The subsurface defects (SSD) of optical elements have a significant impact on the service life and laser damage threshold of the inertial confinement nuclear fusion optical system. Due to the optical diffraction limit, fluorescence microscopy has limited image resolution for detecting SSD in optical elements, making it challenging to meet the requirements for precision detection. A super-resolution method is proposed in this paper for detecting SSD in optical elements based on the fluorescence polarization characteristics of CdSe/ZnS quantum dots fluorescence dichroism. By enhancing the imaging sparsity of adjacent fluorophores through a polarization modulated excitation laser and utilizing the fluorescence polarization modulation algorithm, the resolution is achieved beyond the optical diffraction limit. The results demonstrate that the proposed method in this paper can obtain super-resolution images of SSD in optical elements with at least a two-fold increase in lateral resolution. This approach effectively improves detection accuracy for SSD and holds significant guiding significance. In addition, it also has application value for assessing the quality of high-precision optical elements.
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