Plasma Reactor Research Articles

The Gasification and Pyrolysis of Biomass Using a Plasma System

This research paper analyzes the use of plasma technology to process biomass in the form of dried, mixed animal manure (dung containing 30% moisture). The irrational use of manure as well as huge quantities of it can negatively impact the environment. In comparison to biomass fermentation, the plasma processing of manure can greatly enhance the production of fuel gas, primarily synthesis gas (CO + H2). The organic part of dung, including the moisture, is represented by carbon, hydrogen, and oxygen with a total concentration of 95.21%, while the mineral part is only 4.79%. A numerical analysis of dung plasma gasification and pyrolysis was conducted using the thermodynamic code TERRA. For 300–3000 K and 0.1 MPa pressure, the dung gasification and pyrolysis were calculated with 100% dung + 25% air and 100% dung + 25% nitrogen, respectively. Calculations were performed to determine the specific energy consumption of the process, the composition of the products of gasification, and the extent of the carbon gasification. At 1500 K, the dung gasification and pyrolysis consumed 1.28 and 1.33 kWh/kg of specific energy, respectively. A direct-current plasma torch with a power rating of 70 kW and a plasma reactor with a dung processing capacity of 50 kg/h were used for the dung processing experiments. The plasma reactor consumed 1.5 and 1.4 kWh/kg when pyrolyzing and gasifying the dung. A maximum temperature of 1887 K was reached in the reactor. The plasma pyrolysis of dung and the plasma–air gasification of dung produced gases with specific heats of combustion of 10,500 and 10,340 kJ/kg, respectively. Calculations and experiments on dung plasma processing showed satisfactory agreement. In this research, exergy analysis was used to quantify the efficiency of the plasma gasification of biomass. One of the research tasks was to develop a methodology and establish standards for the further standardization of monitoring the toxic emissions of dioxins, furans, and Benzo[a]pyrene.

Investigation of highly efficient CO2 hydrogenation at ambient conditions using dielectric barrier discharge plasma

The increasing utilization of CO2 for synthesizing high-value fuels or essential chemicals is a potentially effective approach to mitigating global warming and climate change. Compared to thermal catalytic CO2 conversion under hash operating conditions (400∼500°C, 10 MPa), non-thermal plasma can overcome kinetic barriers and trigger reactions beyond thermal equilibrium at ambient temperature and pressure. In this study, the effects of operating conditions (discharge frequency, input power, and gas flow rate) and geometrical parameters (discharge length, discharge gap, and dielectric materials) have been extensively analyzed using typical cylindrical dielectric barrier discharge (DBD) plasma. The discharge characteristics changed by operating conditions (including waveforms of applied voltage and current) are compared, indicating higher applied voltage and lower gas flow rate can strengthen the filamentary discharges. The results demonstrate CO2 conversion rate increases with the increase of applied voltage and the decrease of CO2/H2 ratio, achieving its maximum value of 43.0% at 20 mL/min. The highest energy efficiency of 3771.9 μg/kJ for CO generation is obtained at the applied voltage of 5.5 kV and gas flow rate of 40 mL/min, respectively. Besides, the constructure of plasma reactor also impacts the performance of CO2 conversion. On the one hand, the discharge gap has a significant role in the variation of CO2 conversion and product selectivity, which is attributed to the electric field density and corresponding electron-induced reaction. On the other hand, the circulating water-cooling jacket was used to find out the influence of reaction temperature, which switched the product from CO to CH4. This work will pave the way for a sustainable alternative towards future CO2 conversion and utilization.

