oxide films. Here, to grow stoichiometric (STO) thin films by fine-tuning multiple growth conditions, we developed a new Bayesian optimization (BO)-based machine learning method that encourages exploration of the search space by varying the prior mean to get out of suboptimal growth condition parameters. Using simulated data, we demonstrate the efficacy of the new BO method, which reproducibly reaches the global best conditions. With the BO method implemented in machine-learning-assisted molecular beam epitaxy (ML-MBE), a highly insulating stoichiometric (STO) film with no absorption in the bandgap was developed in only 44 MBE growth runs. The proposed algorithm provides an efficient experimental design platform that is not as dependent on the experience of individual researchers and will accelerate not only oxide electronics but also various material syntheses.

Precrystallized‐Heterojunction Strategy on Precursor Solution Enables High‐Performance Semitransparent Perovskite Solar Cells

AbstractFor semitransparent perovskite solar cells (ST‐PSCs), decreasing the thickness of perovskite film is one of the most feasible approaches to increase the average photopic transmittance (APT). However, ultrathin perovskite film always suffers poor crystalline quality with pinhole and uniformity. Here, a precrystallized‐heterojunction strategy (PHS) is developed to fabricate high‐quality heterostructured perovskite films based on the mixture solution of 2D (3‐TMA)2PbCl4 (3‐TMA = 3‐thiophenemethylammonium) and 3D formamidinium‐cesium‐alloyed crystals. In the PHS, the 3D crystals with precise stoichiometry control ensure reproducibility, while the 2D crystals act as nuclei for the templated growth of large‐grain 3D perovskite with reduced defects. As a result, this strategy with excellent thickness‐independent tunability enables the champion opaque devices and ST‐PSCs to achieve a power conversion efficiency of 22.7% and 14.1% (APT of 22.1%), respectively. This deep understanding of precursor materials opens new vistas to regulate nucleation/crystallization kinetics precisely for boosting the commercial feasibility of ST‐PSC applications.

Post-annealing optimization of the heteroepitaxial La-doped SrSnO3 integrated on silicon via ALD.

Wide band gap (WBG) alkaline-earth stannate transparent oxide semiconductors (TOSs) have attracted increasing attention in recent years for their high carrier mobility and outstanding optoelectronic properties, and have been applied widely in various devices, such as flat-panel displays. Most alkaline-earth stannates are grown by molecular beam epitaxy (MBE); there are some intractable issues with the tin source including the volatility with SnO and Sn sources and the decomposition of the SnO2 source. In contrast, atomic layer deposition (ALD) serves as an ideal technique for the growth of complex stannate perovskites with precise stoichiometry control and tunable thickness at the atomic scale. Herein, we report the La-SrSnO3/BaTiO3 perovskite heterostructure heterogeneously integrated on Si (001), which uses ALD-grown La-doped SrSnO3 (LSSO) as a channel material and MBE-grown BaTiO3 (BTO) as a dielectric material. The reflective high-energy electron diffraction and X-ray diffraction results indicate the crystallinity of each epitaxial layer with a full width at half maximum (FWHM) of 0.62°. In situ X-ray photoelectron spectroscopy results confirm that there was no Sn0 state in ALD-deposited LSSO. Besides, we report a strategy for the post-treatment of LSSO/BTO perovskite heterostructures by controlling the oxygen annealing temperature and time, with a maximum oxide capacitance Cox of 0.31 μF cm-2 and a minimum low-frequency dispersion for the devices with 7 h oxygen annealing at 400 °C. The enhancement of capacitance properties is primarily attributed to a decrease of oxygen vacancies in the films and interface defects in the heterostructure interfaces during an additional ex situ excess oxygen annealing. This work expands current optimization methods for reducing defects in epitaxial LSSO/BTO perovskite heterostructures and shows that excess oxygen annealing is a powerful tool for enhancing the capacitance properties of LSSO/BTO heterostructures.

