To investigate the effect of ion recombination ( ) and polarity ( ) correction factors on percentage depth dose (PDD) curves for three ion chambers, using flat and flattening filter free (FFF) beams, across different broad field sizes. A method to assess these effects and their corresponding corrections is proposed. and were evaluated following the IAEA TRS-398 protocol for three ion chambers: PTW Semiflex-3D-31021, PinPoint-3D-31022, and Semiflex-31010. PDD measurements were acquired from dmax to 32cm depth at four voltages (±400V or±300V, and±100V) for field sizes 4×4, 10×10, 20×20, and 40×40 cm2. The values were computed after the correction at each applied voltage. This study aimed to assess the variation of the factors along scanning depths for different field sizes, to evaluate the need for correcting the scanning data. was independent of depth and field size for Semiflex-3D, while it presented an increasing value with depth for the PinPoint-3D. increased with dose rate, i.e., decreased with depth. The variation of this perturbation effect over the PDD range was about 0.1% for flat beams with all three ion chambers. With FFF beams, it was around 0.3% with PinPoint-3D, and 0.8% for 10FFF with Semiflex-3D. A second-order polynomial fit can be determined to directly correct the raw data scanned along the beam axis for both and . can significantly affect the PDD scanning measurements in FFF beams acquired with Semiflex-3D. An error close to 1% at large depths could be present, meaning an error of less than 0.3% relative to the dose at the depth of dmax.