Theoretical study of particle and energy balance equations in locally bounded plasmas

In this study, new particle and energy balance equations have been developed to predict the electron temperature and density in locally bounded plasmas. Classical particle and energy balance equations assume that all plasma within a reactor is completely confined only by the reactor walls. However, in industrial plasma reactors for semiconductor manufacturing, the plasma is partially confined by internal reactor structures. We predict the effect of the open boundary area ( ) and ion escape velocity ( ) on electron temperature and density by developing new particle and energy balance equations. Theoretically, we found a low ion escape velocity ( / ) and high open boundary area ( ) to result in an approximately 38% increase in electron density and an 8% decrease in electron temperature compared to values in a fully bounded reactor. Additionally, we suggest that the velocity of ions passing through the open boundary should exceed under the condition .

Temperature-Dependent Kinetics of Plasma-Based CO2Conversion: Interplay of Electron-Driven and Thermal-Driven Chemistry.

The transformation of CO2 into chemical building blocks for various industries is considered a key technology in a net-zero energy future. To realize this, plasma discharges are one of the most promising approaches thanks to their electron-driven reactions and high operational flexibility. Most studies focused on room-temperature and vibrationally-excited discharges, however, lately, the importance of thermal reactions is considered. Therefore, we developed a temperature-dependent plasma-chemical reaction mechanism to investigate the temperature dependence of plasma-based CO2 conversion. Here, we present the various effects of thermally-driven reactions on the CO2 conversion as a function of the gas temperature and specific energy input. Our analysis pinpointed the key reactions controlling the plasma-based CO2 conversion, shifting from an electron-driven to a thermal-driven regime. Additionally, we used the mechanism to verify the theoretical upper boundary of the process' energy efficiency, and discussed how our findings could lead to the further development and optimization of plasma discharges for efficient CO₂ conversion in the future.

Discharge characteristics of silicon-based DC Helium microplasmas: comparison between Through Silicon Via and closed cavity type micro-reactors

Abstract This paper explores the microfabrication process of plasma reactors, from the production of micro-reactors to the addition of Through Silicon Vias (TSV) using proprietary etching techniques and on site cleanroom facilities. The investigation focuses on both newly fabricated closed and open-cavity Micro-Hollow Cathode Discharge (MHCD) reactors, with particular emphasis on electrical and optical diagnostics to characterize their plasma properties. All experiments, including those on closed-cavity reactors, were specifically conducted for this study under identical conditions to ensure a rigorous comparison between reactor types. When electrical diagnostics were carried out in helium at various pressures, interesting phenomena such as the evolution of voltage breakdown were observed. These diagnostics also provided new insights into the impact of surface electrode and overall geometry properties and pressure on reactor performance. 
Additional investigation into instability mechanisms revealed self-pulsing oscillations, with different reactor types having different oscillation amplitudes for similar operating conditions. Optical emission spectroscopy (OES) emerged as a strong tool for spatial plasma analysis, revealing consistent gas temperature distributions across reactor diameters. The Inglis-Teller series provided an estimate of the upper limit of electron density, while the Stark broadening analysis of Hα offered valuable insights into electron density variations, particularly in the self-pulsing regime.

Towards the Understanding of Parameters Allowing to Anticipate the Precipitation Reaction of Metallic Precursors in Humid Air Gliding Arc Plasma Reactor

Towards the Understanding of Parameters Allowing to Anticipate the Precipitation Reaction of Metallic Precursors in Humid Air Gliding Arc Plasma Reactor

Effects of operational parameters on fuel gas production from DC-transferred arc plasma processing of sewage sludge

ABSTRACT In this work, a DC-transferred arc plasma reactor was used to investigate the influence of operating parameters on the process of gas production from sewage sludge treatment. By varying the operating temperature, feedstock feed rate and exhaust gas flow, the study aims to elucidate the physicochemical mechanisms during plasma treatment. The sewage sludge from the municipal wastewater treatment plant has an ash content of 40.5%, consisting mainly of Si, Al, Fe and Ca (>75%), and a complex organic fraction containing carbonyls, amines and amides. At a constant mass of feedstock (without feed rate), the gas produced by the plasma treatment was obtained with a maximum syngas fraction of 86% and a heating value of 10,000 kJ/m3, while the process operated at a constant sludge feed rate of 300 g/min increased the volumetric fraction of the syngas to 95% and the heating value to 12,000 kJ/m3.