NiFe]-(Oxy)Sulfides Derived from NiFe2O4 for the Alkaline Hydrogen Evolution Reaction

The development of noble-metal-free electrocatalysts is regarded as a key factor for realizing industrial-scale hydrogen production powered by renewable energy sources. Inspired by nature, which uses Fe- and Ni-containing enzymes for efficient hydrogen generation, Fe/Ni-containing chalcogenides, such as oxides and sulfides, received increasing attention as promising electrocatalysts to produce hydrogen. We herein present a novel synthetic procedure for mixed Fe/Ni (oxy)sulfide materials by the controlled (partial) sulfidation of NiFe2O4 (NFO) nanoparticles in H2S-containing atmospheres. The variation in H2S concentration and the temperature allows for a precise control of stoichiometry and phase composition. The obtained sulfidized materials (NFS) catalyze the hydrogen evolution reaction (HER) with increased activity in comparison to NFO, up to −10 and −100 mA cm−2 at an overpotential of approx. 250 and 450 mV, respectively.

Nanocontact vortex oscillators based on Co2MnGe pseudo spin valves

We present an experimental study of vortex dynamics in magnetic nanocontacts based on pseudo spin valves comprising the Co$_2$MnGe Heusler compound. The films were grown by molecular beam epitaxy, where precise stoichiometry control and tailored stacking order allowed us to define the bottom ferromagnetic layer as the reference layer, with minimal coupling between the free and reference layers. 20-nm diameter nanocontacts were fabricated using a nano-indentation technique, leading to self-sustained gyration of the vortex generated by spin-transfer torques above a certain current threshold. By combining frequency- and time-domain measurements, we show that different types of spin-transfer induced dynamics related to different modes associated to the magnetic vortex configuration can be observed, such as mode hopping, mode coexistence and mode extinction appear in addition to the usual gyration mode.

Polarization control of epitaxial barium titanate (BaTiO3) grown by pulsed-laser deposition on a MBE-SrTiO3/Si(001) pseudo-substrate

Barium titanate (BaTiO3 or BTO) is a perovskite structure material with interesting intrinsic properties, such as spontaneous ferroelectricity or electro-optical behavior, which strongly depend on thin film crystallinity. For such functional oxide systems, the pulsed-laser deposition (PLD) approach is one promising growth technique due to its precise stoichiometry control of the metals composing the perovskite crystal and higher oxygen environment compared to the classically used molecular beam epitaxy (MBE) approach. In this article, we demonstrate a BTO epitaxial layer by PLD onto an Si(001) substrate thanks to a thin pseudomorphic SrTiO3 buffer layer grown by MBE. In our study, the various investigated PLD parameters show strong impacts on the BTO polarization orientation. Hence, adjusting the growth conditions allows control of the polarization orientation, which is crucial for both electronic and optical applications. In addition, lattice parameter changes of BTO layers are investigated using x-ray diffraction and cross-sectional transmission electron microscopy, which evidenced a correlation between mismatch relaxation and oxygen growth pressure. Finally, with the analysis of BTO C–V curves, the polarization direction transition is demonstrated electrically.

Fabrication of pulsed laser deposited Ge doped CZTSSe thin film based solar cells: Influence of selenization treatment

In the present work, Ge doped CZTGeS thin films are pulsed laser deposited followed by annealing treatment in selenium environment. The influence of selenization condition on the structural, morphological, optical and electrical properties of the absorber thin films are investigated. The thin films characterized using X-ray diffraction (XRD) and Raman spectroscopy techniques confirm the formation of Kesterite CZTGeSSe thin film compound with dominant A1 mode vibration. The morphological and optical studies of the thin films reveal the formation of compact and void free microstructure with optimal band gap in the range of 1–1.2eV. The impact of selenization temperature on the quality of thin films has been studied and thin film solar cells are fabricated with CZTGeSSe absorbers grown at various annealing temperatures from 525 to 575℃ to evaluate the performance of devices as a function of an annealing temperature. The elemental Ge and Sn losses from the absorber compound confirmed from X-ray fluorescence spectroscopy (XRF) depended on the annealing temperature and linearly increased with increasing temperature affecting the optical, compositional and microstructural properties of the thin films. Compositional non uniformity is one of the factors that limit the performance of solar cell device. PLD technique due to its advantage of achieving precise stoichiometry control combined with optimized selenization conditions can potentially address the issue. Compared to solar cell fabricated from absorber compound annealed at 525 and 575℃, the solar cell fabricated from the absorber annealed at 550℃ exhibited the best conversion efficiency of 3.82% with Voc 434mV, Jsc 18.33mA/cm2, FF 47.0% and retained nearly 90% power conversion efficiency (PCE) stability after time period of 60 days.

