AbstractSurface modification techniques play an important role in adjusting the physicochemical properties of titanium and its alloys. To reduce the penetration of alloying element ions into the body, various types of oxide coatings are used to protect it from the corrosive environment. Another important issue related to the surface layer requirement is ensuring an appropriate set of mechanical properties. Accordingly, in this study, the mechanical and electrochemical properties of the silicon dioxide layers formed by the deposition of nano physical vapor deposition on the surface of titanium and titanium 13‐niobium 13‐zirconium alloy samples were investigated. To evaluate the mechanical properties of the layers produced by this method, hardness tests were carried out, as well as tests on the adhesion of these layers to the metal substrate. On the other hand, electrochemical properties were studied using potentiodynamic measurements to assess the resistance to pitting corrosion, followed by impedance measurements to interpret the processes and phenomena occurring at the silicon dioxide layer/electrolyte interface. The data obtained showed different mechanical and electrochemical properties of the silicon dioxide layers generated with varying process parameters.