Enhancing the combustion of silicon nanoparticles via plasma-assisted fluorocarbon surface modification

Nanostructured silicon has great potential as an energetic material due to its high energy density, close to that of aluminum; however, its combustion kinetics are strongly affected by the presence of a native oxide layer. As the particle size is reduced, the material behavior is dominated by surface effects, highlighting the need for new approaches to fabricate silicon nanoparticles and precisely control their surface chemistry. Here, we describe the use of low-temperature plasma to nucleate and grow < 10 nm silicon particles. The resulting aerosol is passed through a second plasma reactor, to which a fluorocarbon monomer is supplied. The second plasma initiates the growth of a polymeric shell onto the silicon particles, resulting in a highly conformal coating. Chemical analysis confirms that the polymer shell is compositionally similar to polyvinylidene fluoride (PVDF). We find that the fluorocarbon shell acts as an artificial passivation layer that significantly delays the onset of oxidation in air. In addition, the direct contact between the fluorocarbon shell and silicon core lowers the ignition temperature compared to the physical mixtures of silicon nanoparticles and PVDF. It leads to a higher pressurization rate and a lower combustion time when tested in a combustion cell. This is consistent with the combustion process being initiated by the exothermic interfacial reactions between the silicon core and the fluorocarbon shell. Mass spectroscopy confirms this hypothesis because silicon fluoride is produced only for the core–shell structure, and not for a physical mixture of silicon and PVDF. This study provides an example of a new processing technique capable of controlling the interfacial chemistry of small nanoparticles with beneficial effects on their combustion.

Investigating instabilities in magnetized low-pressure capacitively coupled RF plasma using particle-in-cell (PIC) simulations

The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell model. Three distinct regimes of plasma behavior can be identified as a function of the magnetic field. In the first regime at low magnetic fields, asymmetric plasma profiles are observed within the CCP chamber due to the effect of E→×B→ drift. As the magnetic field increases, instabilities develop and form self-organized spoke-shaped structures that are distinctly seen within the bulk plasma closer to the sheath. In this second regime, the spoke-shaped coherent structures rotate inside the plasma chamber in the −E→×B→ direction, where E→ and B→ are the DC electric and magnetic field vectors, respectively, and the DC electric field exists in the sheath and pre-sheath regions. The spoke rotation frequency is in the megahertz range. As the magnetic field strength increases further, the rotating coherent spokes continue to exist near the sheath. The coherent structures are, however, accompanied by new small-scale incoherent structures originating and moving within the bulk plasma region away from the sheath. This is the third regime of plasma behavior. The threshold values of the magnetic field between these regimes were found not to vary with changing plasma reactor geometry (e.g., area ratio between ground and powered electrodes) or the use of an external capacitor between the RF-powered electrode and the RF source. The threshold values of the magnetic field between these regimes shift toward higher values with increasing gas pressure. Analysis of the results indicates that the rotating structures are due to the lower hybrid instability driven by density gradients and electron-neutral collisions. This paper provides guidance on the upper limit of the magnetic field for instability-free operation in low-pressure CCP-based semiconductor deposition and etch systems that use the external magnetic field for plasma uniformity control.

Design of a continuous plasma activated water (PAW) disinfection system for fresh produce industry

This study introduces an innovative, industrial-scale continuous Plasma Activated Water (PAW) system, specifically designed for the fresh produce industry and optimized for micro to small enterprises. The system leverages a novel non-uniform electrode design to enhance average field strength, driving the efficient generation of reactive oxygen and nitrogen species (RONS) for steady-state PAW production. Key components include a venturi bubble generator for optimized gas-liquid interaction and a plasma reactor integrated with a continuous spray and drying setup, enabling consistent PAW production and application. Our preliminary results indicate about 1.5 log10 CFU/g decrease in microbial load on treated produce, which further decreased to 2.5 log10 CFU/g towards the end of storage life for tomatoes, with 20 kV applied to the reactors and a total residence time of 20 min. An evaluation of the maximum energy consumption of system indicated a process cost contribution of less than $0.5 per ton of treated produce. The promising initial results, scalable design, cost-effectiveness and sustainability aspects make this technology suitable for improving food safety while reducing chemical usage.