Unleashing Strain Induced Ferroelectricity in Complex Oxide Thin Films via Precise Stoichiometry Control

Strain tuning has emerged as a powerful means to enhance properties and to induce otherwise unattainable phenomena in complex oxide films. However, by employing strain alone, the predicted properties sometimes fail to emerge. In this work, the critical role of precise stoichiometry control for realizing strain‐induced ferroelectricity in CaTiO3 films is demonstrated. An adsorption controlled growth window is discovered for CaTiO3 films grown by hybrid molecular beam epitaxy, which ensures an excellent control over the Ti:Ca atomic percent ratio of <0.8% in the films. Superior ferroelectric and dielectric properties are found for films grown inside the stoichiometric growth window, yielding maximum polarization, dielectric constant, and paraelectric‐to‐ferroelectric transition temperatures. Outside this growth window, properties are severely deteriorated and ultimately suppressed by defects in the films. This study exemplifies the important role of precise compositional control for achieving strain‐induced properties. Untangling the effects of strain and stoichiometry on functional properties will accelerate both fundamental discoveries yet to be made in the vast materials design space of strained complex oxide films, as well as utilization of strain‐stabilized phenomena in future devices.

Synthesis of photo-crosslinkable hyaluronan with tailored degree of substitution suitable for production of water resistant nanofibers

In this work, hyaluronan (HA) was grafted by a novel and an efficient mixed anhydrides methodology with (hetero)-aryl and aliphatic acrylic moieties suitable for cross-linking. A precise control of stoichiometry was achieved. Derivatives with degree of substitution (DS) below 20% did not show self-crosslinking. Due to mild reaction conditions, a negligible degradation of the polysaccharide was obtained. The influence of the feed components on the reaction efficiency and DS were studied up to 200g/batch. The structure of the modified HA was characterized by Infrared Spectroscopy, Nuclear Magnetic Resonance, SEC-MALS and chromatographic analyses. Enzymatic degradation of derivatives was performed and isolated dimers demonstrated to be non-cytotoxic. The feasibility of the grafted HA for electrospinning with subsequent photo-crosslinking to avoid nanofibers water dissolution was demonstrated. The biocompatibility of the material, its degradation products, and the formation of honeycomb porous structures also proved the potential of the material for future in vivo applications.

Ligand Fingerprinting in the Membrane Dynamics of Single TrkA and P75NTR Neurotrophin Receptors

We have sought to investigate the responses of Nerve Growth Factor (NGF) receptors TrkA and P75NTR at the plasma membrane of living neuronal cells by single-molecule imaging and tracking. To this purpose we exploit the acyl carrier peptide and some of its shortened versions (A1 and S6 tags, labeled selectively by two different PPTases) to tag human p75NTR and TrkA. These tags were covalently conjugated to the biotin- or fluorophore-substituted arm of a coenzyme A (CoA) substrate.This approach allows: (i) a precise control of stoichiometry and site of biotin conjugation; (ii) versatility of the tags used; (iii) studying two interacting molecules with orthogonal fluorolabels, at the single-molecule or single-interaction-complex level. This experimental toolbox is completed by fast microscopy (e.g. TIRF microscopy with a fast EM-CCD), and by a semi-automatic algorithm for the analysis of the trajectories. This novel algorithm separates self-similar from multimodal trajectories, divides the last ones in subtrajectories, and calculates the combined distributions of parameters measuring the diffusivity, the localization or driftness degree, and/or the number of molecules in tracked spots.We shall present results on the early response of TrkA upon binding different biologically-relevant ligands (including NGF and proNGF): without ligands, TrkA is present mostly as fast-diffusing monomers; ligand binding results in an increasing number of dimers and oligomers, which are typically slower and/or more confined. Each ligand promotes distinct trajectory patterns at the cell membrane, because of different receptor-binding affinities, intracellular effectors recruited and formation of signalling/recycling endosome precursors.We believe that this imaging toolbox and our results pave the way to the quantitative description of the kinetics, dynamics and stoichiometry of any binary or ternary molecular complex formed upon binding of proNGF or NGF to their receptors.

