High-power inductively coupled plasmas are commonly used in planetary entry simulations and are increasingly being used in electric propulsion applications. However, during the operation of the system, the walls of the quartz tube will crack and melt. Its thermodynamic behavior is key to ensuring the safe and reliable operation of the system, which is directly related to the distribution of thermal energy within the discharge volume. In this paper, the temperature and stress distribution of the quartz tube wall of an inductively coupled plasma generator at 27 kW–85 kW are described. A numerical simulation model was established to depict the interaction between the plasma and the quartz tube wall. In the field of experimental research, the temperature of the outer wall of the quartz tube was obtained by using a thermal imager, and a non-uniform B-spline difference method was proposed to fit the outer wall temperature of the quartz tube to eliminate the influence of the induction coil. It is found that the numerical simulation and experimental results show that the temperature is stable region, temperature rise area, temperature drop zone, and the high temperature region of the quartz tube wall is located in the coil area, and the high stress area is also located in this region. On this basis, the outer wall temperature and thermal stress of quartz tubes under different heat fluxes are studied. When the heat flux exceeds 18.6 kW/m2, the stresses in the coil area and downstream of the coil exceed the limit stress. Mechanical failures may occur in areas where the ultimate stresses are exceeded, and these results can provide theoretical data for the optimal design of high-power inductively coupled plasma generators.