Operating Characteristics of a Wave-Driven Plasma Thruster for Cutting-Edge Low Earth Orbit Constellations

This paper outlines the development phases of a wave-driven Helicon Plasma Thruster for cutting-edge Low Earth Orbit (LEO) constellations. The two-stage ambipolar electric propulsion (EP) system combines the efficient ionization of an ultra-compact helicon reactor with plasma acceleration based on an ambipolar electric field provided by a magnetic nozzle. This paper reveals maturation challenges associated with an emerging EP system in the hundreds-watt class, followed by outlook strategies. A 3 cm diameter helicon reactor was operated using argon gas under a time-modulated RF power envelope ranging from 250 W to 500 W with a fixed magnetic field strength of 400 G. Magnetically enhanced inductively coupled plasma reactor characteristics based on half-wavelength right helical and Nagoya Type III antennas under capacitive (E-mode), inductive (W-mode), and wave coupling (W-mode) were systematically investigated based on Optical Emission Spectroscopy. The operation characteristics of a wave-heated reactor based on helicon configuration were investigated as a function of different operating parameters. This work demonstrates the ability of two-stage HPT using a compact helicon reactor and a cusped magnetic field to outperform today’s LEO spacecraft propulsion.

Numerical investigation of lean methane flame response to NRP discharges actuation

This study investigates the response of a laminar methane-air flame to Nanosecond Repetitively Pulsed (NRP) discharges in a canonical wall-stabilized burner using a combined experimental and numerical approach. The flow and flame behaviors were modeled using Direct Numerical Simulation (DNS) with an Analytically Reduced Chemistry for a precise chemical description. A phenomenological model incorporating detailed plasma kinetics and experimental observations was developed to simulate plasma effects. Zero-dimensional plasma reactor simulations were used to build up a reduced-order model describing discharge energy distribution in the specific conditions studied. Experimental measurements of electrical profiles identified two discharge regimes: a low-energy Corona discharge and a higher-energy Glow discharge, characterized by distinct spatial energy distributions. Experimental flame response analysis revealed three major phases: marginal response up to 100 pulses, a downstream shift of the flame tip, and stabilization after 400 pulses. Numerical simulations indicated that the Corona regime is crucial for explaining initial flame responses, while the Glow regime influences later stages. Adjustments in the Vibrational-Translational (VT) energy relaxation time and energy deposition ratios between fresh and burnt gases were necessary to match experimental observations. Additionally, an accurate modeling of the transient and steady-state flame responses requires integrating both the specificity of the Corona and the Glow discharge regimes. Future work should focus on measuring or theoretically calculating N2(v) relaxation times in CH4-H2O-CO2 mixtures and analyzing the spatial energy distribution of discharges interacting with flames to enhance plasma-combustion coupled models.Novelty and significanceIn this work, a phenomenological plasma-assisted combustion model has been developed, to investigate a laminar premixed stagnation plate burner, focusing on VT energy relaxation time and spatio-temporal energy distribution modeling. For the first time, not only O2, N2 and O but also the fuel and combustion intermediates and products have been considered in the VT relaxation model. It revealed their strong influence on the overall flame response in a case where the discharge crosses a flame front, highlighting the strong beneficial effect of energy deposited in vibrational form. The study questions and investigates the energy distribution from fresh to burnt gases, challenging the conventional uniform energy distribution assumption. The experimental identification of two specific plasma regimes was necessary to predict the transient flame response. Additionally, energy deposited downstream of the flame, in fresh gases, was found to more efficient than in hot gases to enhance combustion.