Site-specific labeling of neurotrophins and their receptors via short and versatile peptide tags.

We present a toolbox for the study of molecular interactions occurring between NGF and its receptors. By means of a suitable insertional mutagenesis method we show the insertion of an 8 amino acid tag (A4) into the sequence of NGF and of 12 amino acid tags (A1 and S6) into the sequence of TrkA and P75NTR NGF-receptors. These tags are shortened versions of the acyl and peptidyl carrier proteins; they are here covalently conjugated to the biotin-substituted arm of a coenzyme A (coA) substrate by phosphopantetheinyl transferase enzymes (PPTases). We demonstrate site-specific biotinylation of the purified recombinant tagged neurotrophin, in both the immature proNGF and mature NGF forms. The resulting tagged NGF is fully functional: it can signal and promote PC12 cells differentiation similarly to recombinant wild-type NGF. Furthermore, we show that the insertion of A1 and S6 tags into human TrkA and P75NTR sequences leads to the site-specific biotinylation of these receptors at the cell surface of living cells. Crucially, the two tags are labeled selectively by two different PPTases: this is exploited to reach orthogonal fluorolabeling of the two receptors co-expressed at low density in living cells. We describe the protocols to obtain the enzymatic, site-specific biotinylation of neurotrophins and their receptors as an alternative to their chemical, nonspecific biotinylation. The present strategy has three main advantages: i) it yields precise control of stoichiometry and site of biotin conjugation; ii) the tags used can be functionalized with virtually any small probe that can be carried by coA substrates, besides (and in addition to) biotin; iii) above all it makes possible to image and track interacting molecules at the single-molecule level in living systems.

Solid-phase bioconjugation of heterobifunctional adaptors for versatile assembly of bispecific targeting ligands.

High-throughput generation of bispecific molecules promises to expedite the discovery of new molecular therapeutics and guide engineering of novel multifunctional constructs. However, high synthesis complexity and cost have hampered the discovery of bispecific molecules in drug development and biomedical research. Herein we describe a simple solid-phase bioconjugation procedure for preparation of Protein A(G,L)-PEG-Streptavidin heterobifunctional adaptors (with 1:1:1 stoichiometry), which enable self-assembly of unmodified antibodies and biotinylated molecules into bispecific targeting ligands in a versatile mix-and-use manner. Utility of such adaptors is demonstrated by assembly of anti-CD3 and anti-Her2 antibodies into bispecific CD3xHer2 targeting ligands, which efficiently drive T-cell-mediated lysis of Her2-positive cancer cells. In comparison to bioconjugation in solution, the solid-phase procedure described here offers precise stoichiometry control, ease of purification, and high yield of functional conjugates. Simplicity and versatility should prove this methodology instrumental for preparation of bispecific ligands, as well as for high-throughput screening of bispecific combinations, before proceeding to synthesis of lead candidates via recombinant engineering or chemical cross-linking.

Supercritical fluid deposition of compositionally uniform yttria stabilized zirconia films

We report the formation of yttria stabilized zirconia (YSZ) thin films by supercritical fluid deposition (SFD) in carbon dioxide at 20MPa and a stage temperature of 300°C via hydrolysis of zirconium(IV) hexafluoroacetylacetonate and yttrium(III) hexafluoroacetylacetonate. Post-deposition annealing of the films at 800°C yields crystalline films having the expected fluorite structure as evidenced by X-ray diffraction. Such films are suitable for the fabrication of electrolyte thin films for micro-solid oxide fuel cells (μ-SOFC). We show that a cyclic co-deposition process in which aliquots of precursor are introduced sequentially enables the depostion of YSZ thin films with uniform composition as evidenced by X-ray photoelectron spectroscopy. In each cycle, the mixed precursor solution in CO2 is introduced to the reactor and then purged following a short reaction interval. By contrast, simple batch SFD processes that employ hydrolysis of the mixed precursors introduced at the onset of the depositions lead to non-uniform distributions of the cations throughout the thickness of the films. The cyclic deposition approach extends supercritical fluid deposition to materials such as multi-cations oxides for which precise control of stoichiometry is required.

