This paper introduces a scheme of near-zero beam drift tracking technology with two-stage compression structures for the coordinate accuracy measurement of a laser tracker. The Galileo telescope system, with a magnification of 21.43, is designed to compress the beam drift in a dual-frequency interferometer. The azimuth and pitch of the beam drift are compressed to 2.41in. and 2.92in., and the compression rates are 95.0% and 91.9%, respectively. The improved four degrees of freedom position-sensitive detector system is used to further compress the beam drift. The peak-to-peak value of the beam drift is 0.9in. in the azimuth direction and 2.1in. in the pitch direction. The standard deviation of azimuth is within 0.15in, and the pitch is within 0.43in. The coordinate accuracy of the laser tracker can be improved 6.85 parts per million by simulation. The developed two-stage compression near-zero beam drift system can be used in the laser tracker to realize large-scale precision instrument geometric measurement.
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