Application of Response Surface Methodology for the Optimization of Operating Conditions of a Self‐Pulsing Discharge (SPD) Plasma Reactor for the Degradation of Perfluorooctanoic Acid (PFOA) in Water

ABSTRACTThis study explores atmospheric plasma as a novel approach for the degradation of persistent per‐ and polyfluoroalkyl substances (PFAS) in contaminated waters. Using response surface methodology and Box–Behnken design, the performance of the self‐pulsing discharge (SPD) reactor was optimized by adjusting the following independent factors: input power, plasma area‐to‐liquid volume ratio, and argon bubbling time. Optimization was assessed using four specific indicators: kPFOA and G50, for the process velocity and energy efficiency, respectively; kPFOA/kPFHpA and ΣPFAS/C0, both for the presence of PFAS in the treated water for the process products. Under the optimized operating conditions, residual PFAS summed up to only 2.4% of the carbon initially present as PFOA, and a remarkable G50 value of (523 ± 10) mg/kWh was obtained.

Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures

Abstract The Bosch process was studied at a substrate temperature of −100 °C and compared to etchings performed at room temperature, as in the general case. The tests were realized using an inductively coupled plasma reactor by varying C4F8 passivating gas flow injections both at +20 °C and −100 °C. It was observed that the Bosch process is effectively temperature dependent and that the necessary C4F8 passivating gas flow can be reduced to obtain similar anisotropic profiles at −100 °C compared to the ambient temperature process. For example, in one of the studied cases, a fluorocarbon injection of 8 sccm was sufficient to obtain an anisotropic etch rate of up to 4.4 μm min−1 at −100 °C whereas the profile obtained at +20 °C using the same parameters presents lateral etching defects with a reduced etch rate of 2.4 μm min−1. At this point, the C4F8 flow must be increased to 12 sccm (50% more) to retrieve an anisotropic profile with an etch rate of 4.0 μm min−1. In the case of cryogenic Bosch (cryo-Bosch) processing, C4F8 feed dosing has a greater influence on the passivation regime which affects the subsequent etching result but it can be easily refined through the optimization of process parameters. An in-situ ellipsometry study of the deposition rate of C4F8 on both polycrystalline silicon (p-Si) and SiO2 substrates was realized by varying the gas flow at −100 °C and +20 °C. This study shows that the deposited fluorocarbon material is approximately a hundred times thicker at cryogenic temperatures using the same process parameters. Scanning electron microscopy (SEM) observation of these samples are in adequacy with the ellipsometry results. Cryo–Bosch etching also results in a slightly higher etch rate compared to room temperature processing when analyzing similar anisotropic profiles. Si:SiO2 etching selectivity is significantly increased at −100 °C although the aspect-ratio dependent etching phenomenon is more important.

Oxygen atom activated ZIF-67/carbon cloth in plasma system for CO2 reduction

ZIF-67 was grown in situ on carbon cloth (CC) using a simple one-step method. The prepared ZIF-67/CC electrodes exhibited excellent CO2 reduction reaction (CO2RR) performance in a dielectric barrier discharge plasma reactor. The highest concentrations of produced formic acid and formaldehyde were 9.16 and 0.068 mmol L−1 at a reaction time of 1 h, respectively. The high performance is related to the unique high aspect ratio structure and pad-like cavity of ZIF-67, which results not only in an increase in the specific surface area for CO2 adsorption but also in the hydrophobicity of the electrode. Unexpectedly, the superoxide radical (·O2−) greatly affects the reduction performance of the electrode. In addition, the ZIF-67/CC electrode maintained good CO2RR performance in the presence of different pollutants, and the production of formic acid and formaldehyde increased to 10.81 and 0.11 mmol L−1 at 1 h with the addition of 10 mg L−1 phenol. This research provides new directions in the field of plasma catalysis.