Transparent semiconducting Nb-doped anatase TiO2 films deposited by helicon-wave-excited-plasma sputtering

The authors report stoichiometry control and postdeposition annealing-free fabrication of Nb-doped transparent anatase TiO2 (A-TiO2:Nb) films on alkaline-free glass substrates by helicon-wave-excited-plasma sputtering. The films tended to crystallize in the stable electrically semi-insulating rutile phase. However, although the appropriate deposition condition window was narrow, precise stoichiometry control using near-reducing ambient, namely, the deposition temperature higher than 450 °C and O2 partial pressure (PO2) in the range between 5×10−4 and 1×10−2 Pa, enabled the deposition of a high refractive index semiconducting anatase phase. The electron concentration of the A-TiO2:Nb films increased with increasing Nb concentration up to Ti0.907Nb0.093O2. The results indicate that the Nb5+ donor on the Ti4+ site can be activated under near-reducing atmosphere where unwanted compensating defects may be passivated. As a result, anatase Ti0.907Nb0.093O2 film deposited at 500 °C and PO2=5×10−4 Pa exhibited a resistivity of 3.4×10−3 Ω cm and an optical transmittance higher than 90%. The refractive index of A-TiO2:Nb was found to be approximately 2.63 at 450 nm with spectroscopic ellipsometry, which is comparable to the InGaN alloys.

Polypeptide grafted hyaluronan: synthesis and characterization.

Poly(l-leucine) grafted hyaluronan (HA-g-PLeu) has been synthesized via a Michael addition reaction between primary amine terminated poly(l-leucine) and acrylate-functionalized HA (TBAHA-acrylate). The precursor hyaluronan was first functionalized with acrylate groups by reaction with acryloyl chloride in the presence of triethylamine in N,N-dimethylformamide. (1)H NMR analysis of the resulting product indicated that an increase in the concentration of acryloylchoride with respect to hydroxyl groups on HA has only a moderate effect on functionalization efficiency, f. A precise control of stoichiometry was not achieved, which could be attributed to partial solubility of intermolecular aggregates and the hygroscopic nature of HA. Michael addition at high [PLeu-NH(2)]/[acrylate](TBAHA) ratios gave a molar grafting ratio of only 0.20 with respect to the repeat unit of HA, indicating grafting limitation due to insolubility of the grafted HA-g-PLeu. Soluble HA-g-PLeu graft copolymers were obtained for low grafting ratios (<0.039) with <8.6% by mass of PLeu and were characterized thoroughly using light scattering, (1)H NMR, FT-IR, and AFM techniques. Light scattering experiments showed a strong hydrophobic interaction between PLeu chains, resulting in aggregates with segregated nongrafted HA segments. This yields local networks of aggregates, as demonstrated by atomic force microscopy. Circular dichroism spectroscopy showed a β-sheet conformation for aggregates of poly(l-leucine).

Results of onco-geriatric collaboration meetings (RCOG) within the Geriatric Oncology Program of Lyon, France

In this work, hyaluronan (HA) was grafted by a novel and an efficient mixed anhydrides methodology with (hetero)-aryl and aliphatic acrylic moieties suitable for cross-linking. A precise control of stoichiometry was achieved. Derivatives with degree of substitution (DS) below 20% did not show self-crosslinking. Due to mild reaction conditions, a negligible degradation of the polysaccharide was obtained. The influence of the feed components on the reaction efficiency and DS were studied up to 200 g/batch. The structure of the modified HA was characterized by Infrared Spectroscopy, Nuclear Magnetic Resonance, SEC-MALS and chromatographic analyses. Enzymatic degradation of derivatives was performed and isolated dimers demonstrated to be non-cytotoxic. The feasibility of the grafted HA for electrospinning with subsequent photo-crosslinking to avoid nanofibers water dissolution was demonstrated. The biocompatibility of the material, its degradation products, and the formation of honeycomb porous structures also proved the potential of the material for future in vivo applications.