Plasma-assisted NH3 cracking in warm plasma reactors for green H2 production

NH3 is emerging as a carrier of green H2, but it requires a green and economical NH3 cracking process based on renewable energy. Plasma technology is promising for this purpose, as it can crack NH3 without the need for a catalyst and is highly compatible with renewable electricity, reducing the environmental footprint of the cracking process. This work investigates the NH3 cracking performance of four different warm plasma reactors with different configurations and operating in a wide range of conditions. We show that the NH3 conversion in warm plasma reactors is primarily determined by the specific energy input, with the main difference observed in the energy cost (EC) of cracking. The lowest EC obtained is 146 kJ/mol but at a conversion of only 8 %. A more reasonable conversion of around 50 % yields an EC of around 200 kJ/mol in two of the reactors investigated. Plasma reactors operating at higher feed flow rates are more efficient and yield a higher H2 production rate. Our data indicate that NH3 cracking in these warm plasma reactors occurs mainly via thermal chemistry, with non-thermal plasma chemistry playing a less prominent role. NH3 decomposes not only inside the plasma core but also in a hot volume around it, which reduces the EC. Our study shows that warm plasmas are significantly more efficient for NH3 cracking than cold plasmas, even when the latter are combined with catalysts.

Lifetime of nitric oxide produced by surface dielectric barrier discharge in controlled atmospheres: Role of O2 content

Nitric oxide (NO) is an invaluable multifunctional chemical in agri-food applications; for example, it plays a role in plant growth, development, and stress tolerance. One of the interesting implications of NO is the suppression of fruit ripening and the resulting increase in shelf life. Since a high concentration of NO is producible in atmospheric plasmas, increasing attempts in plasma agriculture have been made to study several types of plasma reactors operated in air. However, as NO is rapidly oxidized by oxygen (O2) and/or ozone (O3), the use of NO produced in atmospheric plasmas is naturally nontrivial, and the lifetime of NO is highly sensitive to the reactor environments. Here, we investigated the time development of O3 and nitrogen oxides (NOx=1–3) in a surface dielectric barrier discharge (sDBD) reactor with respect to the O2 content of the controlled atmosphere (N2+O2). In situ optical absorption spectroscopy enabled the observation of the dynamics of O3 and NOx under gas-tight conditions. In these plasma reactors, NO became a dominant species after the chemical mode transition from O3 to NO occurred. We found that a lower O2 content correlated to a faster appearance of NO in the plasma reactor. The NO lifetime significantly increased as the O2 content decreased from 20 to 5 % in the plasma reactor, while the maximum concentration of NO decreased. Our findings indicated that the appropriate control of the O2 content is essential in atmospheric plasma reactors dependent on O3 and/or NOx applications.

Experimental investigation and Monte Carlo simulation of landfill leachate treatment using physicochemical method and a non-thermal plasma reactor

ABSTRACT Leachate treatment is one of the challenging subjects in the field of waste management. Leachate as a dumpling sites hazardous byproduct due to the high concentration of chemical oxygen demand (COD) and toxic compounds with dark colour is a potential pollutant of the environment, causing a lot of problems in the absence of treatment and direct discharge to the environment. In this study, the combinatory performance of sequential chemical flocculation and coagulation process and non-thermal plasma (NTP) technology on leachate from the Sarāvān city former controlled landfill, Iran, was investigated. The outcomes of Jar test illustrated that hydrated aluminium sulphate (PAC) was selected the best coagulant compared with hydrated aluminium sulphate (HAS) and ferric chloride (FC) to remove suspended solids and colour. The optimised parameters for 10% PAC pre-treatment were obtained 3 g lime and cationic 0.1 g polyelectrolyte per 1 litre of leachate. After pre-treatment by using jar test, NTP was used to remove turbidity, colour, COD and so forth. The sequential system-based all stages of pretreatment and NTP diminished the turbidity and colour removal to 98.6% and 99.2%, respectively. Furthermore, COD, BOD5, TSS, and TDS were also reduced. As a result, combination of pre-treatment and NTP technology are able to remove the landfill leachate effectively. Monte Carlo calculations exhibited that Al3+ and H2O2 had the most effects to decompose HA (Humic acid) compound in physicochemical pre-treatment and treatment stages.

Development and Testing of a Helicon Plasma Thruster Based on a Magnetically Enhanced Inductively Coupled Plasma Reactor Operating in a Multi-Mode Regime

A disruptive Electric Propulsion system is proposed for next-generation Low-Earth-Orbit (LEO) small satellite constellations, utilizing an RF-powered Helicon Plasma Thruster (HPT). This system is built around a Magnetically Enhanced Inductively Coupled Plasma (MEICP) reactor, which enables acceleration of quasi-neutral plasma through a magnetic nozzle. The MEICP reactor features an innovative design with a multi-dipole magnetic confinement system, generated by neodymium iron boron (NdFeB) permanent magnets, combined with an azimuthally asymmetric half-wavelength right (HWRH) antenna and a variable-section ionization chamber. The plasma reactor is followed by a solenoid-free magnetic nozzle (MN), which facilitates the formation of an ambipolar potential drop, enabling the conversion of electron thermal energy into ion beam energy. This study explores the impact of an inhomogeneous magnetic field on the heating mechanism of the HPT and highlights its multi-mode operation within a pulsed power range of 200 to 500 W of RF. The discharge state, characterized by high-energy electron-excited ions and low-energy excited neutral particles in the plasma plume, was analyzed using optical emission spectroscopy (OES). The experimental testing campaign, conducted under pulsed power excitation, reveals that, as RF input power increases, the MEICP reactor transitions from inductive (H-mode) to wave coupling (W-mode) discharge modes. Spectrograms, electron temperature, and plasma density measurements were obtained for the Helicon Plasma Thruster within its operational envelope. Based on OES data, the ideal specific impulse was estimated to exceed 1000 s, highlighting the significant potential of this technology for future LEO/VLEO space missions.

Enhancing CO2 conversion in a temperature-controlled DBD plasma reactor with HKUST-1 catalyst: Water removal and CuO/Cu2O-derived approach

Due to a synergy effect, using dielectric barrier discharge (DBD) plasma technology combined with catalysts for CO2 decomposition, a major contributor to global warming, is recognized as an effective approach to transforming CO2 into valuable products such as CO, which is a crucial feedstock for chemical synthesis. Herein, HKUST-1 was synthesized using the hydrothermal method for CO2 conversion in the DBD reactor. To enhance catalyst performance in the plasma region, HKUST-1 was treated with O2 plasma to increase its specific surface area. Additionally, HKUST-1 was calcined at 300 °C to produce the CuO/Cu2O catalyst. Since the recombination reaction in the CO2 conversion is increased at higher temperatures, the reactor heat is removed using fan cooling and a water circulation system. In the presence of the HKUST-1 catalyst, the CO2 conversion rate significantly increased by 132 %, 82 %, and 12 % in reactors operating without cooling, with fan cooling, and with water cooling circulation, respectively compared to the reactors without catalyst, at a flow rate of 50 ml/min and maximum input power. The catalysts have been characterized using a comprehensive suite of analytical techniques, including FTIR, XRD,TEM, SEM, EDS, and BET analysis. The BET analysis indicates that the specific surface area of HKUST-1 after O2 plasma treatment is increased by 52 %, which causes an increasing conversion rate of up to 18 %. The CuO/Cu2O catalyst demonstrated maximum CO2 conversion of 21 % at an input power of 140 W and achieved energy efficiency of 8.6 % at 40 W. The presence of oxygen vacancies within this catalyst enhances the process of CO2 decomposition.