Plasma electrochemistry: electroreduction in a flame

The manipulation of electron transfer reactions at surfaces forms the cornerstone of electrodeposition and processing of materials on substrates with precise control of stoichiometry and oxidation state. However, the utility of this technique, which is mainly carried out in liquid electrolytes, is ultimately limited by the electrolysis of the solvent which limits a potential window to at best 4.8 V in nonaqueous solutions (A. J. Bard and L. R. Faulkner, Electrochemical Methods: Fundamentals and Applications, Wiley, New York, NY, 2nd edn, 2001; ref. 1) and can be up to 6 V in ionic liquids (A. P. Abbott, K. J. McKenzie, Phys. Chem. Chem. Phys., 2006, 8, 4265-4279; ref. 2). A long-sought-after goal has been to develop a corresponding technique at the solid/gas interface in the absence of a solvent which will allow in principle a potential window in excess of 100 V (J. M. Goodings, J. Guo, A. N. Hayhurst and S. G. Taylor, Int. J. Mass Spectrom., 2001, 206, 137-151; ref. 3). This extended potential window will enable chemistry at the solid/gas interface that is not possible at the solid/liquid interface. Here we describe a new approach to gas-phase electrochemistry using a flame plasma as the electrolyte medium. We demonstrate the controlled electrochemical reduction of Cu(+) to Cu(0) at an electrode surface in a flame environment with resulting deposition of either Cu(2)O or Cu species on conducting diamond electrodes. This approach is novel in that it involves the application of an electrochemical potential difference to change the redox state of surface confined species, not the measurement of flame bore ions (as in flame ionisation detectors). This new technique will permit deposition of films and particles on surfaces with control over the oxidation state of the species. This will provide a valuable enhancement to the capabilities of materials preparation methods such as flame spray deposition.

Synthesis and characterization of Sr 1− xMg xTiO 3 obtained by the polymeric precursor method

Strontium titanate (SrTiO 3; STO), a semiconductor displaying the perovskite structure, has been extensively studied, both as thin films and as powders, due to its high dielectric constant, good capacitance, and other properties. In the present work, the synthesis of Mg-substituted SrTiO 3 powders was studied using the polymeric precursor method. This method, also known as the Pechini method, has many advantages such as chemical homogeneity of multicomponents at the molecular scale and a direct and precise control of stoichiometry in complex systems at relatively low temperatures. The powders were characterized by thermogravimetry (TG)/differential thermal analysis (DTA). After the heat treatment between 600 and 1000 °C, the powders were characterized by X-ray diffraction (XRD) and infrared spectroscopy (IR). Thermal analysis results indicate successive exothermic and endothermic steps. After crystallization, a single-phase material was obtained for samples containing less than 20 % of Mg. The crystallite size was nanometric and a high crystallinity was obtained. Infrared spectroscopy indicated vibration bands characteristic of carbonates and metallic oxides.

Metal-Organic Chemical Vapor Deposition and Characterization of Strontium Bismuth Tantalate (SBT) Thin Films

The metal-organic chemical vapor deposition (MOCVD) of ferroelectric thin films is being widely investigated for the manufacture of devices requiring a high density of volatile or non-volatile memory which goes beyond the limits of current mass production techniques. One of the more important challenges in the MOCVD of multi-component oxide thin films is the precise control of stoichiometry which relates directly to the films' electrical characteristics. A novel approach to liquid precursor delivery embodied in the AIXTRON TriJetTM liquid delivery system is reported. Physical and electrical properties of thin films as well as deposition characteristics as a function of various process parameters are described in detail. Most notably 2Pr=13 µC/cm2 at 5 V with leakage current density Jl=1E-8 A/cm2 @≤5 V were obtained. In addition, films with excellent thickness uniformity with 3σ=2.25% at 180 nm were deposited on 6′′ Pt/TiOx/Si wafers. Finally, near 100% step coverage with a maximum 2:1 aspect ratio (0.5 µm) was achieved.